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Vacuum

20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gomp serles zPR

Vacuum

20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gom serles zPR

Vacuum System Peripherals:

Connection NPT 1/8 N01 Connection NPT 1/4 N02 Port size Connection NPT 3/8 N03 Applicable model IRV1000 Option Connection NPT 1/2 N04 Size Symbol IRV3000 IRV2000 Connection G 1/8 F01 01 02 03 04 1/8 1/4 3/8 1/2 Connection G 1/4 F02 Connection G 3/8 F03 Connection G 1/2 F04 13-14-2 3 Vacuum System Peripherals: Electronic Vacuum Regulator: ITV209 Specifications ITV2090 ITV2091 Model 24 VDC

PF-OMN0009_C

11/4 14 11/2 / OUT1 OUT2 1 1~5 V 2 4~20 mA 1T 1~5 V 1~5 V (PF3W3)1~5V (-1-1T) 4~20mA(47) -11No.PF-OMN0009CN-F PVC PF3W5 U 48 () 3 A : 11 21 10~100 L/min 30~250 L/min U PVC 2 11 21 R (PVC) 11 21 40 11 21 25 25A 30 30A 250L/min G : SI : G : 1[L/min]=0.2642[gal/min] 1[gal/min]=3.785[L/min] L/min L/min(gal/min) JIS K6742 1 2 1~5 V 4~20 mA (PF3W3) 1~5(1) 1 N M8(3m) -12No.PF-OMN0009CN-F

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 04 (1/2), Output Specification/Temperature Sensor: 1 (Out 1 Flow Rate: Analog 1 to 5 V; Out 2 Temperature: None; Temperature Sensor: None), Lead Wire: N (w/o Lead Wire and M8 Connector), Unit Specification: G [Instantaneous Flow: L/min (gal/min), Temperature: °C/°F], Bracket

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 04 (1/2), Output Specification/Temperature Sensor: 2 (Out 1 Flow Rate: Analog 4 to 20 mA; Out 2 Temperature: None; Temperature Sensor: None), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: G [Instantaneous Flow: L/min (gal/min), Temperature: °C/°F], Bracket

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: NPT, Port Size: 1/2, Output Specification/Temperature Sensor: Out 1 Flow Rate: Analog 1 to 5 V; Out 2 Temperature: None; Temperature Sensor: None, Lead Wire: w/o Lead Wire and M8 Connector, Unit Specification: G [Instantaneous Flow: L/min (gal/min), Temperature: °C/°F], Bracket: None, Calibration

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

: 80.2) [82.2] 1 (P,R port) 54.4 (GZ, GS: 55.1) [56.1] 16.5 53.4 (GZ, GS: 54.1) [55.1] 58.4 (GZ, GS: 59.1) [60.1] 10 10 78.8 (GZ, GS: 80.2) [82.2] 91.7 (GZ, GS: 93.1) [95.1] 91.7 (GZ, GS: 93.1) [95.1] R P B B B B B P R 31.5 33.5 4.5 32.5 12.5 17 36.5 17 7.5 16 1 A A A A A SY SYJ MAX.5 (Lead wire length) SX G: 300 H: 600 2-4.5 (Pitch) P=10.5 11.5 (Mounting holes) L1 Manual override VK 12

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

:80.2) [82.2] 1 53.4(GZ:54.1) [55.1] 54.4(GZ:55.1) [56.1] 16.5 58.4(GZ:59.1) [60.1] 10 10 78.8(GZ:80.2) [82.2] 91.7(GZ:93.1) [95.1] 91.7(GZ:93.1) [95.1] R B B B B B R 31.5 33.5 4.5 32.5 12.5 17 36.5 17 7.5 16 1 P A A A A A P MAX.5 G : About 300 H : About 600 (Lead wire length) 24.5 (Pitch) P=10.5 11.5 (Mounting holes) L1 Manual override 12 4.5 L2 L2 4 L1 (Non-locking) Manual override (With

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

M5 6 4 8 (1) M5 X 0.8 SYJ300 Top (2) SY Body ported Base mounted Rc(PT)1/8 SYJ SYJ500 Top Rc(PT)1/8 VK (1) Rc(PT)1/8 SYJ700 Top VZ Rc(PT)1/4 VT (1) M5 X 0.8 SYJ300 Side VT Rc(PT)1/8 Bottom VP SYJ500 Rc(PT)1/8 Side VG Rc(PT)1/8 (1) SYJ700 Bottom Rc(PT)1/4 VP Rc(PT)1/4 Side Note 1) Only internal pilot style Note 2) Only external pilot style VQ VQZ VZ VS Series SYJ300 Series SYJ500 Series SYJ700

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

kPa 10 to 105 kPa 0.001 0.1 0.001 0.001 0.01 PSE564 PSE574 0 to 500 kPa 50 to 525 kPa 0.001 1 0.01 0.01 0.1 PSE530 PSE540 PSE560 PSE570 0 to 1 MPa 0.105 to 1.05 MPa 0.001 1 0.01 0.01 0.1 PSE575 0 to 2 MPa 0.105 to 2.1 MPa 0.001 1 0.01 0.01 0.2 PSE576 0 to 5 MPa 0.25 to 5.25 MPa 0.01 0.1 0.1 1 PSE577 0 to 10 MPa 0.5 to 10.5 MPa 0.01 0.1 0.1 1 0 to 1.6 MPa 0.105 to 1.68 MPa 0.001 1 0.01

PF-OMN0011_C

relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 JIS B 8433-1993: 2) : : : 1. 2. 3. 1. 2. 3. 4

PF2x2.eng

FLOW Hysteresis 1 Hysteresis 1 SET Set point 1 Set point 2 button (UP) button (DOWN) button (SET) ON Item Default settings Model Item Default setting Instantaneous flow PF2A2 series [10L] 1 to 10 L/min type (PF2A510) Connecting the wiring Attaching the sensor connector to the sensor wire Strip the sensor wire as shown. Do not cut the insulator.

Table of Contents

1 8 M5 x 0.8 M6 x 1 M8 x 1.25 Rc M6 x 1 M8 x 1 M6 x 1 M8 x 1 4 6 8 10 13 16 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 1 8 M6 x 1 M8 x 1.25 Rc 1 8 13-11-2 3 Series ZPT Vacuum Pad: Vertical Vacuum Entry without Buffer How to Order Vacuum entry port Pad dia.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

VFS 1 4 S mount VV5F3-70 Individual Side Side plate Bottom Valve Top Valve 1 8 1 4 1 4 VF370 VS4 1 4 VV5F3-71 Individual Side Side plate Side Valve Side Valve 1 8 VF3170 (Single solenoid only) 1 4 1 4 1 4 VQ7 Note 1) Supply (P port) is common.

Vacuum Equipment

Selection Step 1. Pad selection 1-A Theoretical lifting force 1-B Calculation method: Pad diameter 2.

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 04 (1/2), Output Specification: 1 (OUT1: Analog 1 to 5V)

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 1/2, Output Specification: OUT1: Analog 1 to 5V, Temperature Sensor: -, Lead Wire: -, Units on Label: -, Bracket: -, Calibration Certificate: -, Made to Order: -