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Vacuum System Peripherals:

Connection NPT 1/8 N01 Connection NPT 1/4 N02 Port size Connection NPT 3/8 N03 Applicable model IRV1000 Option Connection NPT 1/2 N04 Size Symbol IRV3000 IRV2000 Connection G 1/8 F01 01 02 03 04 1/8 1/4 3/8 1/2 Connection G 1/4 F02 Connection G 3/8 F03 Connection G 1/2 F04 13-14-2 3 Vacuum System Peripherals: Electronic Vacuum Regulator: ITV209 Specifications ITV2090 ITV2091 Model 24 VDC

Vacuum

OO 3.24 5 . 1 2 8.01 Techn Vacuum System Specification (continued) 2.

Vacuum

OO 3.24 5 . 1 2 8.01 Technic Vacuum System Specification (continued) 2.

PF-OMN0009_C

50 4.5 5 1.5 PF3W520 28 22 32 40 50 4.5 5 1.5 PF3W540 34 30 42 48 58 4.5 5 1.5 PF3W511 44 36 48 58 70 5.5 7 2 -41No.PF-OMN0009CN-F PF3W521 2X A AA B DD E F G H J K L N P 11/4,11/2 104 74 31 52 39.5 G 11/4 108 76 33 54 41.5 PF3W521 56 76.6 71.6 28.5 54 25 27.5 3.5 14 G 11/2 112 78 35 56 43.5 -42No.PF-OMN0009CN-F PF3W504/520/540/511/521() A AA PF3W504--T 81 50 PF3W520--T 89 54 PF3W540--

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 04 (1/2), Output Specification/Temperature Sensor: 1 (Out 1 Flow Rate: Analog 1 to 5 V; Out 2 Temperature: None; Temperature Sensor: None), Lead Wire: N (w/o Lead Wire and M8 Connector), Unit Specification: G [Instantaneous Flow: L/min (gal/min), Temperature: °C/°F], Bracket

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 04 (1/2), Output Specification/Temperature Sensor: 1 (Out 1 Flow Rate: Analog 1 to 5 V; Out 2 Temperature: None; Temperature Sensor: None), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: G [Instantaneous Flow: L/min (gal/min), Temperature: °C/°F], Bracket

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: NPT, Port Size: 1/2, Output Specification/Temperature Sensor: Out 1 Flow Rate: Analog 1 to 5 V; Out 2 Temperature: None; Temperature Sensor: None, Lead Wire: w/o Lead Wire and M8 Connector, Unit Specification: G [Instantaneous Flow: L/min (gal/min), Temperature: °C/°F], Bracket: None, Calibration

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

and turn to operature and lock override. 2-Rc(PT)1/8 (P port) 2-Rc(PT)1/8 (P port) 60.9 (GZ, GS: 61.6) [62.6] 59.9 (GZ, GS: 60.6) [61.6] 78.8 (GZ, GS: 80.2) [82.2] 10 10 91.7 (GZ, GS: 93.1) [95.1] SY B B B B B P 40 P 39 35 35 A A A A A SYJ 2 19 19 10 10 SX MAX.5 (Lead wire length) 2-4.5 VK G: 300 H: 600 (Mounting holes) (Pitch) P=10.5 10.5 VZ L2 4 L1 VF VFR 48.5 [55] VP7 36.1 A A A A 29.5

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

) Manual override 2NPTF (P port) 2NPTF (P port) 10 60.9(GZ:61.6) [62.6] 59.9(GZ:60.6) [61.6] 10 78.8(GZ:80.2) [82.2] 91.7(GZ:93.1) [95.1] 35 B B B B B 19 P 40 39 P 35 A A A A A 19 2 MAX.5 10 10 (Lead wire length) G : About 300 H : About 600 24.5 (Pitch) P=10.5 10.5 (Mounting holes) L2 4 L1 (Non-locking) Manual override A A 20 48.5 [55] 15 B B 5 36.1 1.5 29.5 A A (Pitch) P=10.5 17.5 2n-One-touch

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

and turn to operate and lock override. 12.7 16.4 50.6 (GZ, GS: 51.3) [52.3] 2 10 A 8.2 2 15.7 2-1.8 34.8 [41.3] 7.4 7.1 (Mounting holes for manifold) Manual override G: 300 H: 600 (Non-locking) (Lead wire length) 28 [34.5] 20 15.6 13.5 15 9 44 48.6 (GZ, GS: 49.3) [50.3] 15 11 10 P R 20 3-M3 X 0.5 9.2 7 (Piping port) Bracket 47.8 (GZ, GS: 48.8) [48.8] [ ] for AC Other dimensions are the

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

CH1 has 2 switch outputs.

PF-OMN0011_C

-26-B) (ZS-26-01) ZS-26-01 1 (ZS-26-B) 190 2,1/41/2 72 2, , -15No.PF-OMN0011CN-C , 1 DC() 2 N.C.

PF2x2.eng

Input of the Set point 2 L/min, L CFM x 10-2, CFM x 10-1, ft3 x 10-2, ft3 x 10-1, gal(US)/min, gal(US) 1 Brown DC(+) Non-Reverse output Reverse output Refer to the product catalogue or SMC website (URL http://www.smcworld.com) for more information about panel cut-out dimensions.

Table of Contents

Refer to pages 13-2-4 to 13-2-5 for ejector system unit. Refer to pages 13-2-32 for ejector system manifold. Refer to pages 13-2-40 to 13-2-41 for external vacuum supply system unit. Single unit Single unit 13-2-68 to 13-2-72 Manifold Manifold Refer to page 13-2-54 for external vacuum supply system manifold.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

VZ1000-1A-2 Note No.

Vacuum Equipment

-www.stevenengineering.com -80 kPa -70 kPa -60 kPa -50 kPa -40 kPa -80 kPa -70 kPa -60 kPa -50 kPa -40 kPa Pad diameter (mm) Pad diameter (mm) Pad diameter (mm) 6 6 4 4 2 2 Lifting force (N) Lifting force (N) Selection Graph (1)-2 Pad Diameter Selection Graph by Lifting Force Horizontal Lifting (50 to 250) Selection Graph (2)-2 Pad Diameter Selection Graph by Lifting Force Vertical Lifting

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 04 (1/2), Output Specification: 2 (OUT1: Analog 4 to 20mA)

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 1/2, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: -, Lead Wire: -, Units on Label: -, Bracket: -, Calibration Certificate: -, Made to Order: -