Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

Order Made Made to Order (For details, refer to pages 57 through 58.) 15 Series SYJ500 Flow Characteristics/Weight C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 1R2 (PRA) 2R3 (ARR) Valve model Flow characteristics Weight (g) Note) Type of actuation Port size Grommet L/M plug connector DIN terminal M8 connector SYJ512 SYJ522 SYJ514 SYJ524 N.C. 0.53 0.66 1.2 1.3 Body ported 0.12 0.18 0.32 0.34

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

VK SYJ514 N.C. Base mounted (With sub-plate) 57 (Without sub-plate 43) 59 (Without sub-plate 45) Rc(PT)1/8 4.5 (0.25) SYJ524 N.O. VZ Note 1) At DC. When AC is used, add 1g.

70pvpump

Specifications 3 port solenoid valve SYJ514/714 SYJ514 SYJ714 Model Piping Valve construction Type of actuation Max.operating pressure Min.operating pressure Effective area (Cv factor) Base mounted Rubber seal Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Table of Contents

4 SYJ514 With valve Supply valve (N.C.) !5 SYJ514 With valve Release valve (N.C.) !

Multistage Ejector Series ZL112/212 1

4 SYJ514 With valve Supply valve (N.C.) !5 SYJ514 With valve Release valve (N.C.) !

V100

Made to Order Specifications (For details, refer to pages 4-4-54 to 55.) 4-4-18 19 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ500 Flow Characteristics/Weight C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 1 2 (P A) 2 3 (A R) Valve model Flow characteristics Weight (g) Note) Type of actuation Port size Grommet L/M plug connector DIN terminal M8 connector SYJ512 SYJ522 SYJ514

SYJ300/500/700

Made to Order Specifications (For details, refer to pages 4-4-54 to 55.) 4-4-18 19 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ500 Flow Characteristics/Weight C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 1 2 (P A) 2 3 (A R) Valve model Flow characteristics Weight (g) Note) Type of actuation Port size Grommet L/M plug connector DIN terminal M8 connector SYJ512 SYJ522 SYJ514

3 Port Solenoid Valve SYJ300/500/700 Series

SYJ514 N.C. Base mounted type (With sub-plate) 57 (Without sub-plate 43) 59 (Without sub-plate 45) 1/8 NPTF 4.5 (0.25) SYJ524 N.O.

Process Pump

We recommend that the inner package should be opened inside a clean room or clean environment. 10 Series PB Related Products 1 3 Port Solenoid Valve SYJ314/514 /714 Specifications SYJ314 SYJ514 SYJ714 Model Piping Valve construction Type of actuation Maximum operating pressure Minimum operating pressure Base mounted Rubber seal N.C. 0.7 MPa 0.15 MPa 1.2 0.41 0.32 1.1 0.46 0.32 C[dm3/(sbar

Vacuum System Peripherals:

vacuum Compact size:Width 10 mm (SY100, SYJ300) Width 15 mm (SYJ500) Width 18 mm (SYJ700) Low power consumption 0.5 W Solenoid valve Port size Effective area (mm2) (Cv) Flow characteristics C (dm3/(sbar)) Piping specifications SYJ312/322 M3 x 0.5 0.9 Body ported SYJ512/522 M5 x 6.8 0.53 SYJ712/722 1 8 2.8 SY114/124(A) M3 x 0.5 0.14 SYJ314/324 0.41 1.8 M5 x 0.8 Base mounted (With sub-plate) SYJ514

Proposals for Energy Saving

Pressure Primary pressure normal Primary pressure drop Primary pressure increase Set values P1 P2 Time ON Switch output 1, 2 OFF Time [ ] 5ms or more 10ms or less Switch output response time when auto shift is input.

•

ZS-22-B Response frequency 200Hz 200Hz 200Hz 200Hz 200Hz 200Hz (5ms) (5ms) (5ms) (Sms) (Sms) (5ms) (With two M4 mounting thread) Noj. l) Hysteresis Adjustable AdjlJSlable A~uslable Adjustable A~US1ab' A~lJstabte mode m;1 Cf rm: (}i jl t(rml t~,~I~IIm] Cldj.t;,' II"mI l~j~Cf nn'e:, 1: &ij. orm::fe,1 Hysl21 esls Wmdow Fixed Fi xed Fixed Fixed Fixed Fixed co6:rearator m e (3digit) (3digit)

LEC-OM02704CN

(RD)((2)) (RY(n1)ARY(n3)A) (2) (RYn0) ON(RYn0) (22.5s) OFF ON ON(RYn0) (RY(n 1)A RY(n3)A) RD OFF ON 10ms 10ms 95ms (RYn0) OFF ON 95ms (RY(n1)A RY(n3)A) ON OFF 10ms 5ms 10ms 5ms 5ms 10ms OFF ON (RD) 4 8 4 (3) EMGEMG (E6) (EMG) (RYn1)(RYn2) RYn1RYn2 DC24V DICOM () DOCOM EMG .4.8.3 4 9 4 4.3.3 CNP1CNP2CNP3 13.913.1 CNP1CNP2CNP3 (1) LECSC(A) () CNP1 CNP1 54928-0670(Molex) 54928

CEx-OMI0064

4 ) ,20 20 (31 ) 5 ,,31 ( ,No.) ,(),S.STOP , (RS-232C BCD ) ,,RS-232CBCD (,,, ,) (/) RS-232C RS-232C ,PLC(RS-232C )CEU5 BCD (CEU5*B-*) BCD PLC , 6 - 4 CEU5 CEU5-D CEU5P CEU5P-D CEU5B CEU5B-D CEU5PB CEU5PB-D (DIN ) ,, LCD() 6 (),(/) 2ROM(80 ,:E2FUL)} {} {E ,() 90/UPDOWN (*1) 100kHz (*2) GND (COM DC12/24V ) DC12/24V (COM GND ) DC 12V10 %,60mA , , BCD //(100ms) 5 / 5ms

CE

D-J51 is 5ms or less. Lead Wire Length Lead wire length designation (example) D-A73 L Lead wire length Nil L Z NNote) 0.5m 3m 5m None Note) Applies only to D C type connector switches.

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

max. 5ms max. 6.5ms max.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

: Light up when ON), Red LED (OUT2: Lights up when ON) Hysteresis mode Window comparator mode Hysteresis Note 4) Response time Output short circuit protection Display Display accuracy Indication light Analog output Auto shift input Note 2) Output voltage: 1 to 5V 5% F.S. or less Output voltage: 1 to 5V 2.5% F.S. or less Note 3) No-voltage input (solid state switch or reed switch), input 5ms

ZB-OM00301

N.C. 0.55MPa 0.1MPa 0.55MPa 0.55MPa 0.1MPa -0.1MPa 0.1MPa 0MPa 5ms 5ms 5ms ON3.5ms OFF2ms DC24 0.7W29mA2 0.7W29mA2 1W42mA 1W42mA DC12 0.7W29mA2 0.7W58mA2 1W83mA 1W42mA L M 3 10.30.4 23.1W10ms 0.7W 3/M 32 - No.ZB-OM00301 1 03M 04M 05M 06H N.C. N.C. N.C. N.C.

PSxx-OMU0005CN

ASin ooo1 C_5 5ms ASino.r1 ( ) C_5(44 ) C_5 -105.0105.0 kPa -210210.0 kPa -0.1051.050 MPa -1.1551.155 MPa 10.0-105.0 kPa -115.0115.0 kPa -41No.PS-OMU0005CN-C [F 6] 5R.D. <> [F 6] [F 6] -42No.PS-OMU0005CN-C [F10] <> [F10] 2 OUT1 OFF OUT2 [dUAL]2 () () [dUAL]2 45 () () () 45 () [F10] -43No.PS-OMU0005CN-C <> (OFF) OUT1 n_1 OUT1 OFF OUT2 OUT2 OFF n_2 [F10 ] (

F/ISE

: Light up when ON), Red LED (OUT2: Lights up when ON) Hysteresis mode Window comparator mode Hysteresis Note 4) Response time Output short circuit protection Display Display accuracy Indication light Analog output Auto shift input Note 2) Output voltage: 1 to 5V 5% F.S. or less Output voltage: 1 to 5V 2.5% F.S. or less Note 3) No-voltage input (solid state switch or reed switch), input 5ms