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173 185.5 198 210.5 210.5 223 235.5 248 260.5 273 273 285.5 298 310.5 323 335.5 335.5 348 360.5 373 L4 125 137.5 150 162.5 175 187.5 200 200 212.5 225 237.5 250 262.5 262.5 275 287.5 300 312.5 325 325 337.5 350 362.5 L5 12 13 14 15 16 17 18 12.5 13.5 14.5 15.5 16.5 17.5 12.5 13.5 14.5 15.5 16.5 17.5 12 13 14 15 INDEX 126 Series SY3000/5000/7000 Type 10/Side Ported Plug-in Connector Connecting

Table of Contents

200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.

Table of Contents

MP 0.5 MPa 0.5 MPa 0.4 MP 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MP 0.4 MPa 200 200 300 300 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 150 150 0.3 MPa 0.3 MP 0.3 MPa 0.3 MPa 0.3 MP 0.3 MPa 200 200 0.3 MPa 0.3 MPa 0.3 MPa 0.3 MP 0.3 MPa 100 100 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 100 100 50 50 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MP 0.1 MPa 0.1 MPa 0.1 MP

Table of Contents

MGF40 MGF40 20MGF40 MGF40 10 10 10 MGF40 Data MGF40 10 5 4 3 5 4 3 2 2 5 5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 200 mm l = 300 mm Graph (3) Graph (4) v = 150 mm/s or less v = 200 mm/s or less Graph (7) Graph (8) 20 300 300 200 200 MGF100 MGF100 20 100 100

Table of Contents

Caution 5 150 100 200 300 1.

High Vacuum Angle Valve

Uniform baking temperature 108 300 10.6 300 138 315 18.5 800 Common to all series.

ISO Cylinder

200 16 20 10, 25, 40, 50, 80, 100, 125, 160, 200, 250, 300 1000 25 Refer to pages 101 to 111 for cylinders with auto switches.

Electric Actuator/Slider Type

6: LEFS25B 10 10 Lead 12: LEFS25A 5 5 Lead 12: LEFS25A 0 0 0 100 200 300 400 500 600 Speed: V [mm/s] 0 100 200 300 400 500 600 Speed: V [mm/s] LEFS32/Ball Screw Drive Horizontal Vertical 50 50 Lead 8: LEFS32B 40 40 Work load: W [kg] Work load: W [kg] 30 30 Lead 16: LEFS32A Lead 8: LEFS32B 20 20 10 10 Lead 16: LEFS32A 0 0 Speed: V [mm/s] 0 100 200 300 400 500 600 0 100 200 300 400 500 600

Air Cylinder

32 25, 50, 75, 100, 125, 150, 200 40 25, 50, 75, 100, 125, 150, 200, 250, 300 MB1 Note 1) Other intermediate strokes can be manufactured upon receipt of order.

NCQ8

Mounting bolt C D Mounting Bolt Size for NCDQ8B056 to 250(With Auto Switch) (Inch) Model C D Bolt size Model C D Bolt size NCDQ8B056-025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCDQ8B075-025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCDQ8B106-025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCDQ8B150-025 037 050 062 075 087 100 125 150 175 200 250

Aluminum High Vacuum Angle Valve

Uniform baking temperature 108 154 10.6 300 138 200 18.5 800 Common to all series.

Made to Order

st Over 100 st to 200 st Over 200 st to 300 st Over 200 st to 300 st 30 st or less 25 st or less Over 300 st Over 300 st Over 30 st to 100 st Over 25 st to 100 st Over 100 st to 200 st Over 100 st to 200 st Over 200 st to 300 st Over 200 st to 300 st 30 st or less 25 st or less Over 300 st Over 300 st 12 16 20 25 32 40 50 63 300 300 167 167 20 24 24 24 300 300 300 300 171 172 174 174

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Weight Product Weight: Top Mounting Type [kg] Series LEYG25M LEYG32M Stroke [mm] 30 50 100 150 200 250 300 30 50 100 150 200 250 300 Weight [kg] 1.7 1.9 2.2 2.6 3.0 3.3 3.6 3.1 3.4 4.0 4.7 5.3 5.7 6.2 Series LEYG25L LEYG32L Stroke [mm] 30 50 100 150 200 250 300 30 50 100 150 200 250 300 Weight [kg] 1.7 1.9 2.2 2.6 2.9 3.2 3.4 3.1 3.4 3.8 4.5 5.0 5.5 5.9 Product Weight: In-line Motor Type

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Model LEY25 (Top/Parallel) LEY25D (In-line) LEY32 (Top/Parallel) LEY32D (In-line) Stroke [mm] Note 1) 30, 50, 100, 150, 200, 250 300, 350, 400 30, 50, 100, 150, 200, 250 300, 350, 400, 450, 500 30, 50, 100, 150, 200, 250 300, 350, 400, 450, 500 LEF Note 2) Horizontal 18 50 50 30 60 60 30 60 60 Vertical 8 16 30 9 19 37 12 24 46 Work load [kg] LEJ Force [N] Note 3) (Set value: Rated torque

Integrated Controller

50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500 Product weight [kg] 1.74 1.81 1.98 2.24 2.42 2.59 2.77 2.94 3.12 2.74 2.85 3.14 3.42 3.82 4.11 4.39 4.68 4.97 5.25 5.54 In-line Motor Series EQY16D Stroke [mm] 30 50 100 150 200 250 300 Product weight [kg] 0.72 0.76 0.87 1.01 1.12 1.23 1.34 Series EQY25D EQY32D Stroke [mm] 30 50 100 150 200 250 300 350 400 30 50 100

Smooth Cylinder/Low Speed Cylinder

, 250, 300, 350, 400, 450, 500 40 Symbol Specifications Change of rod end shape 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 -XA -XC6 Made of stainless steel 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 Tie-rod, cushion valve and tie-rod nut made of stainless steel -XC7 Note 1) Intermediate strokes not listed above are