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Selection Example: Inlet air pressure 0.5 MPa Selected model IDG30A For the IDG30A 45 L/min [ANR] Model selected IDG50HA For the IDG50HA 38 L/min [ANR] IDG60 For the IDG60 94 L/min [ANR] IDG30A-03B IDG30AM4-03D INDEX 110 Series IDGA/IDG Reduced purge IDGA Series Made to Order 1 Please contact SMC for further details about dimensions, specifications and delivery.

VQ7-6/7-8

fitting 6 (left side) One-touch fitting 8 (left side) One-touch fitting 10 (left side) Mixed 02R 03R 02L 03L 02Y 03Y C6R C8R C10R C6L C8L C10L 1 (P), 3 (R2), 5 (R1) port piping connection Rc1/4 (bottom) Rc1/4 (top) Rc1/4 (both sides) Rc3/8 (bottom) Rc3/8 (top) Rc3/8 (both sides) One-touch fitting 12 (bottom) One-touch fitting 12 (top) One-touch fitting 12 (both sides) Mixed 02D 02U 02B 03D

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C8 (A, B port) D side Bottom ported: VV5FR2-01TStation 2Port size C6, C8 Light/Surge voltage suppressor (At FZ) 2-Rc 1/8 (PE port) 2-G 3/4 (Electrical entry) C6: Max. 6 C8: Max. 6.5 6-Rc 1/4 (P, EA, EB port) With terminal block (One-piece junction cover): VV5FR2-01T1Station 1Port size U side 5n-Rc 1/8 (Pitch) P = 28 Stations 2n-Rc 1/8, 1/4 C6, C8 (A, B port) D side Bottom ported: VV5FR2-

1

-50P2-05B-C6.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Symbol Port size Applicable series C4 C6 M C4 C6 C8 M 02 2 stations Single wiring spec.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

-5LOU-C6 2 sets (Double solenoid part no.)

SY

C4 C6 C8 SY5000: SS5Y5-45Stations DRSC4 C6 C8 SS5Y5-45Stations DRC4 C6 C8 Note) Dimensions L1 to L4 are the same as SS5Y5-45Stations (pages starting with 103).

VQ7-6/7-8

Blanking plate (Filter, Regulator) Blanking plate (Pressure switch) Number of manifold blocks required for mounting (stations) 2 2 2 2 2 2 2 1 Manifold Specifications Porting specifications Manifold block size Applicable solenoid valve Weight (kg) Stations 1(P), 3(R2) 5(R1) port size 2(B), 4(A) port Port location Port size 1/4 3/8 C6 (6) C8 (8) C10 (10) Right, Left Note) 1/4 3/8 C12 (12)

Intrinsically Safe Valve

The safety barrier must meet the specifications listed in the Installation Instructions section. 14 Series 53-SY5000/7000 Manifold Specifications 53-SS5Y5-20 53-SS5Y7-20 Model 53-SY520 53-SY720 Applicable valve Manifold type Single base B mount P (SUP)/R (EXH) Common SUP/EXH Valve stations 2 to 20 stations Note 1) A, B port location Valve 1/4 P, EA, EB port 1/8 C4 (4 One-touch fitting) C6

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Note 3) Refer to page 6 for DIN rail weight. 1 Cassette Type Manifold Series SY3000/5000/7000 How to Order Valves SY 3 1 60 5 L C6 Series 3 5 7 Symbol M5 C4 C6 01 C4 C6 C8 02 C8 C10 SY3000 SY5000 SY7000 A, B port size Port size M5 x 0.8 4 One-touch fitting 6 One-touch fitting Rc(PT)1/8 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting Rc(PT)1/4 8 One-touch fitting 10 One-touch

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Side 1/4 1/4 1,3,5 (P,EA,EB) Port 1/8 C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) 1/4 Port size 1/4 C6 (One-touch fitting for 6) 4,2 (A,B) Port C10 (One-touch fitting for 10) C8 (One-touch fitting for 8) Manifold base weight W (g) n: Station W = 61n + 101 W = 79n + 127 W = 100n + 151 Note 1) For more than 10 stations (more than 5 stations in case of SS5Y7), supply pressure to

Model: 10S (Side Ported), SI Unit Specification: DB (EtherCAT - 16 Outputs - Connector M12), SI Unit Ouput Polarity: N (Negative Common, PNP), Valve Stations: 3 Stations, P,E Port Entry: D (D Side, 2 to 10 Stations), SUP/EXH Block: Internal Pilot, A,B Port Size: C8 (ø8 One-touch Fitting, Straight, Metric)

Model: Side Ported, SI Unit Specification: EtherCAT - 16 Outputs - Connector M12, SI Unit Ouput Polarity: Negative Common, PNP, Valve Stations: 3 Stations, P,E Port Entry: D Side, 2 to 10 Stations, SUP/EXH Block: Internal Pilot, A,B Port Size: ø8 One-touch Fitting, Straight, Metric, Mounting: -, DIN Rail Option: -

Model: 10S (Side Ported), SI Unit Specification: DB (EtherCAT - 16 Outputs - Connector M12), SI Unit Ouput Polarity: N (Negative Common, PNP), Valve Stations: 6 Stations, P,E Port Entry: B (Both Sides, 2 to 16 Stations), SUP/EXH Block: Internal Pilot, A,B Port Size: C6 (ø6 One-touch Fitting, Straight, Metric)

Model: Side Ported, SI Unit Specification: EtherCAT - 16 Outputs - Connector M12, SI Unit Ouput Polarity: Negative Common, PNP, Valve Stations: 6 Stations, P,E Port Entry: Both Sides, 2 to 16 Stations, SUP/EXH Block: Internal Pilot, A,B Port Size: ø6 One-touch Fitting, Straight, Metric, Mounting: -, DIN Rail Option: -

Model: 10S (Side Ported), SI Unit Specification: DB (EtherCAT - 16 Outputs - Connector M12), SI Unit Ouput Polarity: N (Negative Common, PNP), Valve Stations: 6 Stations, P,E Port Entry: B (Both Sides, 2 to 16 Stations), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: C6 (ø6 One-touch Fitting, Straight, Metric)

Model: 10 (Side Ported), Connector Type: F (D-sub Connector, IP40, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 3 Stations, P,E Port Location: D (D Side, 2 to 10 Stations), SUP/EXH Block: Internal Pilot, A,B Port Size: C6 (ø6 One-touch Fitting)

Model: Side Ported, Connector Type: D-sub Connector, IP40, 25 Pins, Connector Entry Direction: Upward, Valve Stations: 3 Stations, P,E Port Location: D Side, 2 to 10 Stations, SUP/EXH Block: Internal Pilot, A,B Port Size: ø6 One-touch Fitting, Mounting: -, DIN Rail Option: -