Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 8-16-8

CY1F

LZ LL LW (Retraction end with no adjustment) Adjustment bolt For actuator cylinder mounting Hexagon socket head set screw XAH7 depth XL Set screws (4 positions) For shock absorber fixing Shock absorber (2 pcs.) CY1F10 to 25-AAL CY1F10 to 25-AAR L EA approx.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Allowable load mass mv (kg) Maximum operating pressure Pv (MPa) Cushion Stroke Model Stroke (mm) 25 30 1 5 0.3 Model CYP15 CYP32 CYP15 CYP32 8-17-6 6 Clean Room Rodless Cylinder Series CYP 15, 32 How to Order MX CYP 15 Z73 200 MTS MY Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

B T Y L Depth ED T 4-LD PA K 4-MM Counter bore depth C Thread depth M F MX MTS QW PB MY CY N A E depth EK MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Q + Stroke G CX Z + Stroke Stroke adjustment screw LW (inner cover) DA A -X 20HP H HL HA HA HI Data TA TA R

CYV

B T Y L Depth ED T 4-LD PA K 4-MM Counter bore depth C Thread depth M F QW PB N A E depth EK Q + Stroke G Z + Stroke Stroke adjustment screw (inner cover) LW A A HP H HL HA HA HI TA TA R 4-J Depth JK Thread depth PC (from counter bore surface) 2-P 2-Counter bore dia.

CYP

Allowable load mass mv (kg) Maximum operating pressure Pv (MPa) Model Cushion stroke Stroke (mm) 25 30 1 5 0.3 Model CYP15 CYP32 CYP15 CYP32 13 14 Series CYP Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage. These instructions indicate the level of potential hazard by a label of "Caution", "Warning" or "Danger".

CYPSeries

Allowable load mass mv (kg) Maximum operating pressure Pv (MPa) Model Cushion stroke 1 5 0.3 Model CYP15 CYP32 Stroke (mm) 25 30 CYP15 CYP32 1MPa = 145 psi 1 kg = 2.2046 lb 1Nm = 0.7375 ftlb 1in = 25.4mm 16 17 Series CYP Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

CYPSeries

Allowable load mass mv (kg) Maximum operating pressure Pv (MPa) Model Cushion stroke 1 5 0.3 Model CYP15 CYP32 Stroke (mm) 25 30 CYP15 CYP32 1MPa = 145 psi 1 kg = 2.2046 lb 1Nm = 0.7375 ftlb 1in = 25.4mm 16 17 Series CYP Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Maximum operating pressure Pv (MPa) 1 5 0.3 Model Allowable load mass mv (kg) Model Cushion stroke Stroke (mm) CYV15 CYV32 CYV15 CYV32 25 30 6

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

. *2 Excludes the PF2M725 *3 Made to order (Produced upon receipt of order) Flow ratio*2 100: 1 25 50 100 200 Flow range [L/min] Port size Smallest settable increment 0.1 0.01 0.05 0.02 0.3 0.5 1 2 3 5 10 0.01 1 0.001 PF2M701 0.02 2 C43, C6, 1/8 PF2M702 0.05 5 PF2M705 0.01 0.1 10 PF2M710 0.3 25 PF2M725 C6, N7, 1/8 0.5 50 PF2M750 0.1 1 100 PF2M711 C8, N7, 1/4 2 200 1 PF2M721 New New Compatible

PFxx-OMJ0005CN

8.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 8.3 C6 6 10.3 8.3 C8 8(5/16) 12 10 C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3

MY1

MY1B16/20 Stroke (LL) L PA 2 x 2-B counterbore depth C LD through-hole 4-MM depth M YW QW NW PB PG Q + Stroke Floating bracket mounting thread (2-JJ thread depth from bottom of counter bore KK) PC 1 LW M5 x 0.8 (Port) 2-T counterbore depth E M5 x 0.8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800)

CATALOG

Part No WX Y S d D R Gasket D I M E N S I O N S C E N T R A L I Z E D P I P I N G T Y P E 16~40 MY1H16G 22 6.5 4 4 8.4 1.1 C6 MY1H20G 24 8 6 4 8.4 1.1 MY1H25G 28 9 7 6 11.4 1.1 C9 MY1H32G 32 11 9.5 6 11.4 1.1 MY1H40G 36 14 11.5 8 13.4 1.1 C11.2 16,20,25,32,40 bottom piping LW H Part No A B C G GB H J K L LD (LL) LW M MY1H16 80 6 3.5 14 17 40 \M5X0.8 10 80 3.5 40 60 7 MY1H20 100 7.5 4.5 12.5

MY1

WX S 1.1 8.4 Bottom side (section ZZ ) piping (applicable O-ring) 2-4 Y Port sizes for bottom side centralized piping (mm) Y Applicable gasket Model S WX MY1 W16G MY1 W20G 6.5 30 9 C6 8 32 6.5 93 (Machine the mounting side according to the sizes above.)

A

Part No WX Y S d D R Gasket D I M E N S I O N S C E N T R A L I Z E D P I P I N G T Y P E 16~40 MY1H16G 22 6.5 4 4 8.4 1.1 C6 MY1H20G 24 8 6 4 8.4 1.1 MY1H25G 28 9 7 6 11.4 1.1 C9 MY1H32G 32 11 9.5 6 11.4 1.1 MY1H40G 36 14 11.5 8 13.4 1.1 C11.2 16,20,25,32,40 bottom piping LW H Part No A B C G GB H J K L LD (LL) LW M MY1H16 80 6 3.5 14 17 40 \M5X0.8 10 80 3.5 40 60 7 MY1H20 100 7.5 4.5 12.5

Certificate), Made to Order: X731 (Compatible with Argon and Carbon Dioxide Mixed Gas)

Rated Flow Range: 50 (0.5 to 50 L/min), Flow Adjustment Valve: None (Straight), Port Size: C6 (ø6), Output Specification: L (Out 1: IO-Link or NPN/PNP), Lead Wire: Q (w/M12 Conversion Lead Wire and Connector, 0.1m), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: None, Made to Order: X731 (Compatible with Argon and Carbon Dioxide

Rated Flow Range: 50 (0.5 to 50 L/min), Flow Adjustment Valve: L (No Flow Adjustment Valve, Rear Ported), Port Size: C6 (ø6), Output Specification: L (Out 1: IO-Link or NPN/PNP), Lead Wire: Q (w/M12 Conversion Lead Wire and Connector, 0.1m), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: None, Made to Order: X731 (Compatible

Rated Flow Range: 25 (0.3 to 25 L/min), Flow Adjustment Valve: None (Straight), Port Size: C6 (ø6), Output Specification: L (Out 1: IO-Link or NPN/PNP), Lead Wire: Q (w/M12 Conversion Lead Wire and Connector, 0.1m), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: None, Made to Order: X731 (Compatible with Argon and Carbon Dioxide

MY1

84 88 M 6.0 7.5 N 20 25 NC 14 17 NE 49.5 55.5 NH 16.5 21.7 NW 56 60 090 110 Bore size (mm) 16 20 PA 40 50 PB 94 100 PG 3.5 4.5 PP Q 153 191 QQ 9 10 QW 48 45 RR 11.0 14.5 TT 15 18 UU 14 12 VV 10.0 12.5 W 102 110 WW 13 14 YW 54 58 Z 180 220 SS 2.5 5.5 07.5 11.5 Hole sizes for centralized piping on the bottom Bore size (mm) 16 20 S 9 6.5 WX 30 32 Y 6.5 8 Applicable O-ring C6 C6 (Mounting side