SMC Corporation of America
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Vacuum Switch (Zs.rles) Vacuum Gauge (GZ Series) A confirmation output signal by a vacuum swilch is recommended when work is adsorbed or translerred. (Visual check by gauge is also recommended for transporting heavy or dangerous work). When electronic or precision parts are adsorbed, the pressure difference between ON and OFF becomes very small with adsorption nozzles on order of 1mm.

Connection NPT 1/8 N01 Connection NPT 1/4 N02 Port size Connection NPT 3/8 N03 Applicable model IRV1000 Option Connection NPT 1/2 N04 Size Symbol IRV3000 IRV2000 Connection G 1/8 F01 01 02 03 04 1/8 1/4 3/8 1/2 Connection G 1/4 F02 Connection G 3/8 F03 Connection G 1/2 F04 13-14-2 3 Vacuum System Peripherals: Electronic Vacuum Regulator: ITV209 Specifications ITV2090 ITV2091 Model 24 VDC

Vacuum Switch (Zs.rles) Vacuum Gauge (GZ Series) A confirmation output signal by a vacuum swilch is recommended when work is adsorbed or translerred. (Visual check by gauge is also recommended for transporting heavy or dangerous work). When electronic or precision parts are adsorbed, the pressure difference between ON and OFF becomes very small with adsorption nozzles on order of 1mm.

S E R I E S E40-N04 4000 S E R I E S E40-N06 4000 S E R I E S E60-N06 5/6000 S E R I E S E60-N10 5/6000 S E R I E S mm Model Port size A B C E10-M5 M5x0.8 16 17.5 14 E20-N01 18 E20-N02 14 23 22 22 E20-N03 38 E30-N02 14 26 34.2 29 E30-N03 38 D I M E N S I O N S P I P I N G A D A P T O R E30-N04 12 40 34.2 29 E40-N03 38 33 42.2 35 E40-N04 12 E40-N06 34 50 42.2 35 E50-N06 34 36 44 46.2 E60-

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 04 (1/2), Output Specification/Temperature Sensor: 2 (Out 1 Flow Rate: Analog 4 to 20 mA; Out 2 Temperature: None; Temperature Sensor: None), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: G [Instantaneous Flow: L/min (gal/min), Temperature: °C/°F], Bracket

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 04 (1/2), Output Specification/Temperature Sensor: 1 (Out 1 Flow Rate: Analog 1 to 5 V; Out 2 Temperature: None; Temperature Sensor: None), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: G [Instantaneous Flow: L/min (gal/min), Temperature: °C/°F], Bracket

-11S 3/8 NPT1/2 NPT1/4 15/16 11/16 18.5 28.6 26.5 25.9 64.2 32.6 70.3 61.8 18.3 20.8 220 64.8 57.3 ASP630F-N04-13S 1/2 NPT1/2 NPT1/4 15/16 11/16 21.7 28.6 26.5 26.5 66.3 34.7 70.3 61.8 18.3 21.8 230 Courtesy of Steven Engineering, Inc. !

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 04 (1/2), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector)

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 1/2, Output Specification: OUT1: Analog 1 to 5V, Temperature Sensor: None, Lead Wire: w/o Lead Wire w/M8 Connector, Units on Label: -, Bracket: -, Calibration Certificate: -, Made to Order: -

PF3W540 PF3W511 PF3W521 (3 mPas(3 cP)) 1 0.54 L/min 216 L/min 540 L/min 10100 L/min 50250 L/min 070 090 () ( ) 3F.S. 2F.S. 5%F.S.(25 ) 2 2 3 1 s 15 V 1 k 420 mA DC12 V 300 DC24 V 600 () DC1224 V10 30 mA IP65 050 () 3585R.H.() 4 AC1000V 1 50M (DC500V ) CE UL(CSA)RoHS PPSSUS304FKMSCS13 PPSSUS304 FKM 3/8 3/81/2 1/23/4 3/41 11/411/2 -28No.PF-OMN0009CN-F PF3W504 PF3W520

Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 04 (1/2), Output Specification/Temperature Sensor: 1 (Out 1 Flow Rate: Analog 1 to 5 V; Out 2 Temperature: None; Temperature Sensor: None), Lead Wire: N (w/o Lead Wire and M8 Connector), Unit Specification: G [Instantaneous Flow: L/min (gal/min), Temperature: °C/°F], Bracket

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 04 (1/2), Output Specification/Temperature Sensor: 1 (Out 1 Flow Rate: Analog 1 to 5 V; Out 2 Temperature: None; Temperature Sensor: None), Lead Wire: N (w/o Lead Wire and M8 Connector), Unit Specification: Instantaneous Flow: L/min, Temperature: °C, Bracket: None, Calibration

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 04 (1/2), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector), Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: R (Bracket)

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: NPT, Port Size: 1/2, Output Specification/Temperature Sensor: Out 1 Flow Rate: Analog 1 to 5 V; Out 2 Temperature: None; Temperature Sensor: None, Lead Wire: w/o Lead Wire and M8 Connector, Unit Specification: Instantaneous Flow: L/min, Temperature: °C, Bracket: None, Calibration Certificate: w/Calibration

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 1/2, Output Specification: OUT1: Analog 1 to 5V, Temperature Sensor: None, Lead Wire: w/o Lead Wire w/M8 Connector, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: Bracket, Calibration Certificate: -, Made to Order: -