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Rated Control Flow Range: 10 (0.1 to 10 L/min), Port Size: N1 (1/8 NPT), Input/Output Specification: 1 (Input: Analog 1 to 5 V, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 1 to 5V or 0 to 10V), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: Unit Specification, Bracket: S (Bracket (mounting position: Stream side)), Operation Manual/Calibration Certificate

AIR FLOW CONTROLLER. FLOW CONTROLLER FOR AIR. 0.52400 lb. Q46.

Rated Control Flow Range: 10 (0.1 to 10 L/min), Port Size: N1 (1/8 NPT), Input/Output Specification: 1 (Input: Analog 1 to 5 V, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 1 to 5V or 0 to 10V)

Rated Control Flow Range: 10 (0.1 to 10 L/min), Port Size: N1 (1/8 NPT), Input/Output Specification: 2 (Input: Analog 4 to 20mA, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 4 to 20mA), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: Unit Specification, Bracket: S (Bracket (mounting position: Stream side))

Rated Control Flow Range: 10 (0.1 to 10 L/min), Port Size: N1 (1/8 NPT), Input/Output Specification: 1 (Input: Analog 1 to 5 V, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 1 to 5V or 0 to 10V), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: Unit Specification, Bracket: R (Bracket (mounting position: Side)

Rated Control Flow Range: 10 (0.1 to 10 L/min), Port Size: N1 (1/8 NPT), Input/Output Specification: 1 (Input: Analog 1 to 5 V, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 1 to 5V or 0 to 10V), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: Unit Specification, Bracket: None, Operation Manual/Calibration Certificate: K (with Operation Manual and Calibration

Rated Control Flow Range: 10 (0.1 to 10 L/min), Port Size: N1 (1/8 NPT), Input/Output Specification: 1 (Input: Analog 1 to 5 V, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 1 to 5V or 0 to 10V), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: M (SI units only)

1

n1 + 16 x n2 + a + b x n3 L2 = 12.5 x n1 + 16 x n2 x 48 M = L1/12.5 + 1 Decimal fractions are truncated.

Electric Actuator with Integrated Guide

Pitch = 100 60 (n1-1) x pitch 47.5 Section AA n1 100 200 300 400 500 600 n2 1 1 1 1 2 2 Stroke Model LTF6EPF100--X10 LTF6EPF200--X10 LTF6EPF300--X10 LTF6EPF400--X10 LTF6EPF500--X10 LTF6EPF600--X10 1.

Compact 5-Port Solenoid Valve

C6: 6 (SMC) (Station n) (Station 1) 0 BUS 13.6 9.1 D D B 2 1 59.9 3/5 E 3/5 60 B 2 B 2 B 2 B 2 E 2 P 1 PWR 25.8 23.9 A 4 A 4 A 4 A 4 A 4 1 P 3 S 13.2 8.9 (21) (7.5) (11.8) (For DIN rail mounting) 4 x M8 3-pin socket 2 x M12 M3 (Pitch) P = 9 23 11.5 Manifold block internal wiring specifications Nil: Double wiring S : Single wiring L1 = 9 x n1 + 139 + 21 x n2 L2 = 9 x n1 + 43.4 L4 = L3 10.5

LEC-OM02704CN

) PD20 (LSP)(LSN)OFF PD20 PD20 (LSP)(LSN) 0 1 2 3 (LSP) (LSN) 0() 1() 2() 3() PD20 0 S S S S () 0 r / m i n 0 r / m i n L S P L S P O N O N O F F L O F F L S N S N 1 S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F O F F L L S N S N 2 S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F L S N O F F L S N 3 S S S S S S S 0 r / m i n 0 r / m

Series SV

n1) (Station 1) n1 = Valve stations n2 = Input block stations Light/Surge voltage suppressor L2 = L1 10.5 L3 = 16 x n1 + 60 L4 = L3 + 81 + 21 x n2 L5 = (L1 L4)/2 L6 = 16 x n1 + 48 L7 = 21 x n2 + 81.5 63.5 60 52.5 12 (for DIN rail mounting) (7.5) L1: DIN rail overall length (mm) Valve stations (n1) 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Input block stations (n2) 0 1 2 3 4 5 6

High Vacuum Angle Valve

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 For XLF/XLG Symbol Changed part*2 Leakage [Pam3/s or less]*1 Internal External Nil None 1.3 x 1010 (FKM) 1.3 x 1010 (FKM) A w, e, r 1.3 x 108 1.3 x 108 B w, e 1.3 x 108 1.3 x 1010 (FKM) C r 1.3 x 1010 (FKM) 1.3 x 108 D w 1.3 x 108 1.3 x

Fieldbus System

P), 3/5(E) port] Applicable tube O.D.: 8, 5/16" Applicable tube O.D.: 3.2, 1/8" 4, 5/32" 6, 1/4" (Station 1) (Station n) 59.5 56.6 P P 1 B 1 45.5 2 2 B 2 B 2 B 2 B 24.6 3/5 E 3/5 E 23 A 4 A 4 A 4 A 4 A 4 8.6 10 7.5 (Pitch) P = 10.5 11.8 (For DIN rail mounting) 18.3 L2 = L1 10.5 L3 = 10.5 x n1 + 53 L4 = L3 + 97.5 + 47 x n2 L5 = (L1 L4)/2 L6 = 10.5 x n1 + 42 L7 = 47 x n2 + 81 13.5 18.3 L1

SV

P 1 5 Light/Surge voltage suppressor (Station 1) (Station n2) (Station n1) (Station 1) 3 E 1 P 1 1 Individual SUP spacer SV3000-00Interface regulator 82.7 Individual EXH spacer 63.8 60 SV3000-M1Interface regulator 12 (For DIN rail mounting) (10) 14.7 n1 = Valve stations n2 = Input block stations B B B B 157.9 139.9 L2 = L110.5 L3 = 20.5 x n1 + 70.5 L4 = L3 + 81 + 21 x n2 L5 = (L1L4)/2 L6

C85

Note 8 10 12 16 20 25 Every set includes: n1 rod packing n1 packing retaining washer n1 retaining ring 20 C85-20PS Foot (1 pc.) C85L16A C85L25A C85L10A Foot (2 pcs. with mounting nut 1 pc.)

Aluminum High Vacuum Angle Valve

K V 1 10 XLA S P1P2 XL XL Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2++1/Cn) when in series, and C=C1+C2++Cn, when in parallel.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

End plate assembly 17.8 2 x M4 mounting hole 4 x 5.3 (For mounting) L3 18 63 21 L2 5 (Rail mounting hole pitch: 12.5) L1 With option Light/surge voltage suppressor (Station 1) (Station n2) (Station n1) (Station 1) 58.4 101.2 82.7 63.8 60 12 Individual SUP spacer 1 1 1 1 (For DIN rail mounting) (10) 14.7 Individual EXH spacer n1 = Valve stations n2 = Input block stations L2 = L1 10.5 L3

Table of Contents

m/s 2 in X, Y, Z directions, 3 times each (De-energized) 3% F .S. or less 1000 VAC for 1 min.