Table of Contents

4 SYJ514 With valve Supply valve (N.C.) !5 SYJ514 With valve Release valve (N.C.) !

Multistage Ejector Series ZL112/212 1

4 SYJ514 With valve Supply valve (N.C.) !5 SYJ514 With valve Release valve (N.C.) !

Multistage Ejector (N)ZL Series

SYJ514 With valve 15 Release valve (N.C.)

Multistage Ejector Series ZL

With valve SYJ514 15 Release valve (N.C.)

SYJ300/500/700

Made to Order Specifications (For details, refer to pages 4-4-54 to 55.) 4-4-18 19 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ500 Flow Characteristics/Weight C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 1 2 (P A) 2 3 (A R) Valve model Flow characteristics Weight (g) Note) Type of actuation Port size Grommet L/M plug connector DIN terminal M8 connector SYJ512 SYJ522 SYJ514

Vacuum System Peripherals:

vacuum Compact size:Width 10 mm (SY100, SYJ300) Width 15 mm (SYJ500) Width 18 mm (SYJ700) Low power consumption 0.5 W Solenoid valve Port size Effective area (mm2) (Cv) Flow characteristics C (dm3/(sbar)) Piping specifications SYJ312/322 M3 x 0.5 0.9 Body ported SYJ512/522 M5 x 6.8 0.53 SYJ712/722 1 8 2.8 SY114/124(A) M3 x 0.5 0.14 SYJ314/324 0.41 1.8 M5 x 0.8 Base mounted (With sub-plate) SYJ514

Process Pump

We recommend that the inner package should be opened inside a clean room or clean environment. 10 Series PB Related Products 1 3 Port Solenoid Valve SYJ314/514 /714 Specifications SYJ314 SYJ514 SYJ714 Model Piping Valve construction Type of actuation Maximum operating pressure Minimum operating pressure Base mounted Rubber seal N.C. 0.7 MPa 0.15 MPa 1.2 0.41 0.32 1.1 0.46 0.32 C[dm3/(sbar

3 Port Solenoid Valve SYJ300/500/700 Series

SYJ514 N.C. Base mounted type (With sub-plate) 57 (Without sub-plate 43) 59 (Without sub-plate 45) 1/8 NPTF 4.5 (0.25) SYJ524 N.O.

2

Applicable model KQ02-P01NJ KQ2E02-00NJ KQ23-P01NJ KQ2E23-00NJ KQ04-P01NJ KQ2E04-00NJ KQ06-P01NJ KQ2E06-00NJ KQ04-P01N KQ2E23-00N, KQ2E04-00N, KQ2E23-02N KQ2E04-01N, KQ2E04-02N, KQ2LE04-00N KQ06-P01N KQ2E06-00N, KQ2E06-01N, KQ2E06-02N KQ2E06-03N, KQ2LE06-00N Pipe nut KQ08-P01N KQ2E08-00N, KQ2E08-01N, KQ2E08-02N KQ2E08-03N, KQ2LE08-00N KQ10-P01N KQ2E10-00N, KQ2E10-02N, KQ2E10-03N KQ2LE10-00N

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 3 (110VAC 50/60HZ), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: D (Push-turn Locking Slotted Style), A, B Port Size: 01 (Body Ported 1/8)

Type of Actuation: 2 Position Single, Manifold Type: Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base, Pilot: Internal Pilot, Specifications: Standard, Voltage: 110VAC 50/60HZ, Electrical Entry: L Plug Connector w/Lead Wire 0.3m, Lead Wire Length: None, Surge Suppressor: Light & Surge Suppressor, Manual Override: Push-turn Locking Slotted Style, A, B Port Size: Base Mounted

Type of Actuation: 2 Position Single, Manifold Type: Body Ported Plug-in Integrated, Pilot: Internal Pilot, Specifications: Standard, Voltage: 110VAC 50/60HZ, Electrical Entry: L Plug Connector w/Lead Wire 0.3m, Lead Wire Length: None, Surge Suppressor: Light & Surge Suppressor, Manual Override: Push-turn Locking Slotted Style, A, B Port Size: Body Ported 1/8, Thread: NPT, Option: -

Type of Actuation: 1 (2 Position Single), Manifold Type: 40 (Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base), Pilot: Internal Pilot, Specifications: Standard, Voltage: 3 (110VAC 50/60HZ), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: D (Push-turn Locking Slotted Style)

3 Port Solenoid Valve Series VQ100 1

Plug lead unit manifold 2 08 01N VV3Q1 Plug-in unit manifold VV3Q12-051 set Manifold base part no. VQ110-5L 4 set Valve part no. (1st to 4th stations) VVQ100-10A-2 1 set Blanking plate part no. (5th stations) Applicable solenoid valve (Plug lead type) VQ10-L VQ10-M VQ10-G 1 VQ100 Series Prefix the asterisk to the part nos. of the solenoid valve, etc.

VQ

Stations Stasions 3 2 1 Dside Uside 02 2 stations VVQ1000-10A-2 20 20 stations Port size and thread 01N 01T 01F M5, Rc(PT)1/8 NPT1/8 NPTF1/8 G(PF)1/8 Only thread port size 1/8 style (2U type, P/E port) has choice of thread.

3 Port Solenoid Valve Series VQ100

Stations U side D side 2 stations 02 VVQ1000-10A-2 Stations4321 20 stations 20 Port size and thread M5, Rc 1/8 NPT 1/8 NPTF 1/8 PF 1/8 Nil 01N 01T 01F Only thread port size 1/8 type, (Type 2U, P/E port) has choice of thread.

3 Port Solenoid Valve Series VQ100 1

Stations U side D side 2 stations 02 VVQ1000-10A-2 Stations4321 20 stations 20 Port size and thread M5, Rc 1/8 NPT 1/8 NPTF 1/8 PF 1/8 Nil 01N 01T 01F Only thread port size 1/8 type, (Type 2U, P/E port) has choice of thread.

The SYJ Valve is an innovative combination of space efficiency and performance superiority which provides real value to the design solution. Whether designed in a manifold or used as a single valve, this small profile increases design flexibility and minimizes space requirements. The SYJ valve utilizes a low power (0.5 watts standard) pilot solenoid design, which dramatically reduces thermal

Function: Normally Closed, Piping: Base Mounted, Body Option: Individual EXH, Specifications: Standard, Voltage: 24VDC, Lead Wire: L Plug Connector w/Lead Wire 0.3m, Surge Suppressor: None, Manual Override: Non-locking Push Style, Port Size: Base Mounted w/Sub-plate 1/8, Thread: NPT, Bracket: -, CE-Compliant: -, Cable length: -

Function: Normally Closed, Piping: Base Mounted, Body Option: Individual EXH, Specifications: Standard, Voltage: 110VAC 50/60HZ, Lead Wire: Grommet Lead Wire 0.3m, Surge Suppressor: None, Manual Override: Non-locking Push Style, Port Size: Base Mounted w/Sub-plate 1/8, Thread: NPT, Bracket: -, CE-Compliant: -, Cable length: -