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Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: N (None)

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: S (Bracket for w/Flow Adjustment Valve)

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: ø1/4 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: Bracket for w/Flow Adjustment Valve

5 Port Solenoid Valve Series SY3000/5000/7000/9000

[35.1] SQ 32.5 For manifold gasket positioning 2 x 2.2 die-cast hole (P, EA, EB port) 1/8 27.2 20.5 23 VFS VFR L plug connector (L): SY5120-L(-F ) 1 2 C4, N3 C6, N7 C8, N9 M plug connector (M): SY5120-M(-F ) DIN terminal (D, Y): C4, N3 C6, N7 C8, N9 SY5120-WO(-F ) 1 2 M8 connector (WO): C4, N3 C6, N7 C8, N9 VQ7 1 2 C4, N3 C6, N7 C8, N9 D Y 1 2 SY5120(-F ) 60.9 Applicable cable O.D. 3.5 to

1

35 + 25 (n 2) (n = 2, 3, 4, 5) CJ2 D-A9lV 5 10 35 10 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 25 (n 2) (n = 2, 3, 4, 5) CM2 Band mounting CG1 D-H7l/H7lW D-H7BA D-H7NF 10 15 60 15 + 45(n 2) 2 (n = 2, 4, 6) Note 3) 60 + 22.5 (n 2) (n = 2, 3, 4, 5) MB D-C7l D-C80 10 15 50 15 + 40(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 20 (n 2) (n = 2, 3, 4, 5) CA2 D-H7C D-C73C D-C80C 10 15 65 15 + 50(n 2)

5-Port Solenoid Valve

D sides) ( ) C6: 3.6 N7: 7.4 M5 x 0.8 [4(A), 2(B) port] One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 2 : 3.2, 1/8" : 4, 5/32" : 6, 1/4" Connector Connecting Base (Station n) (Station 1)--D-sub, Flat Ribbon ( ) C6: 77.3 N7: 81.1 P 1 P 1 (73.8) Terminal Block 3/5 E 3/5 E B 2 B B 2 B 2 B 2 2 Lead Wire A 4 A 4 A 4 A 4 A 4 Circular Connector EX500 * These figures show the SS5Y3

5 Port Solenoid Valve Series SV1000/2000/3000/4000

76.7 76.7 33.6 33.6 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A (12) (12) 17.5 6.5 9.6 8.5 17.2 (7.5) (7.5) C8: 1(P) port C8: 8 One-touch fitting 2n x C3, C4 (4(A), 2(B) port) C3: 3.2 One-touch fitting C4: 4 One-touch fitting Dimensions 1 39.5 Formula L1 = 8.5n + 31, L2 = 8.5n + 74 n: Station (Maximun 16 stations) L n 2 48 3 56.5 4 65 5 73.5 6 82 7 90.5 8 99 9 107.5 10

Series SV

L dimension L dimension 8 6 5 4 3 2 7 1 0 0 7 98 185.5 7 5 4 3 2 1 6 0 1 8 110.5 198 0 7 6 5 4 3 8 2 1 2 9 123 210.5 1 M12 input block (n) 8 7 6 5 4 3 2 3 10 135.5 223 2 L dimension 9 8 7 6 5 4 4 11 148 235.5 3 10 9 8 7 6 5 12 160.5 248 4 Connector type: For M (m + n = 2 to 8) 10 9 8 7 6 173 5 11 10 9 6 1) When a DIN rail other than the above is required, refer to the separate DIN rail dimensions

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

) C6: 33.6 N7: 37.4 Note) Refer to page 176 for dimensions of connector types. 48 Body Ported 10-SY3000/5000/7000/9000 [ ]: AC Dimensions: Series 10-SY5000 2 position single Grommet (G), (H): 10-SY5120(-F2) G H C4, N3 C6, N7 C8, N9 Foot bracket 10-SY5120-F1 G H C4, N3 C6, N7 C8, N9 47 38 2 x M3 x 0.5, thread depth 4 (For mounting bracket) 22.6 12.7 16.7 16.6 29 22 + (For mounting) 2 x 3.2

4/5 Port Solenoid Valve

Not required Mounting orientation Unrestricted Shock/Vibration resistance m/s 2 Note 2) 150/30 Dustproof ( M8 connector conforms to IP65.)

0.4

76.7 76.7 33.6 33.6 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A (12) (12) 17.5 6.5 9.6 8.5 17.2 (7.5) (7.5) C8: 1(P) port C8: 8 One-touch fitting 2n x C3, C4 (4(A), 2(B) port) C3: 3.2 One-touch fitting C4: 4 One-touch fitting Dimensions 1 39.5 Formula L1 = 8.5n + 31, L2 = 8.5n + 74 n: Station (Maximun 16 stations) L n 2 48 3 56.5 4 65 5 73.5 6 82 7 90.5 8 99 9 107.5 10

5 Port Solenoid Valve

76.7 76.7 33.6 33.6 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A (12) (12) 17.5 6.5 9.6 8.5 17.2 (7.5) (7.5) C8: 1(P) port C8: 8 One-touch fitting 2n x C3, C4 (4(A), 2(B) port) C3: 3.2 One-touch fitting C4: 4 One-touch fitting Dimensions 1 39.5 Formula L1 = 8.5n + 31, L2 = 8.5n + 74 n: Station (Maximun 16 stations) L n 2 48 3 56.5 4 65 5 73.5 6 82 7 90.5 8 99 9 107.5 10

SV

B 2 B 2 B 2 B 1 P 1 P V 5 V 1 P 3 E (Station n) (Station 1) Light/Surge voltage suppressor Individual SUP spacer MAX.21 (DIN rail dimension) SV2000-00Interface regulator SV2000-M1Interface regulator Individual EXH spacer 71.5 7.5 68.2 56.5 19.7 Block separation lever B B B B 145.6 127.6 A A A A B A B A B A B A L Dimension n: Stations L n 2 148 137.5 122.5 13 3 173 162.5 138.5 17.5 4 185.5

SX

A: Orange B: Green (n) (2) (1) stations (Press and turn for the locking type.)

Valve Single Unit

A: Orange B: Green (n) (2) (1) stations (Press and turn for the locking type.)

Valve Single Unit

A: Orange B: Green (n) (2) (1) stations (Press and turn for the locking type.)

CATALOG

1 3 Position/Exhaust Center 2 2 Position T H R E A D P O R T I N G Rc* Remove (N) when ordering N NPT F G* Remove (N) when ordering 02 1 4 (Body Size 2) 03 3 8 (Body Size 3) 04 1 2 (Body Size 4) 06 3 4 (Body Size 4) D I M E N S I O N S (N)VH S E R I E S B O D Y S I Z E 200 D I M E N S I O N S (N)VH S E R I E S B O D Y S I Z E 300 D I M E N S I O N S (N)VH S E R I E S B O D Y S I Z E

V

1 3 Position/Exhaust Center 2 2 Position T H R E A D P O R T I N G Rc* Remove (N) when ordering N NPT F G* Remove (N) when ordering 02 1 4 (Body Size 2) 03 3 8 (Body Size 3) 04 1 2 (Body Size 4) 06 3 4 (Body Size 4) D I M E N S I O N S (N)VH S E R I E S B O D Y S I Z E 200 D I M E N S I O N S (N)VH S E R I E S B O D Y S I Z E 300 D I M E N S I O N S (N)VH S E R I E S B O D Y S I Z E