1

dual 3-port valve Operating pressure range Internal pilot operating pressure range (MPa) 0.1 to 0.7 (High pressure type: 0.1 to 1) 100 kPa to 0.7 (4-position: 100 kPa to 0.6) 100 kPa to 0.7 (High pressure type: 100 kPa to 1) 2-position single 2-position double 3-position External pilot operating pressure range (MPa) Pilot pressure range 0.25 to 0.7 0.1 to 0.7 (High pressure type: 0.1 to

Air Cylinder

, 125, 150 25 25, 50, 75, 100, 125, 150 32 25, 50, 75, 100, 125, 150, 200 40 25, 50, 75, 100, 125, 150, 200, 250 Note 1) Other intermediate strokes can be manufactured upon receipt of order.

Fluoropolymer Piping Equipment

LQ1H1A-Fl 1/8" 1/8" 10 26.5 11.5 1.8 10 18.5 LQ1H2A-Fl 1/4" 1/8" LQ1H11-Fl 4 1/8" 10 26.5 11.5 2.6 10 18.5 LQ1H12-Fl 3 1.8 LQ1H21-Fl 6 1/8" 3.6 18.5 LQ1H2B-Fl 3/16" 2.9 LQ1H2C-Fl 1/8" 1.8 LQ1H2D-Fl 1/4" 1/4" 36.5 3.6 21.5 LQ1H2E-Fl 3/16" 2.9 LQ1H2F-Fl 1/8" 1.8 LQ1H3A-Fl 3/8" 1/4" 3.6 35 18.5 LQ1H22-Fl 4 2.6 LQ1H2C-Fl 3 1.8 LQ1H23-Fl 6 1/4" 36.5 3.6 21.5 LQ1H24-Fl 4 2.6 LQ1H2F-Fl 3 1.8 LQ1H31

Smooth Cylinder/Low Speed Cylinder

80 100 Applicable pin O.D.

5

9 9 80 92 108 75, 100 74 56 M FV 80 10 to 50 73.5 53.5 83.5 63.5 11 11 99 116 134 75, 100 83.5 63.5 100 10 to 50 85 63 95 73 11 11 117 136 154 75, 100 95 73 FT L B + Stroke A + Stroke 4 x FD FX FZ Bore size (mm) Stroke range (mm) L L1 M 63 10 to 50 18 43.5 60 75, 100 80 10 to 50 20 53.5 77 75, 100 100 10 to 50 22 53.5 94 75, 100 L1 Flange bracket material: Carbon steel Surface treatment:

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Double acting, Single rod 25, 50, 75, 100, 125, 150 1/8 25, 50, 75, 100, 125, 150, 200 1/4 25, 50, 75, 100, 125, 150, 200, 250, 300 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Bore size (mm) Item 20/25/32/40 2 Bore size Suction flow rate L/min (ANR) 20/25/32/40 1.5 MPa 1.0 MPa 0.05 MPa Without auto switch: 10C to 70C With auto switch: 10C to 60C (No freezing

ISO Cylinder

40)1 (40)1 (40)1 (100)1 0.5 89 W W W Rod (side) 10.0 (40)1 (40)1 (40)1 0.7 36 74 93 (40)1 0.3 33 37 26 54 69 Head ( side ) 0.5 39 25 27 19 41 52 C8525 C8520 0.7 32 20 22 15 33 43 1.0 Foot: M Rod flange: G Head flange: G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.3 G G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.5 W W Rod (side) W (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.7 (40)1 (40)1 (40)1 (100)1

Sine Cylinder Series REC

+ 100 (n 2) 35 + 30 (n 2) 10 35 100 Note) For cylinders with two D-A93/M9/M9W auto switches.

Sine Cylinder Series REC

+ 100 (n 2) 35 + 30 (n 2) 10 35 100 Note) For cylinders with two D-A93/M9/M9W auto switches.

Shock Absorbers and Rate Controls

6.4 22.2 M5 100 N/A fflf15xl.5 2fs63i Ofl Sorisr60.526.C 95.3 7 6.2 8.60 54.9 12.7 29.5 9.7 flA M8 370 I fl/A lMltb4x?

Free Mount Cylinder

FL dimension across the non-rotating plate and the piston rod end is removed. Its piston rod does not stick out of the plate. XC34 Enter the applicable model number.

Title not found

to 100 Slainlss sleel p6lon rod and rod nut 12 to 100 Adlustable stroke extend 1 2 1 0 1 0 0 Adiustable slroke relracl i 2 1 0 1 0 0 Dualstroke, dua rod '12 to 100 Dual stroke, single rod T2 io 100 NPT Port (1) 32 lo 160 Metal corl scraper 32 lo 100 Wth hont gude bo6s (1J 12 to 100 Hollow piston rod 20 to 100 Inch-size wrench llats 12to 1m (1J Nol avaibble on NCQ2 series. 1.

Table of Contents

Caution 5 150 100 200 300 1.

CE

MVGQ CC RB Cylinder Stroke J Standard stroke (mm) Manufacturable stroke range 25 DModel 100 75 50 -X CEP1B12 0 to 150 CEP1B20 0 to 300 20But, as for stroke over 100 mm, its accuracy will be 0.05 mm.

Stroke Reading Cylinder and Counter

SET MODE SD SG RD RS-232C COM S.STOP OUT1OUT2OUT3OUT4OUT5 100 to 240 VAC 1 t 1 10 x 106 100 kHz Counting speed f = = = 10 Hz 7 10 4 x 4.5 33.5 104 BCD output connector 2) UP/DOWN input Input wave form conditions: At a maximum of 100 kHz, the UP/DOWN wave form should be as shown below. 125 +12 V 10% UP pulse +12 V 10% DOWN pulse 64 59 3) 15 mA when BCD is output (Refer to page 676.) 668

CE

MVGQ CC RB Cylinder Stroke J Standard stroke (mm) Manufacturable stroke range 25 DModel 100 75 50 -X CEP1B12 0 to 150 CEP1B20 0 to 300 20But, as for stroke over 100 mm, its accuracy will be 0.05 mm.

CE

to 240VAC (10%) 100 to 240VAC (10%) 100 to 240VAC (10%) 24VDC (10%) 100 to 240VAC (10%) Power consumption 20VA or less 10W or less 20VA or less 10W or less 20VA or less 10W or less 10W or less 20VA or less Between case and AC line: 1500VAC for 1 min.

HRX-OM-X084

Table 8-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L]

Direct Solenoid

"AC Only "' Not aveilable WDC Solnold Typo NVS 4024, 'm34 03 = 1'r0v 50Hz U = 2mV fiHz 07 = 24VAC ffiHz t09 = 115/120V 6OHz 100/110V 5OHz t10 = 23o/21t0V 60Hz?

Series CE1

7 NBR Valve retainer seal #7 * Since ther is a possibility of improper operation, contact SMC regarding the replacement of seals. 4.4-9 Series CE1 Dimensions 12, 20 Both ends tapped CE1B Bore size Stroke (mm) A B C D E G H I K L M Bore (mm) 12 20 Standard stroke 25, 50, 75, 100, 125, 150 94 M5 X 0.8 16 5.2 25 15.5 69 15 6 25 42.5 25, 50, 75, 100, 125, 150, 175, 200 106 78 15.5 10 36 53.5