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Note Power supply/Output connection cable Description ZS-28-A D Mounting screw (M3 x 8L) (Accessory) Bracket ZS-28-B With M3 x 5L (2 pcs.) Sensor connector ZS-28-C 1 pc. Panel mount adapter Panel mount adapter ZS-27-C With M3 x 8L (2 pcs.) ZS-27-D With M3 x 8L (2 pcs.)

PSE540/560

ZS-28-B) M3 x 5L 2. Mounting with panel mount adapter Secure the panel mount adapter with two M3 x 8L mounting screws. Panel Front protective cover (Part no. ZS-27-01) M3 x 8L 2. Connector pin numbers for power supply/output cable Panel mount adapter (Part no. ZS-27-C) Rotate 90 to mount. 16-3-30 9 Series PSE Specific Product Precautions 3 Be sure to read before handling.

1

Applicable bore size B2 C2 d H2 CK1 SNJ-006B 6 8 9.2 M6 x 1.0 4 NTJ-006A 6 5.5 6.4 M3 x 0.5 2.4 Y-J016C 16 11 16.6 21 M5 x 0.8 SNJ-010C 10 11 12.7 M8 x 1.0 4 NTJ-010C 10 7 8.1 M4 x 0.7 3.2 Part no.

Vacuum Unit

PE EXH Common Port open to atmosphere *1 PS 4 5/32" PD *2 M3 M3 : Not applicable 1 Air is also exhausted from the pilot valve when the valve type is R. Piping for PE port is available as an option (M3). (Refer to pages 15 and 16.) MExhaust Noise 2 A model with PD port is available as an option. (Refer to pages 9, 10, and 15.)

Low Differential Pressure Sensor

Description ZS-28-A Note D Power supply/Output connection cable Mounting screw (M3 x 8L) (accessory) Bracket ZS-28-B With M3 x 5L (2 pcs.) Sensor connector ZS-28-C 1 pc. Panel mount adapter Panel mount adapter ZS-27-C With M3 x 8L (2 pcs.) ZS-27-D With M3 x 8L (2 pcs.)

PSE550/300

Note Power supply/Output connection cable Description ZS-28-A D Mounting screw (M3 x 8L) (Accessory) Bracket ZS-28-B With M3 x 5L (2 pcs.) Sensor connector ZS-28-C 1 pc. Panel mount adapter Panel mount adapter ZS-27-C With M3 x 8L (2 pcs.) ZS-27-D With M3 x 8L (2 pcs.)

ZB-OM00301

Q2 +COM 30.30.4 4 L L 5 DC24V LO L 6 DC12V M M 5 MO M 5 4300 5MMO 6 B 6() 9 - No.ZB-OM00301 / kPa / P1 0-101 15V2F.S.7 P3 -100100 15V2F.S.7 8 EA EAM SI 9 NPN2 EAP [psi] 8 0-101 8 EB EBM SI 9 PNP2 EBP [psi] 8 8 FA FAM SI 9 NPN2 FAP [psi] 8 -100100 8 FB FBM SI 9 PNP2 FBP [psi] 8 73m 8 9kPa G 2m V 10 11 12 C2 2 B C4 4 N1 1/8 N3 5/32 K 12 L2 2 L4 4

Bernoulli Gripper

M3 x 0.5 6 2. The product performance of the Bernoulli gripper varies greatly depending on the type of workpiece.

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

A Mounting screw (M3 x 8L) (Accessory) Waterproof seal (Accessory) Option 2 Panel mount adapter Nil None Panel Sensor connector (4 pcs.) Front protection cover + Panel mount adapter 4C B Connector Mounting screw (M3 x 8L) (Accessory) Front protection cover Connector is not connected, but shipped together. This connector cannot be used with the PSE570 series.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) (mm) Q1 = M Q2 Y L2 max Size C1 = C L2-(3 x P) Q1 X L1 max Size 10 M3 5.5 to 8 Y 1 10 M3 X 3 7.5 to 14 Y = 15 M3, M4 7.5 to 9 Y 1.5 15 M3, M4 X 4 10 to 18 L2 = X = C2 = C 20 M3, M4, M5 9 to 10 Y 1.5 L1-(3 x P) 20 X 4.5 12 to 20 M3, M4, M5 30 11 to 13 Y 2 M3, M4, M5, M6 M3, M4, M5, M6 L1 = 30 Q2 = M X 5 14 to 22 M3, M4, M5, M6, M8 14 to 15 Y 4.5 40 11-2-28 28 Simple Specials

Table of Contents

(mm) (mm) Q1 = M Q2 Y L2 max Size C1 = C L2-(3 x P) Q1 X L1 max Size 10 M3 5.5 to 8 Y 1 10 M3 X 3 7.5 to 14 Y = 15 M3, M4 7.5 to 9 Y 1.5 15 M3, M4 X 4 10 to 18 L2 = X = C2 = C 20 M3, M4, M5 9 to 10 Y 1.5 L1-(3 x P) 20 X 4.5 12 to 20 M3, M4, M5 30 11 to 13 Y 2 M3, M4, M5, M6 M3, M4, M5, M6 L1 = 30 Q2 = M X 5 14 to 22 M3, M4, M5, M6, M8 14 to 15 Y 4.5 40 11-2-28 28 Simple Specials

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) (mm) Q1 = M Q2 Y L2 max Size C1 = C L2-(3 x P) Q1 X L1 max Size 10 M3 5.5 to 8 Y 1 10 M3 X 3 7.5 to 14 Y = 15 M3, M4 7.5 to 9 Y 1.5 15 M3, M4 X 4 10 to 18 L2 = X = C2 = C 20 M3, M4, M5 9 to 10 Y 1.5 L1-(3 x P) 20 X 4.5 12 to 20 M3, M4, M5 30 11 to 13 Y 2 M3, M4, M5, M6 M3, M4, M5, M6 L1 = 30 Q2 = M X 5 14 to 22 M3, M4, M5, M6, M8 14 to 15 Y 4.5 40 11-2-28 28 Simple Specials

CRB2/CRBU2/CRB1

Q1 M3 5.5 to 8 Y-1 10 15 X-3 7.5 to 14 M3 Y = M3, M4 7.5 to 9 Y-1.5 L2 = L1(3 x P) C2 = C 15 20 X-4 M3, M4 10 to 18 9 to 10 Y-1.5 M3, M4, M5 X = 20 30 12 to 20 X-4.5 M3, M4, M5 11 to 13 Y-2 M3, M4, M5, M6 L1 = Q2 = M 30 40 14 to 22 X-5 14 to 15 Y-4.5 M3, M4, M5, M6 M3, M4, M5, M6, M8 24 Simple Specials Series CRB2 Axial: Top (Long-shaft side) Axial: Bottom (Short-shaft side) Symbol: A10 Symbol

Compact 5-Port Solenoid Valve

C2: 2 (SMC) C4: 4 (SMC) 9.1 (C6) 10.3 (C2, C4) D D 3/5 B 2 E 3/5 B 2 B 2 B 2 E B 2 27 (C2, C4) 25.8 (C6) A 4 A 4 A 4 1 P P 1 4 A 4 A S (Pitch of C2, C4) P = 6.5 One-touch fitting [1(P), 3/5(E) port] Applicable tubing: 8 (SMC) (Pitch of C6) P = 9 * Refer to page 97 for dimensions of external pilot and built-in silencer. * Refer to pages 65 to 68, 79, and 80 for dimensions when L6, b, and

ZP

female thread) A6 M6 x 1 (M3 x 0.5 With female thread) A8 M8 x 1 (M5 x 0.8 With female thread) Width across flats H J J G B Model A B C2 D E F G H J K Vacuum inlet direction q Pad dia.

7.4

Max. 20 stations 76 10 Rc1/8 SS0752-C Manifold pitch: 8.5 mm Page 750 C Kit: Connector Max. 20 stations 115 20 M5 thread C2 (2) C3 (3.2) C4 (4) N1 (1/8") N3 (5/32") Rc1/8 Note 2) 115 20 S Kit: Serial transmission (EX510) Max. 16 stations Base Mounted SS0755-CC Manifold pitch: 7.5 mm Page 750 M3 (M3 thread) V2 (2 Barb fitting) V3 (3.2 Barb fitting) V4 (5 Barb fitting) C Kit: Connector Max