Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base). Valve width is 7mm. 3 port solenoid valve, direct operated
V100 Replacement Parts Plug connector assembly (for plug lead) Sub-plate Lead wire length S07014A Port size S070S M3 M3 M5 M3 female thread M5 female thread 150 mm 300 mm 600 mm 1000 mm Nil 3 6 10 Gasket Mounting screw Valve model S070A S070B S070M Gasket no. S070A-80A-1 S070B-80A-1 S070M-80A-1 Valve model S070B S070C Mounting screw no.
wire AWG#26) 3.5 27 6 26 23.5 20.5 3 9.5 28.5 3.5 4 Series S070 Dimensions Base mounted with screws S070B-G-M5 Grommet type 16.5 3 7 15 21 2-3.4 Mounting hole 150 (lead wire AWG#26) 22 5 6 22 20.5 3 2 1 11 7 6 5 12 12.3 12 25 M5 0.8 3 (EXH) port M5 0.8 2 (OUT) port M5 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1 W with power saving circuit 6 150 (lead wire AWG#26) 3.5 27 27.5 25 22
Replacement Parts Plug connector assembly (for plug lead) Sub-plate Lead wire length S07014A Port size S070S M3 M3 M5 M3 female thread M5 female thread 150 mm 300 mm 600 mm 1000 mm Nil 3 6 10 Gasket Mounting screw Valve model S070A S070B S070M Gasket no. S070A-80A-1 S070B-80A-1 S070M-80A-1 Valve model S070B S070C Mounting screw no.
ERR11 (2) Voltage sag happens. (3) Peltier device is short-circuited. (3) Restart the power supply with DC cable disconnected.
Model Hexagon socket head cap screw Fe Ni Tightening torque (Nm) Model Hexagon socket head cap screw Fe Ni Tightening torque (Nm) MXS6 MXQ6 0.5 0.5 M2.5 x 6 M2.5 x 6 MXS8 MXQ8 0.9 0.9 M3 x 6 M3 x 6 MXS12 MXQ12 2.1 2.1 M4 x 10 M4 x 8 MXS16 MXQ16 M5 x 12 M5 x 10 4.3 4.3 MXS20 MXQ20 M5 x 14 M5 x 16 MXS25 MXQ25 M6 x 18 6.9 M6 x 16 6.9 A level difference is set to t No level difference with a
M5 tightening torque: 3 to 4.5Nm Do not touch equipment other than the terminal block during wiring. 2 5 2. Transportation and installation 3. Put back the front panel. [Wiring for operation, error signal and remote control] Specifications of signal cable Prepare the following cable.
M5 tightening torque: 3 to 4.5Nm Do not touch equipment other than the terminal block during wiring. 3. Put back the front panel. [Wiring for operation, failure signal and remote control] Specifications of signal cable Prepare the following cable.
Supply the power to the extent so that such voltage sag will not happen. ERR11 (2) Voltage sag happens. (1) Check the set value for high temp. cutoff temperature and confirm the temperature really reaches abnormal value. (1) Internal temp. sensor value exceeds the high temp. cutoff temperature.
If the product is subjected to a short power outage (including voltage sag), it may take a long time to resume normal operation or be unable to restart normally due to the protective equipment triggered after the power is recovered.
Type: Solenoid Valves, Application: Unit for Manifold Mounting, Mounting Orientation: Manifold Base, Voltage: DC5V, Specification: Standard, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Pressure Differential Return), Valve Positions: 2-Position Normally Open, Pipe Port Type: -, Port Size: -, Connecting Tube Diameter: -, Pressure Rating(MPa): 1,
Body Style: B (Base Mounted w/Screws), Coil Voltage: S (5 VDC), Flow Rate: A (Power Consumption: 0.35W, Operating Press: 0.1MPa, Cv: 0.016), Electrical Entry: G (Grommet)
If the product is subjected to a short power outage (including voltage sag), it may take a long time to resume normal operation or be unable to restart normally due to the protective equipment triggered after the power is recovered.
Approx. 21 69.3 42 12 Approx. 38.5 LECWith MR-BAT6V1SET 6 Mass: 1.4 [kg] Mounting screw Terminal Screw size: M5 Tightening torque: 3.24 [N m] CNP1 L1 L2 Approx. 6 Approx. 6 L3 Approx. 60 NP3 P4 CNP2 P+ Approx. 168 156 0.5 C D L11 L21 CNP3 3-M5 screw U V W PE Screw size: M4 Tightening torque: 1.2 [N m] Approx. 6 Approx. 12 42 0.3 Mounting hole process drawing 9 4 9.
. 168 156 0.5 PE 3-M5 screw Screw size: M4 Tightening torque: 1.2 [N m] 42 0.3 Approx. 12 Approx. 6 Mounting hole process drawing 9 4 9.
L11 L21 CNP3 3-M5 screw U V W PE Screw size: M4 Tightening torque: 1.2 [Nm] 42 0.3 Approx. 12 Approx. 6 Mounting hole process drawing 9 3 9.
SEMI F47 SEMI F47 is a SEMI standard which stipulates guidelines regarding voltage sag immunity. Semiconductor manufacturers require this standard for temperature control equipment, just like SEMI S2. Insulation resistance Electrical resistance between the conductor inside the device and the chassis (grounded).
The connection size is M5. Applicable crimped terminal width: 9.5mm or less [Wiring procedure] 1. Remove the front panel of the product. When lifting the front panel, be sure to hold the handle. 2-2 Installation 2 7 IDF100150F IDX-OM-M050 Air Dryer 2 Transportation / Installation 2.
The connection size is M5. Applicable crimped terminal width: 9.5mm or less [Wiring procedure] 1. Remove the front panel of the product. When lifting the front panel, be sure to hold the handle. 2.2 Installation 2 7 IDF100F~150F-W IDX-OM-M051 Air Dryer 2. Transportation and installation 2.
Option R: M5 tightening torque: 2.6Nm Do not touch equipment other than the terminal block during wiring. 3 to 3.5mm L2 L3 PE L1 Screwdriver entry Cable entry Terminal block Applicable screwdriver 5. If you are not performing wiring for operation, error signal and remote control, put back the front panel.