Table of Contents

B1 A Bracket B1 B2 B1 B2 LVC DIN terminal: D Conduit terminal: T LVA LVH LVD LVQ J J 2-5.3 LQ NO P Port NO P Port LVN 2-5.3 Mounting hole H 35 H TI/ TIL F L L Cable 6 to 12 PA M 35 F D N (44) 34.5 PAX PB 25 C E C M G 1/2 K G 1/2 B1 3-Rc P E Bracket A 10.5 K B1 B2 Hexagon width across flats 22 A B1 N B2 3-Rc P B1 Bracket H J K L M L M L M L M N N Grommet Conduit DIN terminal Conduit terminal

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AR/AZ AR/AZ (46 only) AR/AZ AR/AZ *2 FASTECH Co., Ltd. Ezi-SERVO EzM *2 Rockwell Automation, Inc. (Allen-Bradley) MP-/VPMP/VP *1 TL TLY-A AM AM30 *1 AM AM31 *2 AM AM80/AM81 *1 Siemens AG 1FK7 1FK7 *1 Delta Electronics, Inc.

Series: SGC300, Valve Type: Normally Closed, Seal Material: FKM, Pressure Range: 0 to 0.5 MPa, Thread: NPT, Port Size: 3/4, Bracket Mounting Position: Bracket on the Left Side, Auto Switch: F9BA--Solid State, Water Resist., 2 Wire, Horizontal, Lead Wire Length: 5 m

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Made to Order

MB, MB1 series MM Cushion valve W Width across flats Width across flats B1 E D H1 Effective thread Effective thread length Width across flats Bore size (mm) A B1 D H H1 K MM W ZZ A K 32 40 50 63 80 100 H 30 27 16 51 8 6 14 M14 x 1.5 7.2 139 22 ZZ + Stroke 35 32 20 58 11 7 18 M18 x 1.5 9.7 146 27 40 37 25 68 13 10 22 M22 x 1.5 10.5 166 32 40 37 25 68 13 10 22 M22 x 1.5 12 166 32 40 37 30 74

LEC-OM02704CN

AED ( () 150 1. 2. ) 15.12.5 (A37)(A37) 1 Spd Acc Dec 15 112 16. 16 .2 16.1 .2 16.1.1 .2 16.1.2 .4 16.2 .5 16.3 .5 16.4 .5 16.5 .6 16 1 16. 16 16.1 16.1.1 ( ) (1) (B1B2) B1 B1 DC24V DC24V VAR U B V VAR U B DC24 V DC2 4 B2 B2 B1B2 (2) (3) (a) R[]:() L[H]:() Vb[V]: U DC24V Vs[V] N () 16.1.2 16 2 16.

1

Series CBA2 B port C port A port Atmospheric release port NCM Bore size (mm) ZZ S Q NCA B2 + Stroke S2 B1 + Stroke S1 40 230 168 53 A + Stroke (S1 + S2) 50 249 180 59 D63 268 196 61 80 320 232 73 -X Stroke B Stroke A 100 341 252 79 S + Stroke (A + B) Series MB The above diagram shows head side lock type and manual releasing nonlock type.

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Technical Data 47 6 1193 MY1B Series Stroke Adjustment Units With adjustment bolt MY1B AZ Stroke Bore size E EA EB W TT h Stroke adjustment unit FC EC EY (mm) FC Applicable cylinder E EA EB EC EY h TT MY1B25 MY1B32 MY1B40 W 60 5 (Max. 16.5) 3.5 13 53.5 6.5 49 10 20 8 (Max. 20) 4.5 17 67 8.5 61 12 25 74 9 (Max. 25) 4.5 17 81.5 9.5 76 15 31 94 With high load shock absorber + adjustment bolt

Series SV

B1 Option 06 00 M1 With pressure gauge Without pressure gauge M1 Note) Note that a part number for Series SV1000 with pressure gauge differs depending on the position of the station (odd no. or even no.) on which the manifold is mounted to prevent the pressure gauges from interfering each other.

Series: 3 (SGC300), Valve Type: 2 (Normally Open), Seal Material: A (NBR), Pressure Range: 05 (0 to 0.5 MPa), Thread: N (NPT), Port Size: 20 (3/4), Bracket Mounting Position: B1 (Bracket on the Left Side)

Series: SGC300, Valve Type: Normally Open, Seal Material: NBR, Pressure Range: 0 to 0.5 MPa, Thread: NPT, Port Size: 3/4, Bracket Mounting Position: Bracket on the Left Side, Auto Switch: -, Lead Wire Length: -, Number: -

Series: 3 (SGC300), Valve Type: 1 (Normally Closed), Seal Material: B (FKM), Pressure Range: 10 (0 to 1 MPa), Thread: G (G (ISO1179)), Port Size: 20 (3/4), Bracket Mounting Position: B1 (Bracket on the Left Side), Auto Switch: C (M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal)

Series: 3 (SGC300), Valve Type: 1 (Normally Closed), Seal Material: B (FKM), Pressure Range: 05 (0 to 0.5 MPa), Thread: Rc, Port Size: 20 (3/4), Bracket Mounting Position: B1 (Bracket on the Left Side), Auto Switch: G (M9BA--Solid State, Water Resist., 2 Wire, Horizontal), Lead Wire Length: Z (5 m)

Series: SGC300, Valve Type: Normally Closed, Seal Material: FKM, Pressure Range: 0 to 0.5 MPa, Thread: Rc, Port Size: 3/4, Bracket Mounting Position: Bracket on the Left Side, Auto Switch: M9BA--Solid State, Water Resist., 2 Wire, Horizontal, Lead Wire Length: 5 m, Number: -

Series: SGC300, Valve Type: Normally Closed, Seal Material: FKM, Pressure Range: 0 to 0.5 MPa, Thread: Rc, Port Size: 3/4, Bracket Mounting Position: Bracket on the Left Side, Auto Switch: F9BA--Solid State, Water Resist., 2 Wire, Horizontal, Lead Wire Length: 5 m

Process Gas Diaphragm Valve

AZ Note) MV6 is bar stock body.

AZ1000

PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.

Series AP500

Outboard leakage Leak rate Across the seat leak Surface finish Connections Supply pressure effect Installation Internal volume Mass 1) 14 to 194F (10 to 90 C) for Vespel seat. 2) Tested with Helium gas inlet pressure 100 psig (0.7 MPa). 3) Mass, including individual boxed weight, may vary depending on connections or options. 2 Single Stage Compact Regulator for Ultra High Purity Series AP500 AZ

SL5200

PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.

smcmaintenancepartslist

Contents 16 MGP16-AZ-PS Set of left nos. @6, @7, @8, @9, #0 50 MGP50-AZ-PS Set of left nos. @6, @7, @8, @9, #0 20 MGP20-AZ-PS 25 MGP25-AZ-PS 32 MGP32-AZ-PS 40 MGP40-AZ-PS 63 MGP63-AZ-PS 80 MGP80-AZ-PS 100 MGP100-AZ-PS * Seal kit includes @6 to #0. Order the seal kit, based on each bore size. * Since the seal kit does not include a grease pack, order it separately.