2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Free Mount Cylinder

Note 1) In the case of ZCUKR16-5D: 14.5 mm.

Hydraulic

Mounting bolt Mounting bolt diagram C D D Model C Mounting bolt Model C D Mounting bolt M5 x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l M8 x 95l x 100l x 105l x 110l x 115l x 120l x 125l x 130l x 135l x 160l x 185l 5D (M) CHQB63 10D (M) CH QB20 55 60 65 70 75 80 85 90 95 100 70 75 80 85 90 95 100 105 110 115 140 165 75 80 85 90 95 100 105 110 115 120 145 170 90 95 100 105

LEC-OM07605CN

B1 VAR U B DC24V VAR U B DC24V B2 B2 B1B2(VAR) (2) (3) (a) R[]:() L[H]:() Vb[V]: DC24V U Vs[V] N () 14.1.2 14 2 14.

Size: 4 (400), Valve Type: 1 (N.C.), Seal Material: B (FKM), Pressure Range: 70 (0 to 7 MPa), Thread: N (NPT), Port Size: 25 (1, SGH400), Pilot Valve: Y (V116, for 7 MPa), Voltage: 5 (24VDC), Electrical Entry: W (M12 Connector, 4-Pin Type), Light/Surge Suppressor: None, Manual Override: Non-locking Push Type, Bracket: B1 (Bracket on Left Side)

Size: 400, Valve Type: N.C., Seal Material: FKM, Pressure Range: 0 to 7 MPa, Thread: NPT, Port Size: 1, SGH400, Pilot Valve: V116, for 7 MPa, Voltage: 24VDC, Electrical Entry: M12 Connector, 4-Pin Type, Light/Surge Suppressor: None, Manual Override: Non-locking Push Type, Bracket: Bracket on Left Side

LEC-OM02904

( ) (1) (B1B2) B1 B1 DC24V DC24V U B DC24V U B DC24V VAR VAR B2 B2 B1B2 (2) (3) (a) R[]:() L[H]:() Vb[V]: U DC24V Vs[V] N () 13.1.2 13 2 13.

OMU0023

Modbus ASCII protocol (ASCII notation) Request data : 01 08 0 1234 B1 [CR,LF] Response data (normal response) : 01 08 0 1234 B1 [CR,LF] (ASCII hexadecimal notation) Request data 3Ah 30h 31h 30h 38h 30h 30h 30h 30h 31h 32h 33h 34h 42h 31h 0Dh 0Ah Response data (normal response) 3Ah 30h 31h 30h 38h 30h 30h 30h 30h 31h 32h 33h 34h 42h 31h 0Dh 0Ah ii.

Table of Contents

Applicable bore (mm) d H1 B1 C1 4T counterbore A' 6 10 16 20 25 32 NTP-006 NTP-010 NTJ-015A NT-015A NT-02 NT-03 M3 x 0.5 1.8 2.4 4 5 5 6 5.5 7 8 10 13 17 6.4 8.1 9.2 11.5 15.0 19.6 S + Stroke Auto switch M4 x 0.7 Z + Stroke M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 Bore size (mm) A A' B C D E GA GB H J K L MM NN P Q QA 6 10 16 20 25 32 7 10 11 12 15.5 19.5 10 10 11.5 12.5 13 12.5 12.5 14 18

Size: 4 (400), Valve Type: 1 (N.C.), Seal Material: B (FKM), Pressure Range: 70 (0 to 7 MPa), Thread: N (NPT), Port Size: 25 (1, SGH400), Pilot Valve: Y (V116, for 7 MPa), Voltage: 5 (24VDC), Electrical Entry: T (Conduit Terminal), Light/Surge Suppressor: Z (Light/Surge Suppressor, Non-polar)

Size: 400, Valve Type: N.C., Seal Material: FKM, Pressure Range: 0 to 7 MPa, Thread: NPT, Port Size: 1, SGH400, Pilot Valve: V116, for 7 MPa, Voltage: 24VDC, Electrical Entry: Conduit Terminal, Light/Surge Suppressor: Light/Surge Suppressor, Non-polar, Manual Override: -, Bracket: -

Size: 4 (400), Valve Type: 1 (N.C.), Seal Material: B (FKM), Pressure Range: 70 (0 to 7 MPa), Thread: Rc, Port Size: 25 (1, SGH400), Pilot Valve: Y (V116, for 7 MPa), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Light/Surge Suppressor: Z (Light/Surge Suppressor, Non-polar), Manual Override: Non-locking Push Type, Bracket: B1 (Bracket on Left Side)

Size: 4 (400), Valve Type: 1 (N.C.), Seal Material: B (FKM), Pressure Range: 70 (0 to 7 MPa), Thread: Rc, Port Size: 25 (1, SGH400), Pilot Valve: Y (V116, for 7 MPa), Voltage: 5 (24VDC), Electrical Entry: T (Conduit Terminal), Light/Surge Suppressor: Z (Light/Surge Suppressor, Non-polar), Manual Override: Non-locking Push Type, Bracket: B1 (Bracket on Left Side)

Size: 400, Valve Type: N.C., Seal Material: FKM, Pressure Range: 0 to 7 MPa, Thread: Rc, Port Size: 1, SGH400, Pilot Valve: V116, for 7 MPa, Voltage: 24VDC, Electrical Entry: DIN Terminal, Light/Surge Suppressor: Light/Surge Suppressor, Non-polar, Manual Override: Non-locking Push Type, Bracket: Bracket on Left Side

Size: 400, Valve Type: N.C., Seal Material: FKM, Pressure Range: 0 to 7 MPa, Thread: Rc, Port Size: 1, SGH400, Pilot Valve: V116, for 7 MPa, Voltage: 24VDC, Electrical Entry: Conduit Terminal, Light/Surge Suppressor: Light/Surge Suppressor, Non-polar, Manual Override: Non-locking Push Type, Bracket: Bracket on Left Side

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Model C Mounting bolt CDQP2B12-5D -10D -15D -20D -25D -30D CDQP2B16-5D -10D -15D -20D -25D -30D CDQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQP2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D Model C Mounting bolt CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-

CQ2

Mounting bolt Mounting bolt CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D Mounting bolt CDQP2B12-5D -10D -15D -20D -25D -30D CDQP2B16-5D -10D -15D -20D -25D -30D CDQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQP2B25-5D -10D -

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Model C Mounting bolt CDQP2B12-5D -10D -15D -20D -25D -30D CDQP2B16-5D -10D -15D -20D -25D -30D CDQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQP2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D Mounting bolt CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-10D -15D

CQS

Mounting bolt Mounting bolt D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 Model C Model C D 55 60 65 70 75 80 35 40 45 50 55 60 65 70 75 80 CQSWB12-5D -10D -15D -20D -25D -30D CQSWB16-5D -10D -15D -20D -25D -30D CQSWB20-5D -10D -15D -20D CQSWB20-25D -30D -35D -40D -45D -50D CQSWB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D M3 x 30l x 35l x 40l x 45l x 50l x 55l M3 x 30l x 35l x

Table of Contents

VFR2110-5D 5 sets (2 position single part no.) VFR2410-5D 1 set (3 position exhaust part no.) VVFS2000-R-01-2 1 set (Individual EXH spacer part no.) VV5FR2-01T1-061-02 1 set (Manifold base part no.) VFR2100-5FZ 3 sets (2 position single part no.) VFR2200-5FZ 2 sets (2 position double part no.) VVFS2000-10A 1 set (Blanking plate assembly part no.)