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Table of Contents

N] F=-q x PA+w x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

Industrial Filters

Applicable model 84 84 03 FGD-CV002-04 06 03 FGD-CV003-04 06 03 FGD-CV004-04 06 03 FGD-CV001-04 06 32 32 FGDT/F FGDT/F FGDC/E FGDC/E Note 1) Same as standard product except for cover assembly Note 2) 03, 04, and 06 indicate the relevant port sizes (Rc3/8, 1/2, 3/4).

Table of Contents

Displacement of Section A when force acts on Section F Displacement of Section A when force acts on Section F Guide central axis (1 axis type) F A F F For the double axis type, this is the cylinder's central axis.

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

CY1

M1 = F x L F A F F A L L L Opposite port side Guide central axis (single axis type) Port side For the dual axis type, this is the cylinder's central axis.

REA/REB

M1 = F x L Port side A M2 = F x L M3 = F x L Note) Deflection: Displacement of section A when force acts on section F REAH10 REAH10 REAH10 Slider Type/Slide Bearing REAS Slider Type/Ball Bushing REAL 0.08 0.03 Deflection (mm) Deflection (mm) Deflection (mm) 0.02 0.06 0.02 0.04 0.01 0.01 0.02 0.5 1.5 2.5 0 0.5 1.5 0 0.5 1.0 1.5 0 1.0 2.0 Moment (Nm) 1.0 Moment (Nm) Moment (Nm) REAH15, 20,

Magnetically Coupled Rodless Cylinder

Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 40 30 20 20 30 40 50 3. Select the bore size and type of magnet holding force (types H, L) from Lo and Fn based on data K A .

2

)-A 03-A Y510-(02)-A 03-A Y610-03-A (04)-A Y610-(03)-A 04-A 02A VHS40-03A 04A VHS40-06A VHS50-06A 10A Pressure relief 3 port valve Note 6) VHS20-01A 02A VHS30-02A 03A Attachment 02-A E400-03-A 04-A 06-A Piping adapter Note 6) E100-M5-A 01-A E200-02-A 03-A 02-A E300-03-A 04-A E500-06-A E600-06 10 02-A IS10E-4003-A 04-A 06-A Pressure switch with piping adapter Note 6) 01-A IS10E-2002-A

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

3.0 2.0 0.33 [0.48] 0.43 0.43 0.41 0.39 2.0 [0.74] 2.7 2.7 2.1 2.4 Pressure center VF5520 VF544--04 1 2 0.21 [0.40] 0.35 3.1 [2.5] 1.6 0.18 [0.47] 2.6 [0.78] Note 1) With sub-plate Note 3) [ ]: Normal position Note 2) Weight stands for grommet type. 3-4-33 34 Series VF5000 How to Order Port size Thread type Nil 1 4 Rc 02 F 03 3 8 G N NPT T NPTF Body ported VF5 1 1 G 03 20 44 Base mounted

LEC-OM02704CN

6][0] 14.5.5 8 [6][1] (4) ([8][2]) [8][2] [2][0] 1EA5 4 (5) ([8][2]) [8][2] [0][0] 1EA5 4 (6) ([C][0]) [C][0] [0][1][F][F] 9 8 (16)10 9 14 15 14 (7) ([C][6]) [C][6] [0][1][F][F] 0 8 (16)10 (8) ([C][7]) [C][7] [0][1][F][F] 020 8 (16)10 (9) ([C][8]) [C][8] [0][1][F][F] 020 8 (16)10 (10)(DWELL)([C][A]) [C][A] [0][1][F][F] (DWELL) 020 8 (16)10 (11)([C][B]) [C][B] [0][1][F][F] 03

Valve: None; Stop Valve: None, Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: F (Out 1: PNP; Out 2: Flow Rate: Analog 4 to 20 mA; Temp.: None; Temperature Sensor: None), Lead Wire: N (w/o Lead Wire and M8 Connector), Return Unit Flow Switch Unit Specifications: F (Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °F)

.: °F

Title not found

J r + ' + t i t t t t t l t | l , b o r j | | | , ' l l l " ' r e , l l l t t l Sealtype . | | E ' r l Valve s-port Body Ported liT T.T""n l l l l E f f i . I r F I l f f i r ] Pilot valve specifications I I il*d*drffir -.

99

{Rc3/8} FGH200-04 {Rc1/2} X20 (0.2 m) X40 (0.4 m) FGD Pressure drop (MPa) Pressure drop (MPa) FGE FGG FGA FGC FGF Flow rate (L/min) Flow rate (L/min) FGH FGH FGH200-06 {Rc3/4} FGH200-10 {Rc1} FQ1 Pressure drop (MPa) Pressure drop (MPa) FN EB ES Flow rate (L/min) Flow rate (L/min) FGH300 Series FGH300-03 {Rc3/8} FGH300-04 {Rc1/2} X20 (0.2 m) X40 (0.4 m) Pressure drop (MPa) Pressure drop (

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

force acts on Section F Displacement of Section A when force acts on Section F Guide central axis (1 axis type) F A F F For the double axis type, this is the cylinder's central axis.

REA/REB

F A F For the double axis type, this is the cylinders central axis.

REA/REB

F A F For the double axis type, this is the cylinders central axis.