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Applicable model KQ02-P01NJ KQ2E02-00NJ KQ23-P01NJ KQ2E23-00NJ KQ04-P01NJ KQ2E04-00NJ KQ06-P01NJ KQ2E06-00NJ KQ04-P01N KQ2E23-00N, KQ2E04-00N, KQ2E23-02N KQ2E04-01N, KQ2E04-02N, KQ2LE04-00N KQ06-P01N KQ2E06-00N, KQ2E06-01N, KQ2E06-02N KQ2E06-03N, KQ2LE06-00N Pipe nut KQ08-P01N KQ2E08-00N, KQ2E08-01N, KQ2E08-02N KQ2E08-03N, KQ2LE08-00N KQ10-P01N KQ2E10-00N, KQ2E10-02N, KQ2E10-03N KQ2LE10-00N

Antistatic Tubing TA  Series

-4 M-5H-6 MS-5AU-4, MS-5AU-6 MS-5H-4, MS-5H-6 Black (Translucent) 500

Table of Contents

Note 3) Includes 1 l/min (ANR) of purge air flow (at 0.7 MPa inlet air pressure) for the dew point indicator (except IDG3H, 5H).

IDG

Note 3) Includes 1 l/min (ANR) of purge air flow (at 0.7 MPa inlet air pressure) for the dew point indicator (except IDG3H, 5H).

Air Fittings & Tubing

C A 11.8 12.6 1.1 1.4 3.0 3.1 MS-5ALHU-3 MS-5ALHU-4 4.5 5.0 1.6 1.8 8 8.8 10.8 2.5 14.6 2.4 3.7 MS-5ALHU-6 7.0 MS-5ALHU-6 Hose nipple: MS-5H-4, -6 Effective area (mm2) Weight (g) Part No. L B D E F 6.5 8.5 2.1 4.0 2.5 3.7 MS-5H-4 MS-5H-6 15.5 16.5 7 8 1.8 2.5 7 8 Hose elbow: MS-5HLH-4, -6 lB Effective area (mm2) Weight (g) Part No.

Table of Contents

-4/-6 Effective area (mm2) Weight (g) A B C D E H Model M-5H-4 M-5H-6 7 8 2.1 4.0 2.7 3.9 15.5 16.5 8.5 9.5 7 8 1.8 2.5 6.5 8.5 M5 x 0.8 Width across flats 7 15-2-57 5 Series M Series M5 Hose Elbow: M-5HL-4/-6 Weight (g) 4.4 5.2 Effective area (mm2) 1.4 2.4 Model F E D C B A M-5HL-4 M-5HL-6 6.5 8.5 1.8 2.5 7 8 8.5 9.5 12.5 13.5 16.5 17.5 M5 x 0.8 Hose Elbow: M-5HLH-4/-6 Width across flats

Series IDG

IDG10, 20 IDG10H, 20H Optional specifications Optional specifications With fitting for purge air discharge (Option: P) With fitting for purge air discharge (Option: P) IN OUT IN OUT Purge Purge Purge Purge Parts list Material Description IDG1 IDG5, 5H IDG10, 10H IDG20, 20H No.

CJP

Mounting dimensions of CJ-5H-6. ( ) denotes the dimensions of CJ-5H-4. Rod end nut (Refer to page 6-2-13.)

CJP

Mounting dimensions of CJ-5H-6. ( ) denotes the dimensions of CJ-5H-4. Rod end nut (Refer to page 6-2-13.)

Miniature Fittings Stainless Steel 316 MS Series Applicable Tubes: ø 3.2, ø 4, ø 6 Connection Thread: M5, R 1/8

-4/6 Weight (g) 2.5 3.7 Effective area (mm2) 2.1 4.0 Model L B D E F MS-5H-4 MS-5H-6 15.5 16.5 7 8 1.8 2.5 7 8 6.5 8.5 Width across flats B Hose Elbow: MS-5HLH-4/6 Weight (g) 4.2 6.2 Effective area (mm2) 1.4 2.5 B Model L A C D E F M N Width across flats 7 MS-5HLH-4 MS-5HLH-6 15.8 17.8 12 13.5 7 8 8.5 9.5 1.8 2.5 7 8 6.5 8.5 15 16 5.5 6 Universal Elbow: MS-5UL Universal Tee: MS-5UT Width

KJ

-4/-6 Effective area (mm2) Weight (g) A B C D E H Model M-5H-4 M-5H-6 7 8 2.1 4.0 2.7 3.9 15.5 16.5 8.5 9.5 7 8 1.8 2.5 6.5 8.5 M5 x 0.8 Width across flats 7 15-2-57 5 Series M Series M5 Hose Elbow: M-5HL-4/-6 Weight (g) 4.4 5.2 Effective area (mm2) 1.4 2.4 Model F E D C B A M-5HL-4 M-5HL-6 6.5 8.5 1.8 2.5 7 8 8.5 9.5 12.5 13.5 16.5 17.5 M5 x 0.8 Hose Elbow: M-5HLH-4/-6 Width across flats

Stainless Steel One-touch Fittings Series KG

C A MS-5ALHU-3 MS-5ALHU-4 4.5 5.0 11.8 12.6 1.1 1.4 3.0 3.1 1.6 1.8 8 8.8 10.8 2.5 14.6 2.4 3.7 MS-5ALHU-6 7.0 MS-5ALHU-6 Hose nipple: MS-5H-4, -6 Effective orifice(mm 2) Weight (g) F E Part No. L B D MS-5H-4 MS-5H-6 15.5 16.5 6.5 8.5 2.1 4.0 2.5 3.7 7 8 7 8 1.8 2.5 Hose elbow: MS-5HLH-4, -6 B Effective orifice(mm 2) Weight (g) Part No.

Series M Miniature Fittings M3, R(PT) 1/8, M5

A B Effective orifice(mm2 Weight (g) ) E H M-5H-4 M-5H-6 15.5 16.5 8.5 9.5 7 8 1.8 2.5 7 8 2.1 4.0 2.7 3.9 6.5 8.5 91 Series M Miniature Fittings M3, R(PT) 1/8, M5 Series M5 Hose elbow: M-5HL-4, -6 Part No. Effective orifice(mm2 Weight (g) ) F E D C B A M-5HL-4 M-5HL-6 6.5 8.5 1.4 2.4 4.4 5.2 1.8 2.5 7 8 8.5 9.5 12.5 13.5 16.5 17.5 Hose elbow: M-5HLH-4, -6 Part No.

KR

-4/6 Weight (g) 2.5 3.7 Effective area (mm2) 2.1 4.0 F E Model L B D MS-5H-4 MS-5H-6 15.5 16.5 6.5 8.5 7 8 7 8 1.8 2.5 M5 x 0.8 Width across flats B Hose Elbow: MS-5HLH-4/6 Weight (g) 4.2 6.2 Effective area (mm2) 1.4 2.5 Model L A lB C D E F M N Width across flats 7 MS-5HLH-4 MS-5HLH-6 15.8 17.8 12 13.5 7 8 8.5 9.5 1.8 2.5 7 8 6.5 8.5 15 16 5.5 6 M5 x 0.8 Universal Elbow: MS-5UL Universal

Cylinder

_I A';'Plicable' ~q{~ Si~~\ Model 6 5, 10,15 <1<4/71>2.5 0 CJ-5H-4 10 5, ' 0. '5 15 5, ,a,15 Series CJP Construction/ Parts List Cautions Symbol =MQ OBlow out tubing and fittings fully befOfe use. f)lnstall air filters to supply clean air. 8 Use the provided hose nipple G M5 (orifice size ~O.8: ~ CJ-5H-4, CJ-5H-6. .0./ Panel mount type OLoad on the piston rod must be kept in line with

Bernoulli Gripper

V KQ2S06-M5G1 V V V KQ2S06-01GS1 V V KQ2S08-01GS V V Hexagon socket head male connector Male connector KQG2H04-M5 V V V KQG2H06-01S V V KQG2H08-01S V V One-touch fittings/ Stainless steel 316 KQG2S04-M5 V v V V V V V KQG2S06-01S V V KQG2S08-01S V V Miniature fittings/ Stainless steel 316 Barb fitting for soft tubing MS-5AU-6 V v V V V V V Hose nipple MS-5H

1

Function 2-Hexagon socket head set screw H4 4/2.5 CJ-5H-4 With a fixed orifice (0.8) H6 6/4 CJ-5H-6 MH4 4/2.5 M-5H-4 Without fixed orifice MH6 6/4 M-5H-6 Dimensions (Dimensions other than below are the same as standard type.)