Clean Regulator/Fluororesin Type

Nil X401 Standard Applicable fittings LQ1 LQ2 Symbol 1 2 Nil N Rc 1/8 NPT 1/8 Rotating the mounting hole 90 Fitting size (IN side) Fitting size (OUT side) Note 2) Note 2) Applicable model SRF10 SRF30 SRF50 Applicable model SRF10 SRF30 SRF50 Fitting size Fitting type Applicable fitting size Fitting type Symbol Symbol Nil 07 11 13 19 25 Note 1) 2 3 4 5 6 Same as IN side 2 3 4 5 6 07 11 13

Clean Room Regulator/Fluoro Resin Type Series SRF30

Dimensions Tubing/SRF30-T11 2-30 IN OUT 67.7 32.3 52 Pilot port identification symbols and port types (marking) Symbol R N Port type Rc 1/8 NPT 1/8 12 R 75 52 64 1 2 SMC 4-5.5 41.7 Integral fittings/SRF30-S IN OUT 67.7 32.3 52 (112) Pilot port identification symbols and port types (marking) Symbol R N Port type Rc 1/8 NPT 1/8 12 R 75 52 64 1 2 SMC 4-5.5 41.7

LVQ

T) View Z Dimensions (mm) A C D M N T U V B Model LVQ20S-S07-2 LVQ30S-S11-2 LVQ40S-S13-2 LVQ50S-S19-2 LVQ60S-S25-2 25.5 46 31.5 58 7 15 35.3 10.6 7 23.5 47 29.5 59 7 15 36.9 16.5 10 23.5 47 29.5 59 7 20 37.9 22 17 35 70 41 82 7 20 64 25 35 70 41 82 7 20 66 32 17-5-78 17 Series LVQ Space Saving/Space Saving Connection With flow rate adjustment & by-pass High back pressure spec. with flow

Prevents Micro-Bubbles

S10 S11 S12 S13 S12 S13 S19 Tubing size 1/8" Body class 0 1 2 N.C.

ZP

ZP2A-S01P ZP2A-S02P ZP2A-S03P ZP2A-S04P ZP2A-S05P ZP2A-S11 ZP2A-S12 ZP2A-S13 ZP2A-S14 ZP2A-S15 Pad type ZP2-T04S-A3 ZP2-T06S-A5 ZP2-T08S-A5 ZP2-T10S-A5 ZP2-T15S-A5 ZP2-T04S-B3 ZP2-T06S-B5 ZP2-T08S-B5 ZP2-T10S-B5 ZP2-T15S-B5 Type Sponge Symbol S Note) in the table indicates the pad material.

ZP

ZP2A-S01P ZP2A-S02P ZP2A-S03P ZP2A-S04P ZP2A-S05P ZP2A-S11 ZP2A-S12 ZP2A-S13 ZP2A-S14 ZP2A-S15 Pad type ZP2-T04S-A3 ZP2-T06S-A5 ZP2-T08S-A5 ZP2-T10S-A5 ZP2-T15S-A5 ZP2-T04S-B3 ZP2-T06S-B5 ZP2-T08S-B5 ZP2-T10S-B5 ZP2-T15S-B5 Type Sponge Symbol S Note) in the table indicates the pad material.

ZP

ZP2A-S01P ZP2A-S02P ZP2A-S03P ZP2A-S04P ZP2A-S05P ZP2A-S11 ZP2A-S12 ZP2A-S13 ZP2A-S14 ZP2A-S15 Pad type ZP2-T04S-A3 ZP2-T06S-A5 ZP2-T08S-A5 ZP2-T10S-A5 ZP2-T15S-A5 ZP2-T04S-B3 ZP2-T06S-B5 ZP2-T08S-B5 ZP2-T10S-B5 ZP2-T15S-B5 Type Sponge Symbol S Note) in the table indicates the pad material.

Table of Contents

S10 S11 S12 S13 S12 S13 S19 Tubing size 1/8" Body class 0 1 2 N.C.

The SRF30 series is designed to regulate DI water and N2 gas in the clean room. Fluoro resin material is used in the fluid contact area. The fluid contact area is washed with freon ultra sonic and DI water. Clean regulator series; One piece structure w/LQ fitting; Tube porting available; Tube sizes (inch): 1/4, 3/8; Tube sizes (mm): 6, 8, 10

The SRF30 series is designed to regulate DI water and N2 gas in the clean room. Fluoro resin material is used in the fluid contact area. The fluid contact area is washed with freon ultra sonic and DI water. Clean regulator, fluoro resin type; Body sizes: 1/4 (10), 3/8 (30), 3/4 (50); LQ1 or LQ2 fittings available; Fitting sizes: 1/4, 3/8, 1/2, 3/4

The SRF30 series is designed to regulate DI water and N2 gas in the clean room. Fluoro resin material is used in the fluid contact area. The fluid contact area is washed with freon ultra sonic and DI water. Clean regulator, fluoro resin type; Body sizes: 1/4 (10), 3/8 (30), 3/4 (50); LQ1 or LQ2 fittings available; Fitting sizes: 1/4, 3/8, 1/2, 3/4

The SRF30 series is designed to regulate DI water and N2 gas in the clean room. Fluoro resin material is used in the fluid contact area. The fluid contact area is washed with freon ultra sonic and DI water. Clean regulator series; One piece structure w/LQ fitting; Tube porting available; Tube sizes (inch): 1/4, 3/8; Tube sizes (mm): 6, 8, 10

.· Recommended flow rate: SRF10 2 L/min, SRF30 5 L/min (inlet pressure: 0.3 MPa, fluid: water).· RoHS compliant.· Integrated fitting / with nut / tube extensions.· Pilot port thread types: Rc1/8, NPT1/8.· Body sizes: 1, 3.· Fitting types: LQ1, LQ2, none.

ZP

ZP2-5030W ZP2-6030W ZP2-8030W ZP2A-003 P. 69 ZP2-04S P. 70 ZP2A-S01P ZP2-B02MU ZP2-B035MU ZP2-B04MU ZP2-B05MU ZP2-B04MB ZP2-06S P. 70 ZP2A-M01P P. 69 ZP2A-S02P ZP2-B06MU ZP2-B08MU ZP2-B10MU ZP2-B15MU ZP2-B06MB ZP2-B08MB ZP2-B10MT ZP2-B15MT ZP2-08S P. 70 ZP2A-S03P ZP2A-M02 P. 69 ZP2-10S P. 70 ZP2A-S04P ZP2-15S P. 71 ZP2A-S05P ZP2-B20MT ZP2-B25MT ZP2-B30MT ZP2A-M03 P. 69 ZP2-04S P. 71 ZP2A-S11

Body Class: 3 (Orifice ø8), Valve Type: 0 (Normally Closed), Tube Size: S11 (3/8"), Pilot Port: N (Body Class 3, 4, 5 - NPT 1/8")

Body Class: 3 (Orifice ø8), Valve Type: 1 (Normally Open), Tube Size: S11 (3/8"), Pilot Port: N (Body Class 3, 4, 5 - NPT 1/8")

Body Class: 4 (Orifice ø10), Valve Type: 0 (Normally Closed), Tube Size: S11 (3/8"), Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5 - Rc1/8, Material: F (Body: PFA, Actuator Endplate: PVDF, Diaphragm: PTFE)

Body Class: 4 (Orifice ø10), Valve Type: 1 (Normally Open), Tube Size: S11 (3/8"), Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5 - Rc1/8, Material: F (Body: PFA, Actuator Endplate: PVDF, Diaphragm: PTFE)

Body Class: 3 (Orifice ø8), Valve Type: 0 (Normally Closed), Tube Size: S11 (3/8"), Pilot Port: N (Body Class 3, 4, 5 - NPT 1/8"), Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: 4 (Indicator)

Body Class: 3 (Orifice ø8), Valve Type: 0 (Normally Closed), Tube Size: S11 (3/8")