SMC Corporation of America
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Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: F01 (G1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: G1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: F01 (G1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: R (Bracket for w/o Flow Adjustment

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: G1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/o Flow Adjustment Valve: ZS-33

25, 50 and 100 /min, and is suitable for use with air, nitrogen, argon or carbon dioxide. 2-color display flow switch., Sensor and monitor separation, which allows remote monitors' centralization., Integrated flow adjustment valve as an option, reducing piping and saving space (unique feature in the market)., Operation indication also on the sensor., Fast response: either 50 ms, 0.5s, 1,

/min, and is suitable for use with air, nitrogen, argon or carbon dioxide. 2-color display flow switch., Sensor and monitor separation, which allows remote monitors' centralization., Integrated flow adjustment valve as an option, reducing piping and saving space (unique feature in the market)., Operation indication also on the sensor., Fast response: either 50 ms, 0.5s, 1, or 2s can be chosen

To obtain more detailed information about operating this product, please refer to the SMC website (URL http://www.smcworld.com) or contact SMC directly. approx. 1 second The flow range is displayed 10 L/min (PFM510) 25 L/min (PFM525) 50 L/min (PFM550) 100 L/min (PFM511) Indicator LED (OUT2) Indicates the output status of OUT2. LED is ON (Red) when OUT2 is ON.

(mm) Port size R 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 4 6 8 10 12 1(P) 1(P) M5 4 6 8 10 12 1(P) 1(P) M5 Applicable tubing O.D. (mm) Applicable tube O.D. (mm) Applicable tubing O.D.

4 NBR y u Brass 5-7-1 59 Series VR4151/4152 How to Order A 01 5 1 1 VR41 Indicator light 0 No 1 Yes Sub-plate Side piping B A Bottom piping Port size W/o sub-plate 00 Rc 01 1 8 NPT N01 1 8 G F01 1 8 Number of pilot ports Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Black Rc 01 1 8 NPT N01 1 8 G F01 1 8 Green Y Yellow Body option 1 0 External pilot type Internal pilot type Twist selector (2 position) Key selector (2 position) Note 1) When selecting the flush type, it is not necessary to select the suffix for the actuator.

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Type Symbol Cylinder side In the side of solenoid valve M5 01 02 03 04 F01 F02 F03 F04 U10/32 N01 N02 N03 N04 Elbow 2 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 G 1/8 G 1/4 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT

Port size Type Cylinder side M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/2 10-32UNF NPT1/8 NPT1/4 NPT3/8 NPT1/2 Symbol M5 01 02 03 04 F01 F02 F03 F04 U10/32 N01 N02 N03 N04 Solenoid valve side M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 PF1/8 PF1/4 PF3/8 PF1/2 10-32UNF NPT1/8 NPT1/4 NPT3/8 NPT1/2 Elbow 2 Control type 0 1 Meter-out Meter-in SMC Pneumatics, Inc. 14 Series ASIII1F-T Dimensions

Port size Symbol Cylinder side In the side of solenoid valve M5 01 Elbow M5 x 0.8 R 1/8 M5 x 0.8 Rc 1/8 Rc 1/4 Note 1) 02 R 1/4 Rc 3/8 Note 2) 03 04 F01 Rc 3/8 Rc 1/2 G 1/8 G 1/4 Note 1) R 3/8 R 1/2 R 1/8 Caution Control F02 R 1/4 Meter-out Meter-in Be sure to read before handling.

7 PFM (12) 2 (11) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I

Effective area (mm2) Port size Weight (kg) Model Type of actuation 3.3 1 1 1 1 1 1 1 120 280 300 120 280 300 110 VP4150 1 4 1 2 Single 9.5 2 position 3 position VP4170 3.8 VP4250 1 4 1 2 Double 10 VP4270 4.4 VP4350 Closed center 4.4 Exhaust center 1 110 VP4450 3-6-2 3 Large Size 5 Port Solenoid Valve Rubber Seal Series VP450/470 How to Use DIN Terminal Precautions 1.

Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (External pilot port) Manual override (Non-locking) Electrical entry (2.3) 2-5.6 (Mounting hole) Rc 1/8 (PE port) Max. 10 (With direct manual override) (Grommet terminal) 5-Rc 3/8, 1/4 ( ): Rc 1/4 0 1 0 1 0 1 0 1 0 1 0 1 2 position double: VFR321 -E, VFR321 -DZ 0 1 0 1 3 position closed center: VFR331 -E,