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5 Port Solenoid Valve Series SY3000/5000/7000/9000

-H-M5(-F2) G 22.5 (A, B port) M5 x 0.8 28.5[35.5] 28.5[35.5] 2 23.5 25 18.5 P 16.9 (15) EA EB M5 x 0.8 (P, EA, EB port) (For manifold gasket positioning) 2-1.5 die-cast hole 19 22.5 L plug connector (L): 10-SY3120-L-C6,N7(-F2) 1 1 C4,N3 M plug connector (M): 10-SY3120-M-C6,N7(-F2) C4,N3 M8 connector (WO): 10-SY3120-WO-C6,N7(-F2) C4,N3 1 28.5[35.5] 13.1 Approx. 300 (Lead wire length) 33 M8

SY

(-F2) With foot bracket SY3120-F1 Scale: 40% G H G H C4 C6 C4 C6 Type 20 Type 23 Type 20P Type 23P Type 41 Type 42 Type 43 Type 41P Type 42P Type 43P Type 45 3 port valve Air operated G H SY3120-M5 C4 C6 C4 C6 M type plug connector (M): SY3120-ML type plug connector (L): SY3120-LGrommet .

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

-M5(-F2) G H 22.5 28.5 [35.5] (A, B port) M5 x 0.8 28.5 [35.5] 2 18.5 23.5 25 P 16.9 (15) EA EB M5 x 0.8 (P, EA, EB port) For manifold gasket positioning 2 x 1.5 die-cast hole 19 22.5 L plug connector (L): 10-SY3120-L(-F2) M plug connector (M): 10-SY3120-M(-F2) C4, N3 C6, N7 M8 connector (WO): 10-SY3120-WO(-F2) C4, N3 C6, N7 C4, N3 C6, N7 28.5 [35.5] 13.1 (Lead wire length) 33 Approx. 300

5 Port Solenoid Valve SY Series

35) (27) (For mounting) 23.2 (3.2) (Light/surge voltage suppressor) C6:33.6 N7:37.4 7.5 (3.2) N7: 37.4 C6: 33.6 (35.5) (32) + 25 18.5 10 0.8 16.9 13.1 SY3120-M5(-F2) G H 22.5 28.5 [35.5] A, B port M5 x 0.8 28.5 [35.5] 2 23.5 25 18.5 P 16.9 (15) EA EB M5 x 0.8 (P, EA, EB port) For manifold gasket positioning 21.5 die-cast hole 19 22.5 L plug connector (L): SY3120-L(-F ) M plug connector (M

2

AS-FS 7.2 5 AS12l1FG-U10/32-01A AS12l1FG-M5-03A 5/32" 8.2 AS12l1FG-U10/32-03A AS12l1FG-M5-07A 1/4" 11.2 18.6 23.1 16.5 6 AS12l1FG-U10/32-07A 17.2 21.7 16.9 M5 x 0.8 10/32UNF 8 9.4 26.5 25.4 23.5 22.4 13.3 Note 1) Reference dimensions Note 2) Reference dimensions of threads after installation INDEX 478 Series AS-FG For M5, 10-32UNF Dimensions/ Universal type Seal method: Gasket seal For M5

CRB2/CRBU2/CRB1

(Example) For M4: L2 = 8mm Applicable shaft types: S, Y L2 + (3 x P) L1 + (3 x P) Y axis S axis Q1 = M (mm) (mm) Q1 Q2 Shaft type Shaft type L1 = S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 M3, M4, M5 L2 = 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6 M4, M5, M6, M8 M4, M5, M6 Q2 = M 100 100 M5, M6, M8 M5, M6, M8, M10 M5, M6, M8 Symbol: A33 Symbol

High Vacuum Angle Valve

Rc1/8 XLAV M5: Port 1(P), 3(R) Rc1/8: Port 1(P), M5: Port 3(R) Weight [kg] XLA 0.28 0.47 1.1 1.7 3.1 5.1 XLAV 0.33 0.52 1.2 1.8 3.2 5.2 *1 Conductance is the value for the elbow with the same dimensions.

Aluminum High Vacuum Angle Valve

Rc1/8 Pilot port size XLAV M5: Port 1(P), Port 3(R) Rc1/8: Port 1(P), M5: Port 3(R) XLA 0.25 0.45 1.1 1.6 2.9 5.0 10.6 18.5 Weight (kg) XLAV 0.29 0.49 1.14 1.64 2.96 5.06 10.7 18.6 Note 1) Conductance is the value for an elbow with the same dimensions.

Table of Contents

IN OUT 9 24 140 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 97 8.5 115 118 Purge air for dehumidification 5 M5 x 0.8 Drain Drain (Maintenance space 100 mm or more) 5.5 M5 x 0.8 With fittings for purge air discharge (Option: P) Purge air discharge tubing port for

IDG

IN OUT 9 24 140 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 97 8.5 115 118 Purge air for dehumidification 5 M5 x 0.8 Drain Drain (Maintenance space 100 mm or more) 5.5 M5 x 0.8 With fittings for purge air discharge (Option: P) Purge air discharge tubing port for

Series IDG

Note IDG3, 3H 1 2 3 4 5 6 Aluminum alloy Platinum silver coating (IDG1 is electroless nickel plated) Body Copper alloy Electroless nickel plated Female connector Copper alloy Strainer Copper alloy Case Stainless steel Resin IDG3H is resin Orifice Resin Copper alloy Silencer Part number Replacement parts Description Note No.

HRX-OM-Q026

HRSH Series 5.7 Run Timer and Stop Timer Function 5-15 HRX-OM-Q026 Chapter 5 Display and Setting of Various Functions Timer setting examples Run timer Set to start 3 hours later Now 1H 2H 3H 4H 5H 6H 7H 8H Stopped Operating Starts operating Stop timer Set to stop 3 hours later Now 1H 2H 3H 4H 5H 6H 7H 8H Operating Stopped Stops operating Run timer + Now 1H 2H 3H 4H 5H 6H 7H 8H Stop timer

HRX-OM-S004

HRS Series 5.7Run timer, stop timer function 5-15 HRX-OM-S004 Chapter 5 Display and setting of various functions Timer setting example Run timer Set to start after 3hours Now 1H 2H 3H 4H 5H 6H 7H 8H Stopped Operating Operating Stop timer Set to stop after 3 hours Now 1H 2H 3H 4H 5H 6H 7H 8H Operating Stopped Stopped Run timer+ Now 1H 2H 3H 4H 5H 6H 7H 8H Stop timer Set to start after 2

HRX-OM-W032

HRS Series 5.7 Run Timer and Stop Timer Function 5-15 HRX-OM-W032 Chapter 5 Display and Setting of Various Functions Timer setting examples Run timer Set to start 3 hours later Now 1H 2H 3H 4H 5H 6H 7H 8H Stopped Operating Starts operating Stop timer Set to stop 3 hours later Now 1H 2H 3H 4H 5H 6H 7H 8H Operating Stopped Stops operating Run timer + Now 1H 2H 3H 4H 5H 6H 7H 8H Stop timer