2

25.9 23 42.3 17 57.4 45.4 9 23.4 3/8 KQ2Y12-G03 21 18.5 17 23 29 23 44.4 17 57.4 45.4 9 28.6 1/2 KQ2Y12-G04 27 18.5 17 23 30.4 23 44.4 17 57.4 45.4 9 48.5 H Connection thread 16 3/8 KQ2Y16-G03 21 23.8 21 28.6 33.1 28.6 54.2 20.6 81 60 11 42.7 1/2 KQ2Y16-G04 27 23.8 21 28.6 33.8 28.6 53.4 20.6 113 60 13 66.2 Note) D1 is maximum diameter.

Electro-Pneumatic Proportional Valve

) 0.6mm ( for PVQ13) 0.8mm ( for PVQ13) 1.6mm ( for PVQ31, 33) 2.3mm ( for PVQ31, 33) 4.0mm ( for PVQ31, 33) M G Flow rate characteristics PVQ13-5-04 (24VDC type) at 0.45MPa PVQ3-5G-23 (24VDC type) at 0.35MPa 140 8 7 120 6 100 Flow rate (Lit/min) Flow rate (Lit/min) 5 80 4 60 3 40 2 20 1 0 0 30 40 50 60 70 80 75 85 95 105 115 125 135 145 155 165 65 Current (mA) Current (mA) Dimensions

CQ2

Body option Style Standard (Rod end female thread) With rubber bumper (3) C M Action H Pneumatic Air-hydro (1) D Double acting Rod end male thread Note 1) Air-hydro bore size: 20 to 100 Combination of body option (CM) is possible. Note 3) Rubber bumper for air-hydro is not available. Stroke (mm) Refer to Standard stroke table on p.2.3-23.

Table of Contents

H Model Tubing O.D.

KJ

H Model Tubing O.D.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

20 38.1 23.3 3 3 3 3 103.4[107.8] 123[127.4] 11 11 11 141.2 121.2 143 11 2-2.6 (For mounting) 23 2-2.6 (For mounting) 23 23 23 2-2.6 (For mounting) 2-2.6 (For mounting) 60.6 27 Refer to page 563 for dimensions with connector cable. 521 5 port solenoid valve Series 10-SYJ5000 2 position single [ ]: AC G H G H Grommet (G), (H): 10-SYJ5143-01 Built-in speed controller: 10-SYJ5153-01 MAX.13.5

Proposals for Energy Saving

ON YES Hysteresis mode OFF P-1 P-2 Real-time flow rate "P" H H Sensors Measuring Instruments ON Window comparator mode H: Hysteresis NO OFF P-1 P-2 Real-time flow rate OUT1 Output mode ON YES Hysteresis mode OFF n-1 n-2 Real-time flow rate "n" H H ON Window comparator mode H: Hysteresis OFF NO n-2 n-1 Real-time flow rate Accumulated pulse output ( ) Accumulated switch output ( )

Shock Absorbers and Rate Controls

'ho.k tor.e ( l (h(l ltlax. t{m/hour (h) llox. l{n/(y(le 'II (nml ts) Strole (nm) Itlodel Weighl {cl Ixtended ( ) (ompreried (N) 0Et[.Iln(B) 6.1 7.0 0.3.3.30 5.5 l?.

Compact Cylinder with Air Cushion

17 M6 x 1.0 10 5 28 23 43.5 Refer to page 11 for details on rod end nut and accessories.

RQ

1.0 10 5 28 23 43.5 Refer to page 7-7-14 for details on rod end nut and accessories.

V100

23 23 23 27 Refer page 4-4-61 for dimensions with connector cable. 4-4-22 23 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ500 Base Mounted (With sub-plate) [ ] for AC Grommet (G), (H): SYJ54G H -01 1/8 (A port) 18 8.5 V100 SY 2-4.5 (For mounting) 4 34 SYJ Manual override A VK 24 P R VZ 33.5 G: Approx. 300 H: Approx. 600 (Lead wire length) Courtesy of Steven Engineering, Inc

MK

(mm) Operating Piston area (cm2) RHC direction 1.0 0.7 0.5 0.3 200 139 100 60.8 2 R 20 12 MTS 298 208 149 90.2 3 H 370 258 185 112 3.7 R 25 12 CC 490 341 245 149 4.9 H 600 418 300 182 6 R 32 16 800 557 400 243 8 H 1050 731 525 319 10.5 R 40 16 1250 870 625 380 12.5 H 1648 1149 825 502 16.5 R 50 20 1961 1365 980 596 19.6 H 2801 1950 1400 851 28 R 63 20 3121 2172 1560 948 31.2 H Note) Theoretical

Suction cups with flange

ModelZPGU-7A-X2 ModelZPGC-7A-X2 (Suction cup formFlat type) (Suction cup formFlat type with ribs) Dimensions Dimensions Model A B D E F Y Model A B D E F Y ZPG10U-7A-X2 10 12 ZPG10C-7A-X2 10 12 1.7 17.5 22 3 17.5 22 13 ZPG13U-7A-X2 13 15 13 ZPG13C-7A-X2 13 15 1.8 ZPG16U-7A-X2 16 18 18 22.5 3.5 ZPG16C-7A-X2 16 18 18 22.5 1.2 ZPG20U-7A-X2 20 23 ZPG20C-7A-X2 20 23 1.7 19.5 24 4 19.5 24 15 ZPG25U

Compact Cylinder with Air Cushion Series RQ

A A' A' R H R H e When air is supplied for piston extension, the check seal opens and the piston starts with no delay.

VQ

35.1 32.4 H 43.5 43.3 W 44.8 38.9 H 32.2 37.2 Latching 16.4 12.5 VG 7.5 100V AC or more 12.9 P=10 n-M5 A port VP Equation: L1=10n+13 L2=10n+7 n: Station (Max. 20 stations) Dimenshions n L L1 L2 2 33 27 3 43 37 4 53 47 5 63 57 6 73 67 7 83 77 8 93 87 9 103 97 10 113 107 11 123 117 12 133 127 13 143 137 14 153 147 15 163 157 16 173 167 17 183 177 18 193 187 19 203 197 20 213 207 1 23 17 VQ

3 Port Solenoid Valve Series VQ100 1

43.5 43.3 W 44.8 38.9 H 32.2 37.2 VG Latching type 100 VAC or more 16.4 A A VP n-M5 A port Formula: L1 = 10n + 13, L2 = 10n + 7, n: Station (Maximum 20 stations) Dimensions S070 n L L1 L2 2 33 27 3 43 37 4 53 47 5 63 57 6 73 67 7 83 77 8 93 87 9 10 113 107 11 123 117 12 133 127 13 143 137 14 153 147 15 163 157 16 173 167 17 183 177 18 193 187 19 203 197 20 213 207 1 23 17 103 97 VQ VKF Plug

Precision Regulator

2) 1 1 23 O-ring NBR JISB2401P16 Note 2) JISB2401P16 Note 2) 2 2 24 Seal (A) NBR P36203015 1 P36203015 1 25 Seal (B) NBR P36203016 3 P36203016 3 26 Fixed throttle Stainless steel P36203017 P36202018 1 1 1 1 P36203017 Repair kit no.

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC12V, Specification: Standard, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: NPT, Port Size: 1/8, Pressure Rating(MPa): 0 to 1.0, Driving Type: Linear Motion Poppet, Seal Type: Soft Seal, Plumbing: Direct Plumbing

Body Ported), Voltage: 6 (12VDC), Electrical Entry: G (Grommet), Orifice Size: 23 (2.3mm), Port Size: 01 [Base Mount w/Sub-Plate 1/8(6A) or Body Ported 1/8(6A)], Thread Type: N (NPT)

Valve Type: N.C. Body Ported, Voltage: 12VDC, Electrical Entry: Grommet, Orifice Size: 2.3mm, Port Size: 01 [Base Mount w/Sub-Plate 1/8(6A) or Body Ported 1/8(6A)], Thread Type: NPT, Body/Seal Material: Body C37, Seal FKM, Option: Foot Bracket