5 Port Solenoid Valve Series SY3000/5000/7000/9000

LN, MN type: with 2 sockets.

CATALOG

/min** 1900 ln/min** 1000 ln/min** 1900 ln/min* 400 ln/min* Port Size (IN, OUT) 38 12 38 12 14 EXH Port Size 12 14 38 38 12 INSTALLATION Pilot EXH Port Size 18 The Booster Regulator should be installed with its piston in a horizontal position.

SY

SS5Y33, #5 (#5 + #8 + #9 + #11) 4 3 2 5 6 7 8 9 10 11 12 13 14 15 16 Stations n L1 L2 L3 91.5 81 102 112.5 123 133.5 144 154.5 173 160.5 185.5 198 210.5 210.5 223 235.5 148 260.5 273 285.5 298 310.5 310.5 162.5 150 175 187.5 200 200 212.5 225 137.5 250 262.5 275 287.5 300 300 234 70.5 181.5 192 202.5 213 223.5 11.5 L4 14 13 12 15 16 17 12 13 14 13 14 15 16 17 For 11 or more stations, two

V100

7.4 9.0 7.5/7.7 8.8/9.3 12 14 14/14 15/16 Cv 0.86 0.88 0.80/0.86 1.0/1.0 2.0 2.4 1.9/2.1 2.3/2.4 3.1 3.8 3.5/3.5 3.8/4.0 C [dm3/(sbar)] 2.9 3.2 2.9/3.0 2.7/3.6 6.9 8.8 7.9/7.4 9.2/8.8 12 15 14/13 15/15 Cv 0.83 0.92 0.83/0.83 0.86/0.88 1.7 2.2 1.9/1.8 2.1/2.0 3.1 3.7 3.2/3.2 3.6/3.7 C [dm3/(sbar)] 3.5 4.4 3.5/3.5 4.1/3.9 7.5 9.3 7.4/7.3 9.2/9.1 13 16 14/14 15/15 Cv 0.93 1.1 0.89/0.89 1.0/

A

/min** 1900 ln/min** 1000 ln/min** 1900 ln/min* 400 ln/min* Port Size (IN, OUT) 38 12 38 12 14 EXH Port Size 12 14 38 38 12 INSTALLATION Pilot EXH Port Size 18 The Booster Regulator should be installed with its piston in a horizontal position.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

225 250 262.5 275 287.5 300 300 58.1 42.6 7.5 34.5 48.4 L3 91.5 81 102 112.5 123 133.5 144 154.5 70.5 181.5 192 202.5 213 223.5 234 L4 14 13 12 15 16 17 12 13 14 13 14 15 16 17 11.5 Two SUP/EXH blocks are provided for models with 11 stations or more.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

-7 SYJ3000-14-6 SYJ3000-14-2 Note) Please insert the protrusion for positioning of the manifold gasket into the hole of the valve body completely.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Refer to page 3-3-14.

SX

A: Orange B: Green 12 13 14 15 16 17 12 13 Stations n 10 stations 11 12 13 14 15 16 stations 298 310.5 323 335.5 335.5 348 360.5 L1 L2 L3 L4 287.5 300 312.5 325 325 337.5 350 (Rail mounting hole pitch 12.5) 192 202.5 213 223.5 234 244.5 255 14 15 16 17 11.5 12.5 13.5 1-6-125 126 SX5000: Serial Transmission Unit/Plug-in C4 C6 C8 SS5X5-45S2DStations UDIN rail release button (Pitch)P = 16 Note

Table of Contents

Vacuum regulator 13-14-2 Series IRV 13-14-3 Controls the vacuum pressure in accordance with external electric signals.

SYJ3000/5000/7000

(For details, refer to page 1-518 on catalog.) + LN, MN type: with 2 sockets.

V

(N)ZFB E L E M E N T I-34S-A (N)ZFB100, 101 I-35S-A (N)ZFB200, 201 I-36S-A (N)ZFB300, 301 I-395-A (N)ZFB401 B O D Y S I Z E T U B E S I Z E OD M M 04 4 06 6 08 8 10 10 05 3/16 07 1/4 11 3/8 13 1/2 100 Max 20 ln/min 200 Max 50 ln/min 300 Max 75 ln/min 101 Max 20 ln/min 201 Max 30 ln/min 301 Max 60 ln/min 401 Max100ln/min Courtesy of Steven Engineering, Inc. !

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

holes) 2-3.2 (Mounting holes) 2-3.2 22 4 22 4 VS B A B A 11 VS7 2.5 17.5 11 2.5 17.5 A B A B (Lead wire length) 50.7 64.3 300 54.7[56] 52.6 [59.1] 300 (Lead wire length) 41.5 [48] 41.5 [48] 33.5 33.5 29.1 22.5 22.5 R2 R1 P R2 R1 P 13 13 5 5 10 10 10 10 5-M5 X 0.8 (Piping port) 5-M5 X 0.8 (Piping port) 14 14 14 14 15 15 [ ] for AC Other dimensions are the same as the grommet style. [ ]

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

H: 600mm lead wire LN: Without lead wire LO: Without connector MO: Without connector 2.2-21 LN and MN types are with 2 sockets. Series SYJ500 Construction N.C. N.O.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

-7 SYJ3000-14-10 SYJ3000-14-11 Note) Make sure to align the manifold gasket with the groove of the valve body.

SYJ300/500/700

: Without lead wire LO: Without connector MO: Without connector DO: Without connector R port P, E port R: External pilot type -+ LN, MN type: with 2 sockets.

Vacuum System Peripherals:

Mist separator: Series AM/AFM 13-14-13 Fittings & Tubing 1. Compact One-touch mini: Series KJ 13-14-14 2. One-touch fitting: Series KQ 13-14-14 3. One-touch fitting manifold: Series KM 13-14-14 4. Miniature fitting: Series M3/M6/R 13-14-14 5.Tubing 13-14-15 Flow Control Equipment 1. Speed controler: Series AS 13-14-15 2.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

. + + H: Lead wire length 600 mm D: Push-turn locking slotted type LN: Without lead wire LO: Without connector MO: Without connector W: With connector cable Note 1) + -+ LN, MN type: With 2 sockets. Refer to page 642 for the lead wire length of L and M plug connectors. Refer to page 645 for the connector assembly with cover for L and M plug connectors.

VZ100/300/500

MO: Without connector DO: Without connector Option LN, MN type: With 2 sockets. 4-6-13 14 Series VZ300 Specifications Low power consumption: 1.8 W DC Applicable for vacuum use 100 kPa VZ300R: External pilot type Exhausting equipment for pilot valve not required.

Vacuum

Rod end nut Seal washe. r'ratanalr CorB sht Rolld sle6l Seal-NBF '142 lnder 1 4 Qoriac flTre 14 14 hltn.lal k C1\ | 2o3 Port valves for vacuum use . . . . . .14 Series KJ, Series I Tl KQ, rV-3, M5. . . . 14 14 tTV0090,tTV2090 ...tso 143 Vacuum Regulator series lRVl 000/2000/3000 Standard Specifications Model rRvlooo I rRvzno .ii I :lRv3qqot ,,l Regulaiing pressure range Nole 1 -100 to -1.3kPa