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Table of Contents

Port size A B C D E F 28 3/4 31 34 22 143 107 IF320 104 1 37 62 89 28 194 IF321 IF323 104 1 29 39 56 28 161 16-12-9 5 Series IF3 Flow Rate vs.

PSE540/560

Port size ISA2 R 1/8 (With M5 female thread) R 1/4 (With M5 female thread) Rc 1/8 NPT 1/8 (With M5 female thread) NPT 1/4 (With M5 female thread) URJ 1/4 TSJ 1/4 01 02 C01 N01 N02 A2 B2 IS Option/Part No. Output specifications Part no. Note Connector for PSE200 Description ZS-26-E-4 ZSM Voltage output type 1 to 5 V Current output type 4 to 20 mA Nil 28 1 pc. ZS-28-C 1 pc.

PSxx-OMG0005CN

C2 PSE56 0 (01MPa) (1) C2 1 (0-101kPa) 3 (-100100kPa) *PSE200 4 (0500KPa) (15V) 01 R1/8(M5) 28 (420mA) 02 R1/4(M5) C01 Rc1/8 N01 NPT1/8(M5) N02 NPT1/4(M5) A2 URJ1/4 B2 TSJ1/4 ZS-28-C 1 Rc1/4 ZS-31-X175 1 NPT1/4 ZS-31-X186 1 Rc1/8 ZS-31-X188 1 NPT1/8 ZS-31-X189 1 15[V]F.S.=514[V] (1F.S.40.010.04[V]) F.S. ( 25[]ON-OFF (1K 1M A/D 5V A/D 5(V)1(M)/(1(k)+1(M))4.995(V)0.005V ) ripple

Low Differential Pressure Sensor

Description ZS-28-A Note D Power supply/Output connection cable Mounting screw (M3 x 8L) (accessory) Bracket ZS-28-B With M3 x 5L (2 pcs.) Sensor connector ZS-28-C 1 pc. Panel mount adapter Panel mount adapter ZS-27-C With M3 x 8L (2 pcs.) ZS-27-D With M3 x 8L (2 pcs.)

PSE550/300

Note Power supply/Output connection cable Description ZS-28-A D Mounting screw (M3 x 8L) (Accessory) Bracket ZS-28-B With M3 x 5L (2 pcs.) Sensor connector ZS-28-C 1 pc. Panel mount adapter Panel mount adapter ZS-27-C With M3 x 8L (2 pcs.) ZS-27-D With M3 x 8L (2 pcs.)

1

VM230U-02-08A VM-08A 110 g Red VM220-02-30RA VM230-02-30RA VM220U-02-30RA VM230U-02-30RA VM-30AR 58 g Black VM220-02-30BA VM230-02-30BA VM220U-02-30BA VM230U-02-30BA VM-30AB Green VM220-02-30GA VM230-02-30GA VM220U-02-30GA VM230U-02-30GA VM-30AG Yellow VM220-02-30YA VM230-02-30YA VM220U-02-30YA VM230U-02-30YA VM-30AY Push button (Mushroom) Red VM220-02-32RA VM230-02-32RA VM220U-02-32RA VM230U

Micro Mechanical Valve Series VM1000

VM230U-02-08A VM-08A 110 g Red VM220-02-30RA VM230-02-30RA VM220U-02-30RA VM230U-02-30RA VM-30AR 58 g Black VM220-02-30BA VM230-02-30BA VM220U-02-30BA VM230U-02-30BA VM-30AB Green VM220-02-30GA VM230-02-30GA VM220U-02-30GA VM230U-02-30GA VM-30AG Yellow VM220-02-30YA VM230-02-30YA VM220U-02-30YA VM230U-02-30YA VM-30AY Push button (Mushroom) Red VM220-02-32RA VM230-02-32RA VM220U-02-32RA VM230U

Compact 5-Port Solenoid Valve

02 2 stations Double wiring*1 Symbol Stations Note 02 2 stations Double wiring*1 12 12 stations 02 2 stations Specified layout*2 (Up to 24 solenoids available) 12 12 stations 02 2 stations Specified layout*2 (Up to 24 solenoids available) 24 24 stations 24 24 stations *1 Indicate the sizes on the manifold specification sheet in the case of CM. * The JSY1000 manifold pitch for C2 and C4

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y Connection 4 4 thread 1.6 6 15 10 66 23 43 15 71 28 25 81 38 33 18 D B 02 1.2 Width across flats 12 A N S U F GN GS B3 B5 04 06 N4 U4 6 33 18 15 10 66 23 43 15 71 28 25 81 38 J K ZP T U 04 A8 1.6 6 33 18 J: 2.5 K: 2 15 10 66 23 43 15 71 28 25 81 38 06 08 C2 Dimensions Per Vacuum Inlet: Female Thread Vacuum inlet: One-touch

Air Cylinder

Boss-cut l 8 8 Width across flats B3 e JH ZZ + Stroke h JW ZZ + Stroke Female rod end With air cushion WA WA Cushion needle (Width across flats 1.5) Female thread MM Thread depth A1 45 3.5 H ZZ + Stroke (mm) Bore size A AL B B1 B2 C2 D E F FL FD FT FX FY FZ G H H1 H2 I K KA MM NA NN P S Z ZZ 20 18 15.5 34 13 26 30 8 20 0 0.033 13 10.5 7 4 60 75 8 41 5 8 28 5 6 M8 x 1.25 24 M20 x 1.5 1/8

Series SV

-12 400 200 70% 50% 10% 0 800 MB 80 600 Stroke mm AS5000-02 AS420-02 400 200 0 AN300 -KM12 T1209 800 MB 100 600 Stroke mm AS5000-02 AS420-02 400 200 0 800 CS1 125 600 Stroke mm AS5000-02 AS420-02 400 200 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details regarding different conditions

Table of Contents

1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 ZH15DS-02-03-03 ZH15DL-02-03-03 12 31.5 28.5 7.8 17 24 12 31.5 28.5 17 24 12 31.5 29.5 17 24 12 31.5 29.5 17 24 14 33.5 33 20 28 14 33.5 33 20 28 17 36.5 38.5 22 30 17 36.5 38.5 22 30 7.8 7.8 7.8 9.6 9.6 10.7 10.7 Rc 1 8 Rc

Smooth Cylinder/Low Speed Cylinder

28 28 30 36 46 45 60 8d9 10d9 12d9 14d9 16d9 18d9 18d9 22d9 H1 B1 C D d NT-02 NT-03 NT-G04 NT-05 NT-08 NT-10 5 6 8 11 13 16 13 17 19 27 32 41 12.5 16.5 18 26 31 39 (15) (19.6) (21.9) (31.2) (37.0) (47.3) M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 D-X 1209 Series CG1Y Auto Switch Mounting 1 Auto Switch Proper Mounting Position (Detection at Stroke End) and Its Mounting Height

7.4

Dual 3-port valve S07 A B C2 0.57 0.39 0.15 0.55 0.37 0.15 25 or less 44 2-position Single S0715 0.39 0.39 0.11 0.37 0.39 0.10 12 or less 28 Single Unit Base Mounted Page 747 Double S0725 0.39 0.39 0.11 0.37 0.39 0.10 10 or less 36 Manifold 3-pos. 3-position closed center S0735 0.29 0.29 0.07 0.26 0.21 0.06 28 or less 38 Bar Base Page 750 4-pos.

7ND9071en

SPOOL VALVE PNEUMATIC CONNECTIONS (S, C1, C2) ND7_HXT, ND7_HZT: II 1 G Ex ia IIC T6...T4 Ga II 1 D Ex ta IIIC T90 C Da II 2 G Ex ib IIC T6...T4 Gb II 2 D Ex tb IIIC T90 C Db Ui 28 V, Ii 120 mA, Pi 1 W, Ci 22 nF, Li 53 H, external load resistance 0690 . 02 Low capacity. Stroke volume of actuator < 1 dm3. G 1/4 (ND7100), 1/4 NPT (ND7200). 03 Medium capacity.

SV

specifications Double wiring specifications Double wiring specifications 09 02 04 02 12 02 04 02 9 stations 4 stations 12 stations 4 stations 2 stations 2 stations 2 stations 2 stations (2) (2) (2) (2) Specified layout (Up to 8 solenoids possible.)