PFxx-OMU0002

No.PF-OMU0002-D PRODUCT NAME Digital Flow Switch MODEL/ Series/ Product Number PF3A703H PF3A706H PF3A712H Table of Contents Safety Instructions 2 Model Indication and How to Order 10 Names and Functions of Individual Parts 11 Definition and terminology 12 Mounting and Installation 14 Installation 15 Piping method 16 Wiring 17 Outline of Settings [Measurement mode] 21 Change of Set Value [

PFxx-OMX0007

Flow switch flow setting and functions PF3A703H/PF3A706H/PF3A712H IO-Link function PF3A703H/PF3A706H/PF3A712H-L Function selection mode In this mode, each function setting can be changed separately. In measurement mode, press the S button for 3 seconds or longer to display [F 0]. Press the or button to select the function to be changed.

PFxx-OMX0002

No.PF-OMX0002-B PRODUCT NAME Digital Flow Switch ( compatible) MODEL/ Series/ Product Number PF3A703H-L PF3A706H-L PF3A712H-L Table of Contents Safety Instructions 3 Model Indication and How to Order 11 Names and Functions of Individual Parts 12 Definition and terminology 14 Mounting and Installation 16 Installation 17 Piping method 18 Wiring 19 Outline of Settings [Measurement mode] 25 Change

PF3A7xxH.eng

[F 5] [ FnC] Select FUNC (switching Analogue output 2/ External input) [ oUt] Analogue output PF3A706H Equivalent to M5 3 Nm10% 8 PF3A712H 9 Equivalent to M6 5.2 Nm10% : Arbitrary display mode can be added to the sub display by setting the [F10] sub display.

PF3A7xxH-L.eng

(For accumulated increment) [H_1 ] Setting of Hysteresis [ 300] 300 L/min (PF3A706H) Do not use the product in a place where static electricity is a problem. Otherwise it can cause failure or malfunction of the system.

Digital Flow Monitor

Normal output Reversed output Hysteresis mode Window comparator mode Accumulated output mode (Increment) Accumulated output mode (Decrement) Accumulated pulse output mode Error output mode OFF mode : Applicable errors are Er0, 1, 2, 4, 6 to 8, 14, and 40.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Body Material Stainless Steel, Brass 14 2 x 3.4 14 2 x 3.4 33 4 33 4 1/8 1/8 1 20 39 1 20 39 JSX20, 30 JSX20U, 30U The grommet type is only available for the JSX20 and 30. JSX20, 30 JSX20U, 30U The grommet type is only available for the JSX20 and 30.

Air Slide Table

6 15.5 MXQR 6 6 7 2.5 19 8 7 M2.5 x 6 14.5 12.5 M2.5 x 8 7 8.3 M5 x 0.8 M 15 MXQR-CS 6-X11 25.5 5 MXQR-CS 8 18 B 7 8 3 22 9 MXQR 8 7.5 16.6 14.6 8 9.8 M6 x 1 15 MXQR-CS 8-X11 M3 x 8 M3 x 10 28 F 25 MXQR-CS 8-X12 38 5 MXQR-CS12 22 E G MXQR12 M8 x 1 M4 x 12 M4 x 12 9.5 12 4 29 14 11 20.5 18.5 11 13 15 MXQR-CS12-X11 32 C MXQR-CS12-X12 25 42 MXQR-CS16 5 23 Table mounting parts MXQR16 M10 x 1

Air Slide Table Series MXQ

M 15 25.5 MXQ-CS 6 (L)-X11 5 18 MXQ-CS 8 (L) B MXU 8 7 22 3 9 7.5 16.6 14.6 8 9.8 MXQ 8 (L) M6 x 1 15 M3 x 8 M3 x 10 28 MXQ-CS 8 (L)-X11 F 25 38 MXQ-CS 8 (L)-X12 MXS 5 22 MXQ-CS12 (L) G E MXQ12 (L) M8 x 1 M4 x 12 M4 x 12 12 9.5 29 4 14 11 20.5 18.5 11 13 15 32 MXQ-CS12 (L)-X11 C MXQ 25 MXQ-CS12 (L)-X12 42 5 23 MXQ-CS16 (L) Table mounting section MXF M10 x 1 MXQ16 (L) 14 11 36 5 17 M5 x 16

MXQ

For the applicable auto switch to buffer, refer to page 8-5-14. It requires to order separately.

Cylinder with Lock

(CS) [mm] Bore size Part no.

JXCx-OMT0023

Wire [AWG] Driver L1 L2 24V 0V U V W P C B1 B2 LECSA-S1 LECSA-S3 14(14) 14(14) (Note) 14(14) 14(14) 16(16) LECSA2-S4 Note. To wire the driver and a servo motor, use the LE-CSM(option).

Low-Speed Rotary Actuator

1 23 Steel ball 4 22 Seal washer 2 21 Piston seal 4 20 Gasket 4 19 Seal 1 18 Type CS retaining ring 2 17 Parallel key 1 16 Bearing 2 15 Cross recessed No.0 screw 1 14 Cross recessed socket head screw 4 13 Hexagon socket head bolt 6 12 Adjust bolt 2 11 Small hexagon nut 2 10 Magnet 2 Only magnet built-in type included 9 Wearing 4 8 Seal retainer 2 7 Bearing retainer 1 6 Shaft 1 5 Piston 2

Air Slide Table

64 32 14 31 13 18 Extension stroke end adjuster Retraction stroke end adjuster F 0.5 Adjustment range E Adjustment range C F MXQ8B 45 27 16 26 15 11 MXQ12B 50 28 15 27 14 13 Max.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

30 70 17 60 700.5 1.5 90 90 20 22.5 l3 l1 Single clevis with ball joint (CS) [mm] Bore size [mm] Part no.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

(CS) [mm] Bore size [mm] Part no.

Compact Rotary Actuator Series CRQ2

(mm) ND NC NB NA K GE GD GC GB GA EF EE ED EC EB EA Size 10 20 30 50 47.1 57.1 58.4 74.4 44.3 55.3 60.3 71.4 33.5 43 46 56 14 18 19.5 22 80 100 110 130 20 25 27 32 15.6 19.5 21.5 28 11 14 14 18 7.5 9.5 9.5 11.5 45.2 56.4 61.5 72.9 10 14 14 19 5.5 8 8 8.5 12.5 16.5 16.5 19.5 4 4 4 6 91.4 112.4 118.7 145.8 M8 x 1 M10 x 1 M10 x 1 M14 x 1.5 Dimensions other than the above are the same as standard

•

B6re_~i~e' Sl roke: ~~e ,:(n ;n;q) ." i\ i\L 0 8 B DC 0 E F FD FT FX FY FZ G " J V (mml M 14 x 1,5 145 160 143 157 43 43 19 19 14 20 190 212 100 230 125 )40 50 47 47 11 5 128 32 32 71 71 15 15 15 Upto 1000 : rs ,.: 50 ':liP to fP OO 11 2 255 M 14 x,:1,5' 160 Up to 1200 56 53 177 I 180 144 38 78.5 42 19 20 236 118 j 275 18 M1 6 x 1.5 15 40 141 'h stroke 267 (mm) With rod boot f h , ZZI Without

Air Slide Table Series MXQ

Nil AS AT A BS Note 1) Without adjuster Extension end Retraction end Both ends Extension end Retraction end Both ends Extension end Retraction end Both ends Option combinations Rubber stopper Functional option Adjuster option Nil F R P FR FP Shock absorber BT Note 1) Nil B Note 1) Note 3) Note 3) Note 3) AS, CS CS CT C Metal stopper x x AT, CT x x Note 3) x x A, C x x Note 1) Series MXQ6

1

14 14 14 14 14 14 D side U side For the I/O Unit part number mounted, refer to the following pages.