Rated flow range: PF3A701H: 10 TO 1000 lpm; PF3A702H: 20 to 2000 lpm; Large 2 screen, 3 color display to show both instantaneous and cumulative flow or set value at the same time; Can be converted to threaded model using modular connectors and piping adapters ; Accuracy: +/-3.0% F.S.

Rated flow range: PF3A701H: 10 TO 1000 lpm; PF3A702H: 20 to 2000 lpm; Large 2 screen, 3 color display to show both instantaneous and cumulative flow or set value at the same time; Can be converted to threaded model using modular connectors and piping adapters ; Accuracy: +/-3.0% F.S.

Rated flow range: PF3A701H: 10 TO 1000 lpm; PF3A702H: 20 to 2000 lpm; Large 2 screen, 3 color display to show both instantaneous and cumulative flow or set value at the same time; Can be converted to threaded model using modular connectors and piping adapters ; Accuracy: +/-3.0% F.S.

Rated flow range: PF3A701H: 10 TO 1000 lpm; PF3A702H: 20 to 2000 lpm; Large 2 screen, 3 color display to show both instantaneous and cumulative flow or set value at the same time; Can be converted to threaded model using modular connectors and piping adapters ; Accuracy: +/-3.0% F.S.

Rated flow range: PF3A701H: 10 TO 1000 lpm; PF3A702H: 20 to 2000 lpm; Large 2 screen, 3 color display to show both instantaneous and cumulative flow or set value at the same time; Can be converted to threaded model using modular connectors and piping adapters ; Accuracy: +/-3.0% F.S.

Rated flow range: PF3A701H: 10 TO 1000 lpm; PF3A702H: 20 to 2000 lpm; Large 2 screen, 3 color display to show both instantaneous and cumulative flow or set value at the same time; Can be converted to threaded model using modular connectors and piping adapters ; Accuracy: +/-3.0% F.S.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

[L/min] 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 2 to 200 5 to 500 10 to 1000 20 to 2000 5 to 500 10 to 1000 20 to 2000 0 to 0.5 0 to 1 0 to 3 0.5 to 0.5 1 to 1 3 to 3 30 to 3000 10 to 1000 20 to 2000 60 to 6000 120 to 12000 24 VDC 10% PF3A7 H 12 to 24 VDC 10% 12 to 24 VDC PF2M7 PFMC 10% 18 to 30 VDC 10% PF3A7 H-L 12 to 24 VDC 10% 12 to 24 VDC 10% 12 to 24 VDC 10% 21.6 to 30 VDC PF3A701H

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Port size Thread type Rated voltage Electrical entry Oil-free option Bracket option JSXD41 C N 03 R 1 CS None None S F 04 N 2 D B E F 3 4 5 6 7 8 B J JSXD41 Series/ Valve type Body material Seal material Port size Thread type Rated voltage Electrical entry Oil-free option Bracket option JSXD51 C N 06 R 1 CS None None S F N 2 D B E F 3 4 5 6 7 8 B J JSXD51 Series/ Valve type Body

Digital Flow Switch

Port size Symbol Port size Rated flow range 03 06 12 10 1 14 1 1/2 20 2 Output specification Symbol OUT FUNC*2 Applicable monitor unit model CS NPN Analog voltage output*3 External input*4 PFG300 series DS NPN Analog current output External input*4 PFG310 series ES PNP Analog voltage output*3 External input*4 PFG300 series FS PNP Analog current output External input*4 PFG310 series *2

MXQ

Without adjuster AS AT A BS (1) Extension end Retraction end Both ends Extension end Retraction end Both ends Extension end Retraction end Both ends Option Combinations Rubber stopper Functional option Nil F R P FR FP Adjuster option Shock absorber BT (1) Nil B (1) (3) (3) (3) AS, CS CS CT C Metal stopper AT, CT (3) A, C Note 1) W/ shock absorber is not available in Series MXQ6.

Cylinder with Lock

joint (CS) Series Variations Type Action Bore size [mm] Page 32 40 50 63 80 100 Standard CP96N Series Double acting, Single rod 9 Double acting, Double rod Standard C96N Series Double acting, Single rod 25 Double acting, Double rod 3 Cylinder with Lock CP96N/C96N Series A safety mechanism can be designed if required.

Air Slide Table Series MXQ

Nil AS AT A BS Note 1) Without adjuster Extension end Retraction end Both ends Extension end Retraction end Both ends Extension end Retraction end Both ends Option combinations Rubber stopper Functional option Adjuster option Nil F R P FR FP Shock absorber BT Note 1) Nil B Note 1) Note 3) Note 3) Note 3) AS, CS CS CT C Metal stopper x x AT, CT x x Note 3) x x A, C x x Note 1) Series MXQ6

•

~s MOUn ting( angle Double Rod Type Allowable lateral load equal to Series CS1 Allowable laleralload of CSt and CS2 Even if rod diameter is ~ '. changed to suit various needs, function remains equal to Series CS t . Smooth Cylinder 400 _ 800 '200 1600 Strni

RSH

(#1+#5) With locking mechanism: RSH20-15ll-D SRSH20A, #2 (#2+#5) With cancel cap: RSH20-15ll-C SRSH20A, #3 (#3+#5) With lever detection switch: RSH20-15ll-S SRSH20A, #4 (#4+#5) With locking mechanism + cancel cap: RSH20-15ll-DC SRSH20B, #1 (#1+#5) With locking mechanism + lever detection switch: RSH20-15ll-DS SRSH20B, #2 (#2+#5) With cancel cap + lever detection switch: RSH20-15ll-CS

Air Slide Table

Extension stroke end adjuster Retraction stroke end adjuster 122 MXQ Series Common Adjuster Options Metal Stopper with Bumper Retraction stroke end Extension stroke end Table C D D M B B E H C A1 A A1 A P F MXQB-CT Single metal stopper with bumper Stopper block Adjustment nut M M G H A A1 A1 A D A1 A MXQB-CS MXQA-A87 Model Adjuster part no.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Bore size/Stroke (mm) 6 10, 20, 30, 40, 50 8 10, 20, 30, 40, 50, 75 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Adjuster option Nil Without adjuster Functional option AS Extension end adjuster AT Retraction end adjuster Nil Standard A Both ends adjuster P Note) Axial piping CS Extension

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

VT/O317-G(-02) VT/O317-GS(-02) VT/O317-H(-02) VT/O317-HS(-02) VT/O317-C(-02) VT/O317-CS(-02) VT/O317-T(-02) VT/O317-TS(-02) VT/O317-TZ(-02) VT/O317-D(-02) VT/O317-DS(-02) VT/O317-DZ(-02) Coil assembly with terminal part no. Coil no.

V100

VT/O317-G(-02) VT/O317-GS(-02) VT/O317-H(-02) VT/O317-HS(-02) VT/O317-C(-02) VT/O317-CS(-02) VT/O317-T(-02) VT/O317-TS(-02) VT/O317-TZ(-02) VT/O317-D(-02) VT/O317-DS(-02) VT/O317-DZ(-02) Coil no. PVT317-001GBPVT317-G PVT317-001GB-L06 PVT317-G-06 PVT317-001CBPVT317-C Coil assembly with terminal part no.

Air Cylinder MGQ Series Compact Guide Cylinder

-l,r'c6zo.cTfm-r'rcozs+s' rircora-ns l,tcolo-cs I mcoso-es [tco63-Ps MGo8o'Ps lMGoloGP 1gq so,0111 31!

1

New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2