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Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

L2 L1 Manual override (Non-locking) VT VP 55.5 [62] 43.1 36.5 25.5 49 VG A A 19 9.5 VP 21 (Pitch) n-Rc (PT)1/8 P=17 21 (A port) VQ A A 19 9.5 18.5 VQZ (Pitch) n-M5 X 0.8 P=16 21 (A port) VZ [ ] for AC Other dimensions are the same as the M5.

V100

x 0.8 P port M5 x 0.8 VG Note) SY113(A) and SY123(A) cannot be mounted on the same manifold.

SYJ300/500/700

VT Specifications VP Base mounted (SYJ314R, SYJ324R) Applicable model VG Main pressure 100 kPa to 0.7 Operating pressure range MPa 0.15 to 0.7 External pilot pressure VP S070 VQ VKF P, R port M5 x 0.8 VQZ VZ A port M5 x 0.8 X port (External pilot) M5 x 0.8 VS VFN Note 1) For manifold base, refer to page 4-4-10.

Vacuum System Peripherals:

Air operated Nil M6 x 1 (Option) M5 x 0.8 PV/V port size Applicable to only plug connector.

4/5 Port Solenoid Valve

x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 10-SS5YJ3-32-M5 10-SS5YJ3-32-C4 10-SYJ333 1/8 10-SS5YJ3-S32-M5 10-SS5YJ3-S32-C4 Base mounted for internal pilot 10-SS5YJ3-41-M5 10-SS5YJ3-41-C4 10-SYJ343 1/8 10-SS5YJ3-S41-M5 10-SS5YJ3-S41-C4 10-SS5YJ3-46-M5 1/8 M5 x 0.8 10-SS5YJ3-46-C4 10-SYJ343 10-SS5YJ3-S46-M5 10-SS5YJ3-S46-C4 Note) Value at manifold base mounted, 2

SYJ3000/5000/7000

SS5YJ3-32-M5 0.25 0.25 0.25 0.24 0.32 0.32 0.33 0.32 0.20 0.21 0.20 0.22 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 0.19 0.18 0.26 0.21 0.25 0.28 0.29 0.27 0.25 0.27 0.25 0.34 0.060 0.059 0.060 0.057 0.081 0.079 0.082 0.079 0.048 0.050 0.048 0.057 0.32 0.30 0.29 0.27 0.33 0.35 0.34 0.34 0.10 0.21 0.19 0.10 0.25 0.27 0.15 0.18 0.19 0.24 0.17 0.24 0.12 0.13 0.16

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

x 0.5 0.9 Type SS5YJ3-32-M5 0.25 0.25 0.25 0.24 0.32 0.32 0.33 0.32 0.20 0.21 0.20 0.22 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 0.19 0.18 0.26 0.21 0.25 0.28 0.29 0.27 0.25 0.27 0.25 0.34 0.060 0.059 0.060 0.057 0.081 0.079 0.082 0.079 0.048 0.050 0.048 0.057 0.32 0.30 0.29 0.27 0.33 0.35 0.34 0.34 0.10 0.21 0.19 0.10 0.25 0.27 0.15 0.18 0.19 0.24 0.17 0.24

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

-32-C4 SYJ33 1/8 SS5YJ3-S32-M5 SS5YJ3-S32-C4 SS5YJ3-41-M5 Base mounted for internal pilot SS5YJ3-41-C4 SYJ34 1/8 SS5YJ3-S41-M5 SS5YJ3-S41-C4 SS5YJ3-46-M5 SS5YJ3-46-C4 1/8 M5 x 0.8 SYJ34 SS5YJ3-S46-M5 SS5YJ3-S46-C4 Note) Value at manifold base mounted, 2 position single operating How to Order Manifold (Example) Instruct by specifying the valves and blanking plate assembly to be mounted on

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

48(22) 2 Position single Base mounted type SYJA3240-M5 51(25) 2 Position double 1.8 (0.1) SYJA3340-M5 M5 0.8 M3 0.5 3 Position closed center 54 (28) SYJA3440-M5 3 Position exhaust center SYJA3540-M5 3 Position pressure center SYJA3130 22 4 Port base mounted type (For manifold) 2 Position single SYJA3230 25 2 Position double Note1) Note1) M3 0.5 M5 0.8 1.2 (0.067) M3 0.5 SYJA3330 3 Position

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

X Port size) Sysytem Figure Silencer System Solenoid valve Speed controller 4 X M5 6 X M5 6 X 1/8 6 X M5 AS1301F-M5-04 A SYJ3000 M5 X 0.8 (S = 1.8mm2) AS1301F-M5-06 B q AN120-M5 (S=5mm2) AS2301F-01-06 C 6 X M5 AS2001F-06 D w 1.2-9 Series SYJ3000 How to Order Bracket Light and surge voltage suppressor Configuration S Z R U Without light and surge suppressor With surge suppressor With light

High Vacuum Angle Valve

Rc1/8 XLAV M5: Port 1(P), 3(R) Rc1/8: Port 1(P), M5: Port 3(R) Weight [kg] XLA 0.28 0.47 1.1 1.7 3.1 5.1 XLAV 0.33 0.52 1.2 1.8 3.2 5.2 *1 Conductance is the value for the elbow with the same dimensions.

Aluminum High Vacuum Angle Valve

Model Initial exhaust valve Main exhaust valve Example XLDV-25 V114-1GS XLDV-40/50/63/80/100/160 V114 SYJ314 V114 SYJ314-1GS For details, consult your SMC sales representative.

XL

(10-32 nominal) Rc(PT) 1/8 XLA Actuation port size M5 (10-32 nominal) Ports P, R1/R2 Rc(PT) 1/8(Port P): M5(10-32 nominal) Ports R1/R2 XLAV 0.05 0.06 0.09 0.11 0.3 0.35 Actuating solenoid valve recommended Cv factor (XLC) Service life (Million cycles) 2 0.25 (0.55) 0.46 (1.01) 1.1 (2.43) 1.6 (3.52) 2.9 (6.39) 5.0 (11.02) XLA Weight kg (lb) XLAV 0.29 (0.64) 0.49 (1.08) 1.14 (2.51) 1.64 (3.61

High Vacuum Angle Valve, XL Series

(10-32 nominal) Rc(PT) 1/8 XLA Actuation port size M5 (10-32 nominal) Ports P, R1/R2 Rc(PT) 1/8(Port P): M5(10-32 nominal) Ports R1/R2 XLAV 0.05 0.06 0.09 0.11 0.3 0.35 Actuating solenoid valve recommended Cv factor (XLC) Service life (Million cycles) 2 0.25 (0.55) 0.46 (1.01) 1.1 (2.43) 1.6 (3.52) 2.9 (6.39) 5.0 (11.02) XLA Weight kg (lb) XLAV 0.29 (0.64) 0.49 (1.08) 1.14 (2.51) 1.64 (3.61

Process Pump

We recommend that the inner package should be opened inside a clean room or clean environment. 10 Series PB Related Products 1 3 Port Solenoid Valve SYJ314/514 /714 Specifications SYJ314 SYJ514 SYJ714 Model Piping Valve construction Type of actuation Maximum operating pressure Minimum operating pressure Base mounted Rubber seal N.C. 0.7 MPa 0.15 MPa 1.2 0.41 0.32 1.1 0.46 0.32 C[dm3/(sbar