PF3A7xxH.eng

[F 5] [ FnC] Select FUNC (switching Analogue output 2/ External input) [ oUt] Analogue output PF3A706H Equivalent to M5 3 Nm10% 8 PF3A712H 9 Equivalent to M6 5.2 Nm10% : Arbitrary display mode can be added to the sub display by setting the [F10] sub display.

PF3A7xxH-L.eng

(For accumulated increment) [H_1 ] Setting of Hysteresis [ 300] 300 L/min (PF3A706H) Do not use the product in a place where static electricity is a problem. Otherwise it can cause failure or malfunction of the system.

Table of Contents

LVH LVD LVQ LQ LVN Component Parts No.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

PA Insert bushing Insert bushing LQ-2B07 Nut PAX LQ-2B03 Nut LQ-2N07 PB LQ-2N03 Tubing Collar Tubing Tubing O.D. 1/4" LQ-2U07 (Basic size) Tubing O.D. 1/8" LQ-2U03 (Reducer type) 17-5-127 32 Series LQ 1 2 Special Tools How to order insertion tool LQ G J Insert pin material Option (L/M type only) Nil Resin Stainless (J/K type ony) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San

High Purity Fluoropolymer

Replacement part type L shows the parts for LQ-GL and LQ-GM. 33 High Purity Fluoropolymer Fittings & Tubing Series LQ1 2 Dimensions LQ-GJ LQ-GK LQ-GJ 36 30 45 (adjustable) 117 76 24 LQ-GK 36 SET POS. 53 127 43 63 (Max. 50) 114 53 43 63 LQ-GM LQ-GL 50 50 207 85 342 85 LQ-GL 40 28 SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 4-R3 4-R3 (Max. 91) 325 (Max. 91) 191 87 60 87 60 112 112 34 Series

Fluoropolymer Piping Equipment

5.8 LQ1T4A-R8 1/4" 1/4" 1/2" 7 20 20 29 14 28 17 17 26 44 44 54 23 23 39 3.6 LQ1T4A-R10 1/4" 1/2" 1/4" 6 15 24 15 9 18 14 21 14 33 43 33 16.5 28 16.5 3.6 LQ1T4A-R17 1/4" 3/8" 1/2" 7 20 20 29 14 28 17 17 26 44 44 54 23 23 39 3.6 LQ1T4A-R20 3/8" 1/4" 1/2" 6 24 24 9 18 21 21 43 38.5 43 28 28 3.6 LQ1T4A-R33 1/8" 1/2" 1/8" 15 24 15 14 21 14 33 43 33 16.5 28 16.5 1.8 LQ1T5A-R2 3/4" 3/8" 3/4" 7

44

10 14 10 14 12 14 17 14 17 22 14 17 22 14 17 22 14 17 22 19 22 16.1 19.9 16.1 19.9 17.2 21 20.1 23.3 24.7 25 26.4 30.6 25 26.4 30.6 25 26.4 30.6 25 26.4 30.6 29.3 33.3 17.4 19.6 17.4 19.6 19.6 21.8 24.7 26.3 27.3 29.6 30.6 33.5 29.6 30.6 33.5 29.6 30.6 33.5 29.6 30.6 33.5 36.3 39 9 18 9 18 12 21 22 30 42 37 47 74 36 46 73 38 49 75 40 51 77 75 96 4 2.5 1.8 1.4 7 8 14.5 5 KG 4 3 2.3 2.3 Applicable

70pvpump

(except IDG1, IDG5) LVA Refer to Best Pneumatics Vol. 14 for further details.

2

(mm) Connection thread Rc Model T (M) Weight (g) NylonUrethane 3.2 1/4 KQ2E23-02l M12 x 1 17 14 28.7 14.3 13 13.3 3.4 2.9 2.5 31.2 Applicable tubing Mounting plate thickness 7 mm or less 4 1/8 KQ2E04-01l M12 x 1 14 14 24.4 10 13 13.3 5.6 4 3 21.2 1/4 KQ2E04-02l M12 x 1 17 14 29 14.6 13 13.3 5.6 4 3 30.9 H1 H2 T 6 1/8 KQ2E06-01l M14 x 1 17 17 23.6 9.2 15 13.3 13.1 10.4 4.5 28.9 1/4 KQ2E06-

Model Selection 1

LQ-GK 1, 2 LVN Inch size J type K type LQ-GL LQ-GM 1, 2, 3, 4, 5, 6 L type M type High Purity Fluoropolymer Tubing P. 17-5-136 Series Tubing O.D. 4 6 8 10 12 19 1/8" 3/16" 1/4" 3/8" 1/2" Material: Super PFA Metric size TL Inch size TIL 17-5-96

VXP21/22/23

14 92 (102) 184 (199) 103 (113) 202.5(217.5) 114 (124) ( ): N.O. 17-3-52

Prevents Micro-Bubbles

LVH Insert bushing LQ-2B07 Nut LQ-2N07 Insert bushing LQ-2B03 LVD Nut LQ-2N03 LVQ LQ LVN Tubing Collar Tubing Tubing O.D. 1/4" LQ-2U07 (Basic size) TI/ TIL Tubing O.D. 1/8" LQ-2U03 (Reducer type) PA How to order fitting parts Type U is recommended when changing tubing sizes.

VCA

LVQ LQ LVN TI/ TIL PA PAX PB 17-2-19

VXR21/22/23

LQ LVN Table(1) Connection Size and Applicable Model Table(2) Rated Voltage-Electrical Entry-Electrical Option Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) TI/ TIL Applicable model VXR2150-04 VXR2150-06 VXR2260-10 1 VXR2270-12 1 VXR2380-14 2 VXR2390-20 Size Class B Class H G PA 1 2 3 4 C D, T G, C T S L,

VNC

14 17.5 20 72.5 72.5 84 100 80.5 80.5 92 108 87 87 92 93 180.5 180.5 192 208 148 148 159.5 175.5 52 52 62 72 26 26 31 36 4.5 4.5 5.5 6.5 24.3 24.3 28.3 33.3 2.3 2.3 2.3 2.3 25 25 30 35 34 34 43 49 55 55 60.5 73 LVA LVH LVD Threaded Type Port size: 32A, 40A, 50A LVQ Electrical entry hole: G1/2 LQ LVN Manual override (Non-locking) TI/ TIL Pilot port PA PAX PB Main port Main port Rc Pilot port

VXF

If longer than the length in the diagram, the valve might not open due to the tube resistance. 6 x 10 pcs. 6 x 10 pcs. 6 x 14 pcs. 6 x 14 pcs. 6 x 14 pcs. 6 x 14 pcs. 6 x 12 pcs. 6 x 12 pcs. 6 x 12 pcs. 6 x 12 pcs. 500 mm 500 mm 500 mm Data (C) Start-up Speed 2,000 mm 2,000 mm mm Without tube (VXF2160) Without tube Without tube (VXF2160) Inlet pressure: 0.7 MPa Inlet pressure: 0.7 MPa Inlet

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

18.5 16 1/8 1/4 7 12 H Connection threads 8 22 12 5 M5 x 0.8 (R) 6 18.5 10 10 12 14 18.5 19 25.5 23.5 30.5 25.5 26.5 25 7 14 14 13 24 23 23 46 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 (R) Applicable tubing 8 20.5 26 18 14 10 23 41 29 17 M L A 19 22 H 12 24 58 46 Connection threads Reference dimension for R threads after installation Male Elbow: KPQL, KPGL Applicable tubing (M5) Effective area

VNB

LVH VNB1 VNB12 1 4 12 (P1) 12 (P1) LVD External pilot solenoid Valve Specifications LVQ Fluid Water/Oil/Air/Vacuum, etc. 5 to 60C (1) 2 (B) 1 (A) 2 (B) 1 (A) VNBA Fluid temperature LQ 5 to 99C (1) (Water, Oil etc.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

SET POS. 53 127 43 63 VX3 (Max. 50) 114 VXA 53 VN 43 63 LVC LVA LVH LVD LQ-GM LQ-GL LVQ LQ 50 LVN 50 207 85 TI/ TIL 342 85 LQ-GL 40 28 PA SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 PAX 4-R3 4-R3 (Max. 91) 325 PB (Max. 91) 191 87 60 87 60 112 112 17-5-55 14 Series LVD Fitting Assembly Procedure Assemble fittings following the procedure shown below.

VXA31/32

Note) Refer to page 17-3-14 Applicable Fluids Check List for details of special fluids outside of the standard options and specifications.