SQ1000/2000

-10A-3 (1 set) Stations 1 2 3 4 5 6 7 8 9 U side 3m SQ1000-10A-3 SQ1230-5-C6 SQ1230-5-C6 SQ1230-5-C6 SQ1230-5-C6 SQ1130-5-C6 SQ1130-5-C6 SQ1130-5-C6 SQ1130-5-C6 D-sub connector cable AXT100-DS25-030 Cylinder port fitting C6: 6 One-touch fitting D side Manifold base (9 stations) SS5Q13-09FD2-D F kit (D-sub connector kit) SS5Q13-09FD2-D . 1 set: F kit 9 station manifold base SQ1130-5-C6 .

1

(Side ported) 39n + 247 43.5n + 247 0.12 1.0 0.14 0.9 C6 1/8 SS5Y3-51 (Bottom ported) 41.5n + 251 48.5n + 251 0.10 1.1 0.21 1.0 C6 1/8 SS5Y3-52 (Top ported) 44n + 247 0.14 1.1 0.15 1.1 C6 1/8 SS5Y5-50 (Side ported) 93n + 379 110n + 379 0.13 2.3 0.20 2.2 C8 1/4 SS5Y5-51 (Bottom ported) 93n + 413 113n + 413 0.16 2.5 0.26 2.4 C8 1/4 SS5Y5-52 (Top ported) 103n + 379 0.12 2.6 0.18 2.4 C8 1/4

SY

Mixed M ... ... 8 08 17 17 6 One-touch fitting C6 Mixed M Note 1) Includes the number of blanking plate assemblies.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

-1 3 m VQ2200-51 VQ2200-51 VQ2200-51 Nil VQ2200-51 VQ2100-51 VQ2100-51 VQ2100-51 Dust-tight/water-jetproof type (IP65) W Note) Note) T, L, S and M kits only Actuation type D-sub connector Seal Metal seal Rubber seal 2-position single cable assembly AXT100-DS25-030 Light/surge voltage suppressor Cylinder port fitting size C8: With 8 One-touch fitting 0 1 1 F kit (D-sub connector) Yes None

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

-1 3 m VQ2200-51 VQ2200-51 VQ2200-51 Nil VQ2200-51 VQ2100-51 VQ2100-51 VQ2100-51 Dust-tight/water-jetproof type (IP65) W Note) Note) T, L, S and M kits only Actuation type D-sub connector Seal Metal seal Rubber seal 2-position single cable assembly AXT100-DS25-030 Light/surge voltage suppressor Cylinder port fitting size C8: With 8 One-touch fitting 0 1 1 F kit (D-sub connector) Yes None

0.4

Stations SYJ Seal Metal seal Rubber seal VVQ2000-10A-1 3 m VQ2200-51 Enclosure VQ2200-51 VQ2200-51 0 1 VQ2200-51 VQ2100-51 Nil SZ VQ2100-51 VQ2100-51 Dust-tight, Waterjet-proof (IP65) W Note) VF Type of actuation Note) T/L/S/M kit only.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Symbol Port size Applicable series C4 C6 M C4 C6 C8 M 02 2 stations Single wiring spec.

CATALOG

I N G S C3 C4 C6 M5 N1 N3 N7 C3 C4 C6 M5 N1 N3 N7 A S S E M B LY VVQ1000-R-1-C6 VVQ1000-52A-C8 (VQ1000) O F B A C K P R E S S U R E A S S E M B LY [-B] VVQ1000-57A DIN R A I L M O U N T E D B R A C K E T [-D] VA C U U M E J E C T O R U N I T C H E C K VA LV E F O R P R E V E N T I O N O F S I L E N C E R (EXH P O R T) VVQ1000-JA BM (VQ1000) VVQ1000-18A Courtesy of Steven Engineering, Inc.

Table of Contents

Cable length VVFS2000-30A-1 VVFS2000-30A-2 VVFS2000-30A-3 VVFS2000-30A-4 VVFS2000-30A-5 VVFS2000-30A-6 VVFS2000-30A-7 1.5 m 3 m 5 m 7 m 10 m 15 m 20 m 1.5 m 3 m 5 m 8 m 10 m 15 m 30 m VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 VVZS3000-21A-5 VVZS3000-21A-6 VVZS3000-21A-7 Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.

V100

VQZ L plug connector (L): VQZ22(R)-L-C4/C6/M5 DIN terminal (Y): VQZ22(R)-Y-C4/C6/M5 VZ VS Indicator light 84 300 VFN (Lead wire length) 30.5 <35.5> 87 Max. 10 Applicable cable O.D. 3.5 to 7 Pg.7 Cover diameter 1.5 Cross section 0.23 mm2 Indicator light < >: AC 61.5 M plug connector (M): VQZ22(R)-M-C4/C6/M5 54 36 (Lead wire length) Cover diameter 1.5 Cross section 0.23 mm2 300 89 78 Indicator

Vacuum System Peripherals:

Port size Rc Model M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V VX2110 VX2112 N.C. N.O. VX2120 VX2122 N.C. N.O. VX2220 VX2 N.C. N.O. VX2320 VX2322 N.C. N.O. VX2130 VX2132 N.C. N.O. VX2230 VX2232 N.C. N.O. VX2330 VX2332 N.C. N.O. VX2240 VX2242 N.C. N.O. VX2340 VX2342 N.C. N.C.

42

VQ 4 0 1 0 5 1 VFR CE-compliant Lead wire kit with cable (3 m) Nil Q CE-compliant VQ7 VV5Q41-05C8LD2(-Q)1 setManifold base part no. *VQ4100-51(-Q)2 setsValve part no. (Stations 1 and 2) *VQ4200-51(-Q)2 setsValve part no. (Stations 3 and 4) *VQ4300-51(-Q)1 setValve part no. (Station 5) Note) CE-compliant: For DC only.

SX

Speed controller Silencer Tube x Length Speed controller Silencer SX3140-01 SX3120-C6 AS3001F-06 AN110-01 AS2051F-06 AN120-M5 T0604 x 1 m T0806 x 1 m AS3001F-08 T0604 x 1 m T0806 x 1 m AS3001F-08 SX5140-02 SX5120-01 AS3001F-06 AS3001F-06 AN101-01 AN101-01 AS4001F-10 T0604 x 1 m T1075 x 1 m T1209 x 1 m AS3001F-06 T0604 x 1 m AS3001F-06 T1075 x 1 m AS4001F-10 SX7140-03 SX7120-02 SV AS200-02

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

(For manifold gasket positioning) L plug connector (L): 10-SY3220-L(-F2) C4, N3 C6, N7 M plug connector (M): 10-SY3220-M(-F2) C4, N3 C6, N7 M8 connector (WO): 10-SY3220-WO(-F2) C4, N3 C6, N7 (Lead wire length) 108.6 [113] Approx. 300 28.5 [35.5] 13.1 33 15.5 M8 x 1 39.6 [46.6] Approx. 300 (Lead wire length) 89 [93.4] 79 106.8 92 16.9 C6: 33.6 N7: 37.4 (3.2) 16.9 C6: 33.6 N7: 37.4 (3.2) 16.9

VFR

Cable length VVFS2000-30A-1 VVFS2000-30A-2 VVFS2000-30A-3 VVFS2000-30A-4 VVFS2000-30A-5 VVFS2000-30A-6 VVFS2000-30A-7 1.5 m 3 m 5 m 7 m 10 m 15 m 20 m 1.5 m 3 m 5 m 8 m 10 m 15 m 30 m VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 VVZS3000-21A-5 VVZS3000-21A-6 VVZS3000-21A-7 Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.

VZS

stations C6 Embedded type One-touch fitting Applicable tubing O.D.: 6 M plug connector 24 stations 24 Symbol Max. 24 stations.

A

35 70 52 20 40 10 17 17 M 8 x 1.25 7 11 M 18 x 1.5 30 3/8 90 0 63 ~ 600 20 ~ 600 32 35 85 64 20 40 10 17 17 M 10 x 1.25 7 14 M 18 x 1.5 31 3/8 98 0 80 ~ 750 20 ~ 750 37 40 102 78 25 52 14 21 21 M 12 x 1.75 11 17 M 22 x 1.5 37 1/2 116 0 100 ~ 750 20 ~ 750 37 40 116 92 30 52 14 21 21 M 12 x 1.75 11 17 M 26 x 1.5 40 1/2 126 0 With Gaiter Without Gaiter Bore (mm) ZZ ZZ H f h e l 146 154 40 51

0.4

AXT100-MC26-030: 3 m AXT100-MC26-015: 1.5 m Circular connector cable assembly 60 (12) (7.5) 49.5 B B B B B B B B 12 P12 P 30 25 18 1 1 A A A A A A A A 13.5 10 C10 [1(P) SUP port] C10: 10 One-touch fitting P = 16 45 25 C10 [1(P) SUP port] (C12 in case of branch type) C4, C6, C8, [4(A), 2(B) port] C10: 10 One-touch fitting (C12: 12 One-touch fitting) C4: 4 One-touch fitting C6: 6 One-touch

Fieldbus System

Specified layout Note 2) (Available up to 32 solenoids) 20 20 stations Symbol A, B port P , E port A, B port size (Metric) Symbol A, B port P , E port A, B port size (Inch) Applicable series Applicable series C3 C4 C6 C4 C6 C8 C6 C8 C10 M N1 N3 N7 N3 N7 N9 N7 N9 N11 M 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Fittings & Tubing Air Cylinders Rotary Actuators 2 position single (24 VDC) 10-SQ1131-51-C6 (4 sets) 2 position double (24 VDC) 10-SQ1231D-51-C6 (4 sets) Blanking plate SSQ1000-10A-3 (1 set) Stations 1 2 3 4 5 6 7 8 9 U side D side 3m D-sub connector cable AXT100-DS25-030 Cylinder port fitting C6: 6 One-touch fitting Manifold base (9 stations) 10-SS5Q13-09FD2-D F kit (D-sub connector kit)