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Mounting: F (Front Flange), Bore Size: 32mm, Thread: Rc, Full Stroke: 100mm, First Stroke: 30mm

Mounting: Front Flange, Bore Size: 32mm, Thread: Rc, Full Stroke: 100mm, First Stroke: 30mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

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, 45, 60 10 15, 30, 45, 60, 75, 100, 125, 150 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 * Manufacture of intermediate strokes at 1 mm intervals is possible.

High Vacuum Angle Valve

-1-1 XLG160-30-1H-1 100 XLA100-30-1 XLA100A-30-1 XLA100-30-1H XLA100A-30-1H XLAV100-30-1 XLAV100A-30-1 XLC100-30-1-1 XLC1 00-30-1H-1 XLF100-30-1 XLF100A-30-1 XLF100-30-1H XLF100A-30-1H XLFV100-30-1 XLFV100A-30-1 XLD100-30-1 XLD100-30-1H XLDV100-30-1 XLG100-30-1-1 XLG100-30-1H-1 80 XLA80-30-1 XLA80A-30-1 XLA80-30-1H XLA80A-30-1H XLAV80-30-1 XLAV80A-30-1 XLC80-30-1-1 XLC80-30-1H-1 XLCV80

Table of Contents

0.35 MPa 4 0.3 MPa 0.3 MPa MHW 50 2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.

Aluminum High Vacuum Angle Valve

-1-1 XLG160-30-1H-1 100 XLA100-30-1 XLA100A-30-1 XLA100-30-1H XLA100A-30-1H XLAV100-30-1 XLAV100A-30-1 XLC100-30-1-1 XLC1 00-30-1H-1 XLF100-30-1 XLF100A-30-1 XLF100-30-1H XLF100A-30-1H XLFV100-30-1 XLFV100A-30-1 XLD100-30-1 XLD100-30-1H XLDV100-30-1 XLG100-30-1-1 XLG100-30-1H-1 80 XLA80-30-1 XLA80A-30-1 XLA80-30-1H XLA80A-30-1H XLAV80-30-1 XLAV80A-30-1 XLC80-30-1-1 XLC80-30-1H-1 XLCV80

Table of Contents

MY2HT40 MY2HT40 MY2HT40 40 40 40 CX 30 30 30 MY2HT25 D20 20 MY2HT25 MY2HT25 20 -X MY2HT16 2010 10 10 MY2HT16 MY2HT16 8 8 8 Data 5 5 5 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 100 200 300 400 500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s Load Weight/MY2HT (Double axis) MY2HT/m1 MY2HT/m2 MY2HT/m3 80 80 80 50 50 50 30 30 30 20 20 20 MY2HT40 MY2HT40 MY2HT40

Table of Contents

Bore size/ Standard stroke (mm) 40 30, 50, 75, 100 63 30, 50, 75, 100 100 30, 50, 75, 100 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

ISO Cylinder

15 33 43 1.0 Foot: M Rod flange: G Head flange: G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.3 G G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.5 W W Rod (side) W (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.7 (40)1 (40)1 (40)1 (100)1 0.3 38 79 0.1 (40)1 (40)1 Head ( side ) 0.5 37 29 60 76 600 500 400 300 1000 1100 900 800 700 200 100 0 Cylinder stroke [mm] (40)1 0.7 34 30 23 50 63 1 The data in ( ) are

Table of Contents

style Double clevis style B L F G D Note) 10 16 20 25 28 10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

Free Mount Cylinder

(assuming approximately 30% dispersion.)

Smooth Cylinder/Low Speed Cylinder

CDQ2YB325 10 15 20 25 30 35 40 45 50 75 -100 CDQ2YB405 10 15 20 25 30 35 40 45 50 75 -100 CDQ2YB5010 15 20 25 30 35 40 45 50 75 -100 CDQ2YB6310 15 20 25 30 35 40 45 50 75 -100 CDQ2YB8010 15 20 25 30 35 40 45 50 75 -100 CDQ2YB10010 15 20 25 30 35 40 45 50 75 -100 CQ-M8 x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 105L x 110L x 135L x 160L CQ-M10 x 75L x 80L x 85L x 90L x 95L x 100L x 105L

Air Cylinder

35 + 30 (n 2) (n = 2, 3, 4, 5) 100 + 100 (n 2) (n = 2, 3, 4, 5) CA2 CS1 CS2 Note 3) When n is an odd number, an even number that is one larger than this odd number is used for the calculation.

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+ 30 (n 2) (n = 2, 4, 6, 8) Note 1) 90 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) Same surface 100 + 100 (n 2) (n = 2, 3, 4) 100 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 1 10 75 80 90 2 Different surfaces 35 75 80 90 Same surface 55 n Different surfaces 35 + 3 (n 2) (n = 2, 3, 4) 75 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) 80 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) 90 + 30 (n 2) (n = 2, 4, 6, 8) Note

Electric Actuator/Slider Type

, 50, 100, 150, 200, 250, 300 30, 50, 100, 150, 200, 250, 300 30, 50, 100, 150, 200, 250, 300 Work load [kg] Horizontal Note 2) 18 50 50 30 60 60 30 60 60 Vertical 7 15 29 7 17 35 10 22 44 Pushing force lbf [N] Note 3) (Set value: 45 to 90%) Max. speed [mm/s] 900 450 225 1200 600 300 1000 500 250 Pushing speed [mm/s] Note 4) 35 or less 30 or less 30 or less Max. acceleration/deceleration

High Vacuum Angle Valve

None XLF16-30-1-2 XLF25-30-1-2 XLF40-30-1-2 XLF50-30-1-2 XLF63-30-1-2 XLF80-30-1-2 Yes XLF16A-30-1-2 XLF25A-30-1-2 XLF40A-30-1-2 XLF50A-30-1-2 XLF63A-30-1-2 XLF80A-30-1-2 XLF High temperature None XLF16-30-1H-2 XLF25-30-1H-2 XLF40-30-1H-2 XLF50-30-1H-2 XLF63-30-1H-2 XLF80-30-1H-2 Yes XLF16A-30-1H-2 XLF25A-30-1H-2 XLF40A-30-1H-2 XLF50A-30-1H-2 XLF63A-30-1H-2 XLF80A-30-1H-2 XLFV General use