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1

Stroke Z MB CA2 NDh8 Mounting nut Rod end nut MM GA NDh8 D MM NN GA Piping port 2 x M5 x 0.8 CQ2 CQS NN C D Luberetainer B 0 0.3 JA Z + 2 x Stroke S + Stroke H NA F A NA F H + Stroke A B 0 0.3 MXH MXQ MGP CY CX With air cushion: CJ2WB Bore size Stroke AZ CK1 C(L)K C(L)KU Mounting nut WA WA CKQ Rod end nut CKZ2N 45 GA Piping port 2 x M5 x 0.8 GA C WRF B 0 0.3 NA NA B 0 0.3 Z + 2 x Stroke

SY

SS5Y54, #2 (#2 + #6 + #7 + #8 + #19) 127 Type45 Base Mounted Type SY3000/5000 Manifold spec. sheets Order made Type 45 Type 45Single valve A NA Features Precautions Single valve Type 20 Type 23 Type 20P Type 23P Type 41 Type 42 Type 43 Type 41P Type 42P Type 43P C4 C6 C8 SS5Y5-45FDStations UScale: 30% C4 C6 C8 Note) Dimensions L1 to L4 of SS5Y5-45FDStations DC4 C6 C8 are the same as SS5Y5

CATALOG

X B 5 _ C D N R O D T H R E A D R O D B O R E S I Z E S TA N D A R D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 6 100010 120012 140014 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8 1 1 1 1-3/8 1-3/8 1-3/8 2 2-1/2 Inches Example: 04 = 4 Stroke E 1 G 1 3/8 H 1 3/4 J 2 K 2 1/2 L 3 M 3 1/2 Z Consult SMC Customer Service For

5 Port Solenoid Valve Series SY3000/5000/7000/9000

16.2 VQZ (20) 15 EA P EB 28.1 [35.1] SQ 32.5 For manifold gasket positioning 2 x 2.2 die-cast hole (P, EA, EB port) 1/8 27.2 20.5 23 VFS VFR L plug connector (L): SY5120-L(-F ) 1 2 C4, N3 C6, N7 C8, N9 M plug connector (M): SY5120-M(-F ) DIN terminal (D, Y): C4, N3 C6, N7 C8, N9 SY5120-WO(-F ) 1 2 M8 connector (WO): C4, N3 C6, N7 C8, N9 VQ7 1 2 C4, N3 C6, N7 C8, N9 D Y 1 2 SY5120(-F ) 60.9

A

X B 5 _ C D N R O D T H R E A D R O D B O R E S I Z E S TA N D A R D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 6 100010 120012 140014 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8 1 1 1 1-3/8 1-3/8 1-3/8 2 2-1/2 Inches Example: 04 = 4 Stroke E 1 G 1 3/8 H 1 3/4 J 2 K 2 1/2 L 3 M 3 1/2 Z S T R O K E Hundredths Of An Inch

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

-5LOU-C6 2 sets (Double solenoid part no.)

Table of Contents

Weight m X-axis Y-axis Z-axis Z 20 W 20 mm 30 mm 50 mm 2 kg 50 Y 30 3.

Compact 5-Port Solenoid Valve

Internal Pilot How to Order Manifolds JJ5SY 3 10S6 Q 2 2 05 U C6 Made to Order (Refer to page 135 for details.)

Vacuum

:t ; : ; = '6;; 6 < EI 6 < EI d-z E < 8i E < ' 6 2 'dz 'Eiz 6 Z ,n2 < 2 6 V < 2 6 Y a z 6 Y d t d 2 45 90 PSI (3 ^ 6 kg cm'?) o.17 0.004/ 0,025/ o.17 ).00410.025 5 c/s 40 120"F (5 50.C) I I I (PV) . (PSePD) (PVe)PSePD) ' Provided as standard: l\Iounting bracket t See p 28 & 29 also.

Vacuum

:t ; : ; = '6;; 6 < EI 6 < EI d-z E < 8i E < ' 6 2 'dz 'Eiz 6 Z ,n2 < 2 6 V < 2 6 Y a z 6 Y d t d 2 45 90 PSI (3 ^ 6 kg cm'?) o.17 0.004/ 0,025/ o.17 ).00410.025 5 c/s 40 120"F (5 50.C) I I I (PV) . (PSePD) (PVe)PSePD) ' Provided as standard: l\Iounting bracket t See p 28 & 29 also.

5 Port Solenoid Valve SY Series

One-touch fitting for 4 C4 SY3000 2 position double One-touch fitting for 6 C6 One-touch fitting for 4 C4 2 One-touch fitting for 6 C6 For DC SY5000 One-touch fitting for 8 C8 5 24 VDC 6 12 VDC SY9000 has no bracket.

Vacuum System Peripherals:

S U D side D U side 2 to 10 stations B Special specifications M 2 to 20 stations Both sides Made to order. When using both types, specify C4 and C6 specifically; do not just use X marking.

PFM3.eng

Measurement mode Mounting screws Bracket Press the button for 2 seconds or longer In measurement mode, press the button for 2 seconds or longer, to display [F 0]. The [F ] indicates the mode for changing each Function Setting. Press the button for 2 seconds or longer in function selection mode to return to measurement mode.

Table of Contents

Indicate each part number. 4 Table (2) How to Order Solenoid Valves Z L 5 ZX1-VJ114 Z L 4 2 5 ZX1-VJ3 Manual override Type of actuation Body option Light/Surge voltage suppressor Nil B Non-locking push type Locking slotted type 1 2 N.C. (Normally closed) N.O.

Ejector Valve Unit Series ZYY/ZYX 1

Ejector valve ZYY35LZ-10S-E15C Double solenoid (24 VDC) SY3240-5LZ J ZZY 1 U Single solenoid (24 VDC) SY3140-5LZ Blanking plate assembly SX3000-75-1A Cylinder port size C6 : With 6 One-touch fitting Manifold base (4 stations) ZZYY3-45-04D-C6-J1U With ejector Number of ejectors 1 to 10 Example) ZYY-J3U ZYY35LZ-10S1-E15C ZYY35LZ-10S 2 SET 1 SET 1 SET U side Stations3 2 1 D side 13-8-6 7 Ejector

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: N (None), Calibration Certificate: A (w/Calibration Certificate)