Table of Contents

A A A A A A A 2-C6 P (SUP port) 24.5 (11) 13.5 B B B B B B B B R R 7 P = 11 19.2 2-C6 R (EXH port) (7.5) 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread The broken lines indicate the DIN rail mounting style [-D] and the top entry connection [-PU].

Series VQ Base Mounted Metal Seal/Rubber Seal

(Specify a option model with 9 to 16 stations by using a manifold specification form.) Manifold Specifications Porting specifications Applicable stations Port size Port location Series P, R A, B C6 Side C3, C4, M5 Max.16 Max.16 VQ0 C8 Side C3, C4, C6, M5 VQ1000 SB applicable to MELSECNET/MINI-S3 Data Link (Mitsubishi Electric Corp.)

Series VQ Metal Seal/Rubber Seal Body Ported

(Specify a model with 9 to 16 stations by using a manifold specification form.) Manifold Specifications Series Porting specifications Applicable stations Port location Port size P, R A, B C3, C4, M5 C3, C4, C6, M5 C4, C6, C8 C6 C6 C10 VQ0 VQ1000 VQ2000 Side Side Side Max. 16 Max. 16 Max. 16 SA applicable to Series EX300 SB applicable to MELSECNET/MINIS3 Data Link (Mitsubishi Electric.)

SZ3000

Stations Scale: 37% Stations [With external pilot] 2n1-M5 x 0.8 (A, B ports) 24 13.3 (Pitch) P=10.5 13.3 24 16.2 16.2 34 17 36.7 34 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 PE R 3 R 3 P 1 P 1 X A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 2-One-touch fitting 2-One-touch fitting 2n2-One-touch fitting (X, PE ports) Applicable tube O.D.: 6 (P, R ports) Applicable tube O.D.: 8 (A, B ports) Applicable

7.4

31.2 31.2 7 11.5 10 M5 x 0.8 2(B) port With plug connector/light 5.7 S07 5(R)-mM(O)-M5 2 A B C 8.4 18.6 19.5 M5 x 0.8 4(A) port M3 x 0.5 External pilot port (External pilot type only) 748 Base Mounted Single Unit S0700 Series Plug Lead Type Dimensions 3-Position Closed Center Grommet: S0735(R)-mG-M5 M5 x 0.8 1(P) port 21.2 SJ 11.4 5.2 7.7 M5 x 0.8 3(R) port SY 3 1 SY S0700 S0700 S0700 Manual

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Sensors 3 position exhaust center D: Push-turn locking slotted type J: With switch 2(B) (A)4 4 M5: M5 x 0.8 (EA)5 1 (P) 3(EB) 3 position pressure center A 4 2(B) (A)4 5 2 B (EA)5 1 (P) 3(EB) For switch operation, refer to page 412.

SZ3000

] Applicable tubing O.D.: 8 2n1-M5 x 0.8 [4(A), 2(B) port] (L4) L3 (3.2) 101.2 8 3.1 18 28.8 35 36.3 58.2 3.5 5.5 B B A A A A A (When equipped with switch) DIN rail Manual override Press and turn for the locking type.

Table of Contents

Piping port 3 8 03 04 06 1 2 3 4 3-5-79 80 Series VFR5000 Construction 2 position single 2 position double VFR520 VFR510 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 r u e t r u q o e !

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

stations 01 Solenoid on same side of A and B port 1 station Nil P port: Rc 1/8 A port: M5 x 0.8 B port: M5 x 0.8 Thread type R port: Rc 1/8 20 Solenoid on same side of A and B port 20 stations Type S41 Nil F N T Rc S Type VK334 Type VK3140 Port size G M5 M5 x 0.8 C4 4 cassette NPT P port: Rc 1/8 NPTF R port: Rc 1/8 B port: M5 x 0.8 A port: M5 x 0.8 Type 42: Base mounted (A, B port side ported

VZS

Single solenoid type A side solenoid Black: A Red: COM Double, 3 position type A side solenoid Black: A Red: COM Valve B side solenoid White: B Red: COM Lead wire color Lead Wire Color Single solenoid type A side solenoid Black: A Red: COM Double, 3 position type A side solenoid Black: A Red: COM Valve (1) B side solenoid White: B Red: COM Lead wire color Lead wire length: 0.6 m 3-7-4 5 Series

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

t r r , " . . a : r i . . . , r i a , r . .

Title not found

t r r , " . . a : r i . . . , r i a , r . .

Voltage: 24VDC, Electrical Entry: M Plug Connector, Lead Wire: w/o Lead Wire, Orifice Size: 0.6mm, Port Size: w/o Sub-Plate w/Mounting Screw, Body/Seal Material: Body C36, Seal FKM

Voltage: 5 (24VDC), Electrical Entry: M (M Plug Connector), Lead Wire: O (w/o Lead Wire), Orifice Size: 06 (0.6mm), Port Size: w/o Sub-Plate w/Mounting Screw, Body/Seal Material: A (Body C36, Seal FKM)

VF1000-OMP0001

(X) (B) 2 (X) (A) 4 (B) 2 (A) 4 (R2)3 1 5(R1) (P) (R2)3 1 5(R1) (P) (X) (B) 2 (X) (A) 4 (A) 4 (B) 2 (R2)3 1 5(R1) (P) (R2)3 1 5(R1) (P) 9 VF1000-OMP0001 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 3.2~3.7mm () 300mm ) ) ) ) (+ -) ( ) ) ) ) ) Assy 2000mm VF3230-5MO-02 3 DXT170-80-4A-20 6 (1mm) 0.6 Nm VF1000 1.4 Nm VF3000 1.4 Nm VF5000 1.4 Nm VF130 VF133 DXT144

Voltage: 6 (12VDC), Electrical Entry: L (L Plug Connector), Lead Wire: O (w/o Lead Wire), Orifice Size: 06 (0.6mm), Port Size: M5 (w/Sub-Plate M5x0.8), Body/Seal Material: A (Body C36, Seal FKM)

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Low Vacuum Compatible, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: M, Port Size: M5, Pressure Rating(MPa): 0 to 1.0, Driving Type: Linear Motion Poppet, Seal Type: Soft Seal

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC12V, Specification: Standard / Low Vacuum Compatible, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: M, Port Size: M5, Pressure Rating(MPa): 0 to 1.0, Driving Type: Linear Motion Poppet, Seal Type: Soft Seal

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC12V, Specification: Standard / Low Vacuum Compatible, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: M, Port Size: M5, Pressure Rating(MPa): 0 to 1.0, Driving Type: Linear Motion Poppet, Seal Type: Soft Seal

Voltage: 5 (24VDC), Electrical Entry: M (M Plug Connector), Lead Wire: Lead Wire, Orifice Size: 06 (0.6mm), Port Size: M5 (w/Sub-Plate M5x0.8), Body/Seal Material: A (Body C36, Seal FKM)