1

(Side ported) 39n + 247 43.5n + 247 0.12 1.0 0.14 0.9 C6 1/8 SS5Y3-51 (Bottom ported) 41.5n + 251 48.5n + 251 0.10 1.1 0.21 1.0 C6 1/8 SS5Y3-52 (Top ported) 44n + 247 0.14 1.1 0.15 1.1 C6 1/8 SS5Y5-50 (Side ported) 93n + 379 110n + 379 0.13 2.3 0.20 2.2 C8 1/4 SS5Y5-51 (Bottom ported) 93n + 413 113n + 413 0.16 2.5 0.26 2.4 C8 1/4 SS5Y5-52 (Top ported) 103n + 379 0.12 2.6 0.18 2.4 C8 1/4

SY

/location) SUP/EXH block assembly (standard): SX5000-51-2A SUP/EXH block assembly (R type): SX5000-51-6A SUP/EXH block assembly (S type): SX5000-51-7A SUP/EXH block assembly (RS type): SX5000-51-8A 6 5 4 C6 3 2 1 Stations or layout 2 position Single solenoid a C 8 Double solenoid For mixed port sizes For SMC use only Enter ordered part numbers. Order no. Part no. Qty. Part no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Stations 3 m Manual override 10 Clean series VVQ1000-10A-1 VVQ1000-10A-1 VQ1200-5 VQ1200-51 Seal 0 1 Nil: Non-locking push type (Tool required) B: Locking type (Tool required) VQ1200-5 VQ1200-51 Copper/Fluorine/Silicone free + Low particle generation VQ1200-5 VQ1200-51 VQ1200-5 VQ1200-51 21 VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51 Metal seal Rubber seal VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Stations 3 m Manual override 10 Clean series VVQ1000-10A-1 VVQ1000-10A-1 VQ1200-5 VQ1200-51 Seal 0 1 Nil: Non-locking push type (Tool required) B: Locking type (Tool required) VQ1200-5 VQ1200-51 Copper/Fluorine/Silicone free + Low particle generation VQ1200-5 VQ1200-51 VQ1200-5 VQ1200-51 21 VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51 Metal seal Rubber seal VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51

0.4

Stations SYJ Seal Metal seal Rubber seal VVQ2000-10A-1 3 m VQ2200-51 Enclosure VQ2200-51 VQ2200-51 0 1 VQ2200-51 VQ2100-51 Nil SZ VQ2100-51 VQ2100-51 Dust-tight, Waterjet-proof (IP65) W Note) VF Type of actuation Note) T/L/S/M kit only.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Symbol Port size Applicable series C4 C6 M C4 C6 C8 M 02 2 stations Single wiring spec.

CATALOG

63 80 10 27 20 10 108.5 51 16 32 63.5 85.5 25 13 Courtesy of Steven Engineering, Inc. !

Table of Contents

fitting Applicable tubing O.D.: 6 C6 2 stations are needed to mount control unit.

V100

DXT060-51-13A 1 pc.

Vacuum System Peripherals:

SX3000-51-4A SUP/EXH block assembly (for RS): SX3000-51-5A 2 pcs 1 location EXH block disk: SX3000-77-1A SUP/EXH block assembly (Standard): SX3000-51-1A The following columns shall be filled in by SMC.

42

*VQ5100-51(-Q)2 setsValve part no. (Stations 1 and 2) *VQ5200-51(-Q)2 setsValve part no. (Stations 3 and 4) *VQ5300-51(-Q)1 setValve part no.

SX

C6 Cylinder port size SX3000 C6: With One-touch fittings for 6 Manifold base (5 stations) SX5000 SS5X3-41-05-C6 One-touch fitting (Inch size) Symbol Port size Applicable series One-touch fitting for 5/32" N3 SX3000 One-touch fitting for 1/4" N7 SS5X3-41-05-C6 1 set (Type 41, 5-station manifold base part no.)

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

-5LOU-C6 2 sets (Double solenoid part no.)

VZS

fitting Applicable tubing O.D.: 6 C6 2 stations are needed to mount control unit.

VFR

Caution When using exhaust cleaner, mount it downwards. 3-5-88 Manifold with Exhaust Cleaner Plug-in type/Non plug-in type 235.5 204 (72) 70 [71.5] 60 60 24 [23] 11 R5.5 21 B B B B A A A A P = 51 71.5 (Pitch) 71.5 6 [2] 209 250 D side mounting U side mounting P = 51 (Pitch) 6 [2] D side mounting U side mounting n: Stations Stations Formula L1 = 51 x n + 92 L2 = 51 x n + 110 2 194 212 3 245

A

63 80 10 27 20 10 108.5 51 16 32 63.5 85.5 25 13 Courtesy of Steven Engineering, Inc. !

0.4

One-touch fitting assembly C6: 6 One-touch fitting assembly 2 x Rc 1/8, 1/4, C6, C8 ( 9.5) ( 9.5) 80 39.5 (For C6, C8) (For C6, C8) 23 P = 22 L1 L2 L3 (For C6, C8) ( 9.5) DIN rail clamp screw 4.5 2 x M4 mounting hole 2 x M6 mounting hole IN IN IN IN 5.5 (5) 69.5 (40) 6.5 58 10.5 80 37.5 Residual pressure release manual override (For C6, C8) 22 20.5 7 Stations 1 2 3 n U side D side ( 9.5)

Fieldbus System

Refer to page 51 for mounting method.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Fittings & Tubing Air Cylinders Rotary Actuators 2 position single (24 VDC) 10-SQ1131-51-C6 (4 sets) 2 position double (24 VDC) 10-SQ1231D-51-C6 (4 sets) Blanking plate SSQ1000-10A-3 (1 set) Stations 1 2 3 4 5 6 7 8 9 U side D side 3m D-sub connector cable AXT100-DS25-030 Cylinder port fitting C6: 6 One-touch fitting Manifold base (9 stations) 10-SS5Q13-09FD2-D F kit (D-sub connector kit)

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

51 VQZ1000 2 to 20 stations l l Rc(PT) 1/8 lll In-line SY C4(4) C6(6) C8(8) Rc(PT)1/8 2 stations: 193 Addition per/ station: 54 VV5QZ25 VQZ2 50 VQZ2 51 VQZ2000 lll l l Rc(PT) 1/4 2 to 20 stations SYJ In-line SX 2 stations: 398 Addition per/ station: 102 1(P)port Rc(PT)3/8 35(R)port Rc(PT)1/4 C6(6) C8(8) C10(10) Rc(PT)1/4 l l VV5QZ35 VQZ3 50 VQZ3 51 VQZ3000 2 to 20 stations VK In-line lll