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Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C8 (ø8 (5/16") one-touch fitting), Piping Entry Direction: L (Bottom), Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: R (Bracket for w/o Flow Adjustment

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: ø8 (5/16") one-touch fitting, Piping Entry Direction: Bottom, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/o Flow Adjustment Valve: ZS

PFM3.eng

Measurement mode Mounting screws Bracket Press the button for 2 seconds or longer In measurement mode, press the button for 2 seconds or longer, to display [F 0]. The [F ] indicates the mode for changing each Function Setting. Press the button for 2 seconds or longer in function selection mode to return to measurement mode.

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C8 (ø8 (5/16") one-touch fitting), Piping Entry Direction: L (Bottom), Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: Lead Wire w/Connector (2 m), Option: R (Bracket for w/o Flow

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: ø8 (5/16") one-touch fitting, Piping Entry Direction: Bottom, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: Lead Wire w/Connector (2 m), Option: Bracket for w/o Flow Adjustment Valve

2

(See Fig. 2.)

VQ7-6/7-8

Blank plate (filter, regulator) 4 Number of manifold blocks required for mounting (stations) 2 2 2 2 2 2 2 1 2 VQ7-6-FHG-D 4 Use of control units 2 VQ7-6-FG-D 1) The supply pressure (Po) passes through the regulator with filter and is adjusted to the prescribed pressure.

PFxx-OMJ0005CN

-59No.PF-OMJ0005CN-I PFM7-(N)01L/(N)02L/F01L 2 17 -60No.PF-OMJ0005CN-I PFM7S-(N)01/(N)02/F01 17 2 -61No.PF-OMJ0005CN-I PFM7S-(N)01L/(N)02L/F01L 2 17 -62No.PF-OMJ0005CN-I PFM7-F02 21 2 -63No.PF-OMJ0005CN-I PFM7-F02L 2 21 -64No.PF-OMJ0005CN-I PFM7S-F02 21 2 -65No.PF-OMJ0005CN-I PFM7S-F02L 2 21 -66No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7 2 -67No.PF-OMJ0005CN-I PFM7-C4L/C6L/C8L/N7L 2 -68No.PF-OMJ0005CN-I

PFxx-OMO0004CN

(31)[F 2]OUT2(39) 32 (28) -27No.PF-OMO0004CN-E [] 2 [F 0] 2 F0 F1 F99 2 [rEF] [Anr] [F 0][rEF] 29 [Uni] 1 [ L] L/min [oU1] OUT1 [HYS] [1ot] OUT1 [1_P] [F 1][oU1] [P_1] OUT1 [100] 100 L/min 31 [H_1] OUT1 [ 10] 10 L/min [CoL] OUT1 [SoG] ONOFF 2 [HYS] [oU2] OUT2 2 [2_P] [2ot] OUT2 [F 2][oU2] 39 2 [100] 100 L/min [P_2] OUT2 2 [ 10] 10 L/min [H_2] OUT2 [F 3][rES] [rES] [1. 00] 1

Table of Contents

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VQ7-6/7-8

AXT502-9A Blanking plate (Filter, Regulator) Blanking plate (Pressure switch) 4 Number of manifold blocks required for mounting (stations) 2 stations 2 stations 2 stations 2 stations 2 stations 2 stations 2 stations 1 station 2 VQ7-6-FHG-D 4 2 Use of Control Unit VQ7-6-FG-D 4 2 1.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

1 2 2 2 2 2 2 No. of stations for mounting 03L VFS 02Y 03Y VS4 1(P), 3(R2), 5(R1) port size C6R 1/4 (Down side) 1/4 (Up side) 1/4 (Both sides) 3/8 (Down side) 3/8 (Up side) 3/8 (Both sides) 12 One-touch fitting (Down side) 12 One-touch fitting (Up side) 12 One-touch fitting (Both sides) Mixed 02D C8R VQ7 02U C10R 02B C6L EVS 03D C8L 03U C10L VFN 03B C12D C12U Size C12B 1 Size 1 VV71 02R

Stations: 2 Stations, AB Port: C8L (One-touch Fitting for ø8 Tube, Left), AB Thread: Rc, Control: None, PR Port: 03B (3/8, Both Sides)

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N02 (NPT1/4), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector), Option: R (Bracket for w/o Flow Adjustment Valve: ZS-33-M)

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/4, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: Bracket for w/o Flow Adjustment Valve: ZS-33-M

Stations: 1 Station, AB Port: C8L (One-touch Fitting for ø8 Tube, Left), AB Thread: Rc, Control: None, PR Port: C12U (One-touch Fitting ø12, Top)