Rated Flow Range: 12 (120 to 12000 l/min), Thread Type: Rc, Port Size: 20 (2), Output Specification: L [Out: IO-Link, Switch Output (N/P); Func: None; Monitor Unit Model: None], Lead Wire: Q (Lead Wire and M12-M12 Connector, 3m)

Rated Flow Range: 120 to 12000 l/min, Thread Type: NPT, Port Size: 2, Output Specification: L [Out: IO-Link, Switch Output (N/P); Func: None; Monitor Unit Model: None], Lead Wire: Lead Wire and M12-M12 Connector, 3m, Unit Specification: SI Unit Only, Calibration Certificate: -

Rated Flow Range: 12 (120 to 12000 l/min), Thread Type: N (NPT), Port Size: 20 (2), Output Specification: L [Out: IO-Link, Switch Output (N/P); Func: None; Monitor Unit Model: None], Lead Wire: Q (Lead Wire and M12-M12 Connector, 3m), Unit Specification: M (SI Unit Only)

Table of Contents

M L M L M N N Grommet Conduit DIN terminal Conduit terminal Electrical entry Port size P Rc , , , B Mounting A C D E F Model 22.5 B1 B2 38.5 47 54 47 48 50 92 95 97 38.5 47 55 59 62 64 14.5 17 17 6 7.5 7.5 23 25.5 28 46.5 55 62 39 41.5 44.2 38.5 47 55 59 60 62 18 21 21 20 20 20 74.5 90 98 30 35 40 19 25 25 20 23 25.5 29 32 32 VX31 VX32 VX33 1 4 1 8 3 8 1 4 27.5 27.5 3 8 1 4 17-3-85 6 The

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

H L2 L1 M A E M LQ1L12-M LQ1L11-M 3 4 1/8 11.5 11.5 10 15 18 1/8" R (NPT) Port size Class 1 LQ1L43-M LQ1L42-M LQ1L41-M LQ1L36-M LQ1L35-M LQ1L34-M LQ1L33-M LQ1L32-M LQ1L31-M LQ1L24-M LQ1L23-M LQ1L22-M LQ1L21-M 12 10 12 6 8 10 6 8 10 4 6 4 6 1/8" L1 16.5 14.5 14 15 20.5 27 1/4" L2 (A) M 1/4" 23 1/4 20 17 20 26.5 35 H (E) 3/8" Class 2 to 5 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

High Purity Fluoropolymer

M H L2 L1 A E M LQ1L12-M LQ1L11-M 3 4 11.5 1/8 11.5 10 15.5 18 1/8" R (NPT) Port size Class 1 LQ1L43-M LQ1L42-M LQ1L41-M LQ1L36-M LQ1L35-M LQ1L34-M LQ1L33-M LQ1L32-M LQ1L31-M LQ1L24-M LQ1L23-M LQ1L22-M LQ1L21-M 4 6 4 6 1/8" L1 16.5 14 14.5 15 20.5 27 1/4" 10 L2 M 1/4" 6 8 (A) 23 17 20 20 26.5 35 1/4 10 H 6 8 3/8" (E) Class 2 to 5 12 10 12 3/8" 28 21 25 24 33 45 1/2" LQ1L44-M 10 M LQ1L54-

LVQ

T) LVA V LVH M N LVD LVQ30, LVQ50 V SMC LVQ SMC B A SMC C LQ B A U D LVN Z (Max. T) TI/ TIL PA M N PAX LVQ40, LVQ60 PB C B A D (Max.

Prevents Micro-Bubbles

Description Bracket assembly LQ-GBL J type K type L type M type (for short piping) 34 Series LV High Purity Chemical Valve Special Tools Dimensions LQ-GJ LQ-GK VC VDW LQ-GJ 36 30 VQ 45 (adjustable) VX2 117 76 24 LQ-GK 36 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Fluoropolymer Tubing Variations

How to Order Burst pressure drop curve 1.0 TL0604 Metric sizes 20 Burst pressure drop coefficient 0.8 TIL01 20 Inch sizes 0.6 Length Applicable to both metric and inch size Tubing Model 0.4 Symbol 10 20 50 100 Type Length 10 m 20 m 50 m 100 m 0.2 Roll 0 20 40 60 80 100 120 140 160 180 200 220 240 260 Temperature (C) Straight 2 m 2S Length Applicable to inch size only Eluting fluorine ion

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Description Body class Symbol Bracket assembly LQ-GBL J, K 1, 2 J type K type 1, 2, 3, 4, 5, 6 L, M L type M type (for short piping) Table 1 Tubing size symbols Part No. Description Replacement parts Tubing O.D.

70pvpump

0 0 10 30 40 50 20 60 VX3 10 20 Discharge rate (l/min) Discharge rate (l /min) VXA Selection from Flow Characteristic Graph (PA3000) VN Required specifications example: Find the pilot air pressure and pilot air consumption for a discharge rate of 6 l/min and a total lifting range of 25 m.

Fluoropolymer Piping Equipment

28 16.5 4.4 LQ1B2E-M3/16" 2.9 LQ1B23-M 6 1/4" 22 3.6 LQ1B2F-M 1/8" 1.8 LQ1B24-M 4 2.6 TLM TILM LQ1B3A-M 3/8" 1/4" 19 LQ1B2F-M 3 1.8 5.8 25 LQ1B3B-M 1/4" 3.6 LQ1B31-M 10 1/4" 19 7.4 TD TID 5 20 9 18 17 36.5 23 8 LQ1B3C-M 3/8" 3/8" 21 27 5.8 LQ1B32-M 8 5.5 25 LQ1B3D-M 1/4" 3.6 LQ1B3F-M 3/8" 1/8" 18.4 29 21.9 4.4 4.4 LQ1B33-M 6 3.6 TH TIH 5 9 18 36.5 8 LQ1B34-M 10 3/8" 21 27 7.4 20 17 23 LQ1B4A-M

Model Selection 1

LQ-GK 1, 2 LVN Inch size J type K type LQ-GL LQ-GM 1, 2, 3, 4, 5, 6 L type M type High Purity Fluoropolymer Tubing P. 17-5-136 Series Tubing O.D. 4 6 8 10 12 19 1/8" 3/16" 1/4" 3/8" 1/2" Material: Super PFA Metric size TL Inch size TIL 17-5-96

2

Terminal block for signal 4 x 20 7122 20 7001 75 94 107 752 Drain tube (O.D. 10, Length approx. 2 m) (Can also be connected on the other side.)

44

M L M 17 17 33.6 7.6 17 17 37 8.5 22 22 39.4 9.3 Union Tee: KFG2T Applicable tubing size (mm) O.D.

Rated Flow Range: 12 (120 to 12000 l/min), Thread Type: Rc, Port Size: 20 (2), Output Specifications: ES (Out: PNP; Func: Analog Voltage Ouput <-> External Input), Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: M (SI Unit Only)

Rated Flow Range: 12 (120 to 12000 l/min), Thread Type: Rc, Port Size: 20 (2), Output Specifications: DS (Out: NPN; Func: Analog Current Output <-> External Input), Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: M (SI Unit Only)

Rated Flow Range: 12 (120 to 12000 l/min), Thread Type: Rc, Port Size: 20 (2), Output Specifications: CS (Out: NPN; Func: Analog Voltage Output <-> External Input), Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: M (SI Unit Only)

Rated Flow Range: 12 (120 to 12000 l/min), Thread Type: Rc, Port Size: 20 (2), Output Specifications: FS (Out: PNP; Func: Analog Current Output <-> External Input), Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: M (SI Unit Only)

Rated Flow Range: 120 to 12000 l/min, Thread Type: Rc, Port Size: 2, Output Specifications: Out: NPN; Func: Analog Current Output <-> External Input, Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: SI Unit Only, Calibration Certificate: -