Aluminum High Vacuum Angle Valve

Example) -M9NL !

Free Mount Cylinder

65 80 65 55 75 65 60 65 55 50 55 45 9 8 25 96 81 71 86 71 61 81 71 66 71 61 56 61 51 11 10 32 100 85 75 90 75 65 85 75 70 75 65 60 65 55 13 12 The dimensions other than the table above are the same as those of standard type. 44 46 Related Products For details, refer to the respective catalog. 1011-CDU Clean Series Compliant with clean environment Specifications 10-CDU (Relief type) 11-CDU

XM, XY

-M9NL u Seal material and its changed part Seal material Seal material Compound No.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-M9NL 7.

MHZ

Lead wire length symbols:0.5 mNil (Example) M9BV 3 m L (Example) M9NL 5 m Z (Example) F59AZ (Example) When ordering with an air gripper When ordering auto switches only 61 D-F8PLMHZ 2-16D-F8NS61 Auto switches marked with a symbol are produced upon receipt of order. Note 1) Take note of hysteresis with 2 color indication type switches.

MHZ

Lead wire length symbols:0.5 mNil (Example) M9BV 3 m L (Example) M9NL 5 m Z (Example) F59AZ (Example) When ordering with an air gripper When ordering auto switches only 61 D-F8PLMHZ 2-16D-F8NS61 Auto switches marked with a symbol are produced upon receipt of order. Note 1) Take note of hysteresis with 2 color indication type switches.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Solid state switches marked "" are produced upon receipt of order.

NCQ8

L M9NL 197in (5 m) .

Table of Contents

, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

XLAQ/XLDQ

Example) -M9NL Symbol Nil A B C Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

x 0.7, depth 4.5 Bottom hole diameter 4.2 22 0.05 W 8 0.05 33 D B Operating port 2-M5 x 0.8 10 J 5 Mounting base side B D 12 9.5 Across AA MXP12-25B Without magnet and switch rail 2-M3 x 0.5, depth 3.5 2-M2 x 0.4, depth 3 For magnet mounting For rail mounting 8 5.7 3.5 6-M4 x 0.7, depth 4.5 20 20 L (mm) Model H M W J S Z K MA V L MXP12-15B 40 29 55 68 15 76 22 9 59 24 MXP12-25B 60 49 75

Table of Contents

How to Order . 60 61 62 63 64 66 67 69 69 70 71 72 74 75 76 76 77 78 78 80 81 82 84 88 89 90 91 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 92 93 94 94 95 95 95 95 96 96 96 96 96 97 97 98 98 99 99 99 100 100 102 103 103 104 106 106 107 109 111 111 Caution .

1

, 100, 125, 150 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 * Manufacture of intermediate strokes at 1 mm intervals is possible.

MXQ

MXQ8-75 MXQ8-75 MXQ8-10 MXQ8-10 MXQ8-20 MXQ8-20 MXQ8-30 MXQ8-30 MXQ8-10 MXQ8-20 MXQ8-30 0.03 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.06 MXQ8-50 MXQ8-40 MXQ8-50 MXQ8-50 MXQ8-40 MXQ8-40 MXQ8-20 MXQ8-20 MXQ8-20 0.010 MXQ8-30 MXQ8-30 MXQ8-40 MXQ8-40 MXQ8-30 MXQ8-40 MXQ8-75 MXQ8-75 MXQ8-75 0.02 MXQ8-75 MXQ8-75 MXQ8-75 0.04 MXQ8-20 MXQ8-40

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Bore size/Stroke (mm) 6 10, 20, 30, 40, 50 8 10, 20, 30, 40, 50, 75 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Adjuster option Nil Without adjuster Functional option AS Extension end adjuster AT Retraction end adjuster Nil Standard A Both ends adjuster P Note) Axial piping CS Extension

MXW

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bore size (Stroke (mm)) 8 12 16 20 25 25, 50, 75, 100, 125, 150 50, 75, 100, 125, 150 75, 100, 125, 150, 175, 200 100, 125, 150, 175, 200, 225, 250 100, 125, 150, 175, 200, 225, 250, 275, 300 Auto switch Nil Without

Compact Cylinder

Fix the cylinder by using the OA thread that are provided with the cylinder tube. 50 55 60 65 70 75 80 85 90 95 55 60 65 70 75 80 85 90 95 100 110 130 150 M5 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l 60 65 70 75 80 85 90 95 100 105 115 135 155 M6 x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 105 l x 115 l x 135 l x 155

CE

ML2B C J G5-S CV MVGQ Power supply voltage 12 to 24 VDC Abundant stroke variations Improved noise resistance CC RB Series Variations J System Configuration Series CE1 Standard stroke (mm) Series CEP1 Standard stroke (mm) Bore size (mm) Manufacturable stroke range Bore size (mm) DExtension cable Series CE1-R 250 400 500 300 175 200 150 125 100 75 100 50 75 25 50 25 12 12 equivalent 25 to

CE

ML2B C J G5-S CV MVGQ Power supply voltage 12 to 24 VDC Abundant stroke variations Improved noise resistance CC RB Series Variations J System Configuration Series CE1 Standard stroke (mm) Series CEP1 Standard stroke (mm) Bore size (mm) Manufacturable stroke range Bore size (mm) DExtension cable Series CE1-R 250 400 500 300 175 200 150 125 100 75 100 50 75 25 50 25 12 12 equivalent 25 to

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Electrical entry 3 (L) 5 (Z) Perpendicular In-line 3-wire (NPN) 5 V, 12 V M9N M9NV IC circuit 3-wire (PNP) M9P M9PV Solid state switch M9B M9BV 2-wire 12 V Relay PLC Grommet Yes 24 V 3-wire (NPN) F9NW F9NWV 5 V, 12 V IC circuit Diagnostic indication (2-color indication) 3-wire (PNP) F9PW F9PWV F9BW 12 V F9BWV 2-wire Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL