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Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

VK SYJ514 N.C. Base mounted (With sub-plate) 57 (Without sub-plate 43) 59 (Without sub-plate 45) Rc(PT)1/8 4.5 (0.25) SYJ524 N.O. VZ Note 1) At DC. When AC is used, add 1g.

Multistage Ejector Series ZL112.212

Ejector Series ZL112 Ejector Specifications Standard ZL112 Model Nozzle diameter 1.2 mm 100 l/min (ANR) 63 l/min (ANR) 84 kPa 0.7 MPa 0.2 to 0.5 MPa 0.4 MPa 5 to 50C Maximum suction flow rate Air consumption Maximum vacuum pressure Maximum operating pressure Supply pressure range ZA Standard supply pressure ZX Operating temperature range With valve ZR Supply/Release Valve Specifications ZM SYJ514

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

Order Made Made to Order (For details, refer to pages 57 through 58.) 15 Series SYJ500 Flow Characteristics/Weight C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 1R2 (PRA) 2R3 (ARR) Valve model Flow characteristics Weight (g) Note) Type of actuation Port size Grommet L/M plug connector DIN terminal M8 connector SYJ512 SYJ522 SYJ514 SYJ524 N.C. 0.53 0.66 1.2 1.3 Body ported 0.12 0.18 0.32 0.34

70pvpump

Specifications 3 port solenoid valve SYJ514/714 SYJ514 SYJ714 Model Piping Valve construction Type of actuation Max.operating pressure Min.operating pressure Effective area (Cv factor) Base mounted Rubber seal Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Table of Contents

4 SYJ514 With valve Supply valve (N.C.) !5 SYJ514 With valve Release valve (N.C.) !

Multistage Ejector Series ZL112/212 1

4 SYJ514 With valve Supply valve (N.C.) !5 SYJ514 With valve Release valve (N.C.) !

Multistage Ejector (N)ZL Series

SYJ514 With valve 15 Release valve (N.C.)

Multistage Ejector Series ZL

With valve SYJ514 15 Release valve (N.C.)

V100

Made to Order Specifications (For details, refer to pages 4-4-54 to 55.) 4-4-18 19 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ500 Flow Characteristics/Weight C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 1 2 (P A) 2 3 (A R) Valve model Flow characteristics Weight (g) Note) Type of actuation Port size Grommet L/M plug connector DIN terminal M8 connector SYJ512 SYJ522 SYJ514

SYJ300/500/700

Made to Order Specifications (For details, refer to pages 4-4-54 to 55.) 4-4-18 19 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ500 Flow Characteristics/Weight C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 1 2 (P A) 2 3 (A R) Valve model Flow characteristics Weight (g) Note) Type of actuation Port size Grommet L/M plug connector DIN terminal M8 connector SYJ512 SYJ522 SYJ514

Vacuum System Peripherals:

vacuum Compact size:Width 10 mm (SY100, SYJ300) Width 15 mm (SYJ500) Width 18 mm (SYJ700) Low power consumption 0.5 W Solenoid valve Port size Effective area (mm2) (Cv) Flow characteristics C (dm3/(sbar)) Piping specifications SYJ312/322 M3 x 0.5 0.9 Body ported SYJ512/522 M5 x 6.8 0.53 SYJ712/722 1 8 2.8 SY114/124(A) M3 x 0.5 0.14 SYJ314/324 0.41 1.8 M5 x 0.8 Base mounted (With sub-plate) SYJ514

Process Pump

We recommend that the inner package should be opened inside a clean room or clean environment. 10 Series PB Related Products 1 3 Port Solenoid Valve SYJ314/514 /714 Specifications SYJ314 SYJ514 SYJ714 Model Piping Valve construction Type of actuation Maximum operating pressure Minimum operating pressure Base mounted Rubber seal N.C. 0.7 MPa 0.15 MPa 1.2 0.41 0.32 1.1 0.46 0.32 C[dm3/(sbar

3 Port Solenoid Valve SYJ300/500/700 Series

SYJ514 N.C. Base mounted type (With sub-plate) 57 (Without sub-plate 43) 59 (Without sub-plate 45) 1/8 NPTF 4.5 (0.25) SYJ524 N.O.

Function: 1 (2 Position Single), Piping: 4 (Base Mounted), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 3 (110VAC 50/60HZ), Lead Wire: LO (L Plug w/o Connector), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: D (Push-turn Locking Slotted Style)

Function: 1 (2 Position Single), Piping: 4 (Base Mounted), Exhaust: 3 (Common), Specifications: Standard, Voltage: 3 (110VAC 50/60HZ), Lead Wire: LO (L Plug w/o Connector), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: D (Push-turn Locking Slotted Style)

Function: 4 (3 Position Exhaust Center), Piping: 4 (Base Mounted), Exhaust: 3 (Common), Specifications: Standard, Voltage: 3 (110VAC 50/60HZ), Lead Wire: LO (L Plug w/o Connector), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: D (Push-turn Locking Slotted Style)

Type of Actuation: 1 (2 Position Single), Manifold Type: 40 (Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base), Pilot: Internal Pilot, Specifications: Standard, Voltage: 3 (110VAC 50/60HZ), Electrical Entry: LO (L Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: D (Push-turn Locking Slotted Style)