Stations: 12 Stations, Manifold Type: FD0 (D-sub Connector 25 Pin w/o Cable), Manifold Mount Style: D (DIN Rail Mounting), Option: S (Built-in Silencer, Direct Exhaust), One-touch Fitting: ø10 (C10) One-touch Fitting, CE Compliant: Q (CE Compliant)

Stations: 12 Stations, Manifold Type: D-sub Connector 25 Pin w/o Cable, Manifold Mount Style: DIN Rail Mounting, Option: None, One-touch Fitting: ø10 (C10) One-touch Fitting, CE Compliant: CE Compliant

Stations: 12 Stations, Manifold Type: D-sub Connector 25 Pin w/o Cable, Manifold Mount Style: DIN Rail Mounting, Option: Built-in Silencer, Direct Exhaust, One-touch Fitting: ø10 (C10) One-touch Fitting, CE Compliant: CE Compliant

High Vacuum Angle Valve

0 o 102 0.2 2-1 132 q 134 O-ring Part No.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Table of UL-compliant Products JSXD Series JSXZ Series JSXM Series Option Replacement Parts B T A IN N S F 8 x 18 Q D DS: DIN terminal DZ: DIN terminal with light GS: Grommet with PCB CS: Conduit Applicable cable 6 to 12 U V E 500 U E G1/2 U E 300 NPT1/2 T T T DN: DIN terminal without connector WN: M12 connector U E U E T T Glossary of Terms [mm] Size Applicable flange A B C D E F N Q

Aluminum High Vacuum Angle Valve

0 o 102 0.2 2-1 132 q 134 O-ring Part No.

High Vacuum Angle Valve

0 Air operated, With solenoid valve XLAV e Indicator/Solenoid valve direction w Flange type q Flange size Symbol Indicator Solenoid valve direction F With indicator Size 16 25 40 50 63 80 Symbol Type Applicable flange size Nil KF (NW) 16, 25, 40, 50, 63, 80 D K (DN) 63, 80 Rear flange surface Left flange surface G Rear flange surface J Right flange surface K Without indicator Right flange

XM, XY

0) q Magnet (Optional) !

High Vacuum Angle Valve, XL Series

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust

XL

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust

1

SY 3 5 1 0 0 1 q w r e t y u i o !0 !1 Base mounted q Series !

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

(Cable length) PCA-1557633 PCA-1557646 EX500-AC010-DN (1 m) EX500-AC050-DN (5 m) PCA-1557659 PCA-1557662 PCA-1557675 i o !0 !1 !2 !

2

M Q Q Note) D is maximum diameter.

Series SV

SV400 SV300 SV200 SV100 Die-cast aluminium See thread types on page 86 for . 3/8: SY9000-27-1 1/4: SY7000-27-1-Q SY5000-27-1-Q SY3000-27-1-Q Sub-plate 8 1/2: SY9000-27-2 3/8: SY7000-27-2-Q Gasket SY5000-11-18 SY9000-11-2 SY7000-11-14 SY3000-11-25 9 For valve mounting (flat nickel plated) Round head combination screw SV2000-21-1 (M3 x 30) SV2000-21-2 (M3 x 40) SV3000-21-1 (M4 x 35) SX3000-

Series VQ Metal Seal/Rubber Seal Body Ported

Description Note q Material No.

VQZ1000/2000/3000

3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e w q e w q r r Note) 3 position pressure center 3 position exhaust center 3 position closed center 3 position pressure center 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B

SV

How to Order EX500 G DN 1 Communication protocol Applicable GW unit DN PR AB DeviceNet PROFIBUS-DP Remote I/O (RIO) DeviceNet PROFIBUS-DP Remote I/O (RIO) Nil -X1 Dimensions 148 EX500-GAB1-X1 VOLTAGE 24 VDC/200 mA INPUT/OUTPUT 64/64 IP CODE IP65 SERIAL NO.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMD Symbol Nil D C Type KF (NW) K (DN) CF Applicable flange size 25, 40, 50, 63, 80 63, 80 40 (070), 63 (114) XYD V V V V V XMD V V V V V Size 25 40 50 63 80 XYD Nil D KF (NW) K (DN) 25, 40, 50, 63, 80 63, 80 3.

Compact 5-Port Solenoid Valve

e r w q e r w 5 (EA) 4 (A) 3 (EB) 2 (B) 1 (P) 2-position single 2-position double (A)4 2(B) (A)4 2(B) 3(EB) (EA)5 1 3(EB) (EA)5 1 (P) (P) 4-position dual 3-port valve 3-position closed center/exhaust center/pressure center q e r w q e r w 3-position closed center 3-position exhaust center 4-position dual 3-port valve N.C. valve x 2 pcs.

0.4

w e q w VQ1100 VQ1101 2(B) (A)4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2