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Mounting: F (Front Flange), Bore Size: 63mm, Thread: TN (NPT Thread), Full Stroke: 300mm, First Stroke: 200mm, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal

Mounting: Front Flange, Bore Size: 63mm, Thread: NPT Thread, Full Stroke: 300mm, First Stroke: 200mm, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: -, Number: -

3 position cylinder series RZQ provides intermediate stop mechanism. 2 intermediate strokes are possible with only a small extension in total length. First stage stroke can be specified without changing the overall length. High accuracy is achieved by an intermediate stop method of pressing metallic components against each other. A tube rod with a large bore which is 70% the piston diameter

Mounting: F (Front Flange), Bore Size: 63mm, Thread: TN (NPT Thread), Full Stroke: 300mm, First Stroke: 200mm

Mounting: Front Flange, Bore Size: 63mm, Thread: NPT Thread, Full Stroke: 300mm, First Stroke: 200mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

1

173 185.5 198 210.5 210.5 223 235.5 248 260.5 273 273 285.5 298 310.5 323 335.5 335.5 348 360.5 373 L4 125 137.5 150 162.5 175 187.5 200 200 212.5 225 237.5 250 262.5 262.5 275 287.5 300 312.5 325 325 337.5 350 362.5 L5 12 13 14 15 16 17 18 12.5 13.5 14.5 15.5 16.5 17.5 12.5 13.5 14.5 15.5 16.5 17.5 12 13 14 15 INDEX 126 Series SY3000/5000/7000 Type 10/Side Ported Plug-in Connector Connecting

Table of Contents

200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.

Table of Contents

MP 0.5 MPa 0.5 MPa 0.4 MP 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MP 0.4 MPa 200 200 300 300 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 150 150 0.3 MPa 0.3 MP 0.3 MPa 0.3 MPa 0.3 MP 0.3 MPa 200 200 0.3 MPa 0.3 MPa 0.3 MPa 0.3 MP 0.3 MPa 100 100 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 100 100 50 50 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MP 0.1 MPa 0.1 MPa 0.1 MP

Table of Contents

MGF40 MGF40 20MGF40 MGF40 10 10 10 MGF40 Data MGF40 10 5 4 3 5 4 3 2 2 5 5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 200 mm l = 300 mm Graph (3) Graph (4) v = 150 mm/s or less v = 200 mm/s or less Graph (7) Graph (8) 20 300 300 200 200 MGF100 MGF100 20 100 100

Table of Contents

Caution 5 150 100 200 300 1.

High Vacuum Angle Valve

Uniform baking temperature 108 300 10.6 300 138 315 18.5 800 Common to all series.

ISO Cylinder

200 16 20 10, 25, 40, 50, 80, 100, 125, 160, 200, 250, 300 1000 25 Refer to pages 101 to 111 for cylinders with auto switches.

Electric Actuator/Slider Type

6: LEFS25B 10 10 Lead 12: LEFS25A 5 5 Lead 12: LEFS25A 0 0 0 100 200 300 400 500 600 Speed: V [mm/s] 0 100 200 300 400 500 600 Speed: V [mm/s] LEFS32/Ball Screw Drive Horizontal Vertical 50 50 Lead 8: LEFS32B 40 40 Work load: W [kg] Work load: W [kg] 30 30 Lead 16: LEFS32A Lead 8: LEFS32B 20 20 10 10 Lead 16: LEFS32A 0 0 Speed: V [mm/s] 0 100 200 300 400 500 600 0 100 200 300 400 500 600

Air Cylinder

32 25, 50, 75, 100, 125, 150, 200 40 25, 50, 75, 100, 125, 150, 200, 250, 300 MB1 Note 1) Other intermediate strokes can be manufactured upon receipt of order.

NCQ8

Mounting bolt C D Mounting Bolt Size for NCDQ8B056 to 250(With Auto Switch) (Inch) Model C D Bolt size Model C D Bolt size NCDQ8B056-025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCDQ8B075-025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCDQ8B106-025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCDQ8B150-025 037 050 062 075 087 100 125 150 175 200 250

Aluminum High Vacuum Angle Valve

Uniform baking temperature 108 154 10.6 300 138 200 18.5 800 Common to all series.