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Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: C8 (ø8 (5/16") one-touch fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)]

Flow Rate Type: Standard, Operating Temperature Range(°C): -10～60, Operating Humidity Range(%): 35～85, Number of Inputs: 2, Number of Outputs: 1, Analog Voltage Output(V): [DC1-5V] 1-5V, Power Supply Type: DC, Power Supply Voltage(V): [24] 24±10%, Pipe Connection Direction: 2-way, Connecting Tube Diameter: [8] 8(5/16inch), Liquid contact parts material: Resin + Metal, Mounting Hole: Presence

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: C8 (ø8 (5/16") one-touch fitting), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: S (Bracket for w/Flow Adjustment Valve)

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: ø8 (5/16") one-touch fitting, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: Bracket for w/Flow Adjustment Valve

5 Port Solenoid Valve Series SY3000/5000/7000/9000

4 39.4 (23.9) 20 (P port) 1/4 0.9 31.5 [38.5] 2 18 40 EA P EB 24.5 28 For manifold gasket positioning 2 x 2.2 die-cast hole (EA, EB port) 1/8 36 39.4 L plug connector (L): SY7120-L(-F ) C8, N9 C10, N11 1 2 M plug connector (M): SY7120-M(-F ) C8, N9 C10, N11 1 2 DIN terminal (D, Y): SY7120(-F ) C8, N9 C10, N11 1 2 M8 connector (WO): SY7120-WO(-F ) C8, N9 C10, N11 1 2 D Y Applicable cable O.D

1

C4, C6 : 14.8 C8 : 17.2 1/4 [1(P), 5(EA), 3(EB) port] L3 Note) These figures show the SS5Y5-51S5-05D-C8.

SY

VVQ2000-51A-C8 VVQ2000-51A-C10 VVQ4000-50B-C8 VVQ4000-50B-C10 VVQ4000-50B-C12 Rc 1/8 01 4 One-touch fitting C4 SY7000 SY5000 6 One-touch fitting C6 8 One-touch fitting C8 SY9000 Rc 1/4 02 8 One-touch fitting 10 One-touch fitting Rc 1/4 Rc 3/8 8 One-touch fitting 10 One-touch fitting 12 One-touch fitting SY7000 C8 C10 02 03 C8 C10 C12 Mounting screw Port block assembly (cassette type) SY9000

SQ1000/2000

(-S) P. 45 P. 46 P. 47 P. 49 C8 L8 Terminal number SOL.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

4 3 position exhaust center 10-SY7000 02 02 03 1 4 S 5 VDC 5 3 position pressure center Note 1) : Enter a symbol for cable length.

Compact 5-Port Solenoid Valve

68.6 D D B 2 S B 2 B 2 B 2 B 2 1 P P 1 A 4 A 4 A 4 A 4 A 4 * These figures show the JJ5SY3-10F2-05DR-C8.

0.4

IP40 compliant 548 A Base Mounted Plug-in Unit VQC2000 Series How to Order Manifold VV5QC 2 1 08 FD1 C8 kit F P M L T VV5QC 2 1 08 SDQ C8 S kit Base mounted plug-in VQC2000 series Fill out for I/O serial kits only. Enter EX600-compliant S kit only. Valve stations Input block specification (Enter EX250-compliant S kit only.)

0.4

EX124D-SMJ1] Note 1) U S U S e w AXT100-1-P Note 2) U S U S SYJ AXT100-1-F Note 2) Note 1) Dust-tight, Water-jet-proof (IP65) Note 2) Top entry connector for FU, PU while side entry connector for FS, PS.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1) [EX123D-SUH1] Note 2) EX120-SSL1(-XP) Note 1) [EX123D-SSL1] Note 2) EX120-SSL2(-XP) Note 1) [EX123D-SSL2] Note 2) q EX120-SDN1 [EX124D-SDN1] Note 2) EX120-SCS1(-XP) Note 1) [EX124D-SCS1] Note 2) EX120-SCS2(-XP) Note 1) [EX124D-SCS2] Note 2) EX120-SMJ1(-XP) Note 1) [EX124D-SMJ1] Note 2) EX120-SCM1 EX120-SCM3 AXT100-1-P Note 3) U S U S U S U S w U S AXT100-1-J 20 Note 3) U S e r AXT100-

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1) [EX123D-SUH1] Note 2) EX120-SSL1(-XP) Note 1) [EX123D-SSL1] Note 2) EX120-SSL2(-XP) Note 1) [EX123D-SSL2] Note 2) q EX120-SDN1 [EX124D-SDN1] Note 2) EX120-SCS1(-XP) Note 1) [EX124D-SCS1] Note 2) EX120-SCS2(-XP) Note 1) [EX124D-SCS2] Note 2) EX120-SMJ1(-XP) Note 1) [EX124D-SMJ1] Note 2) EX120-SCM1 EX120-SCM3 AXT100-1-P Note 3) U S U S U S U S w U S AXT100-1-J 20 Note 3) U S e r AXT100-

SX

SS5X7-42 Rc C6 C6 0.75 0.75 1.8 1.9 3.0 0.19 0.20 0.23 0.20 0.25 0.18 0.18 0.44 0.46 0.75 0.81 0.82 1.9 1.9 3.0 0.23 0.20 0.16 0.12 0.12 0.20 0.20 0.45 0.43 0.66 1 8 Rc 1 4 Rc C8 C8 1 4 1 4 Rc Rc C10 Note) The value is for manifold base with 5 stations and individually operated 2 position type.

Table of Contents

VFS C8, C10 2-Rc 1/8 (PE port) VS4 VQ7 EVS C8: Max. 6.5 C10: Max. 7 6-Rc 1/2 (P, EA, EB port) For wiring specifications, refer to page 3-5-8.