V100

Example: SS3YJ7-20-03 .1 set (Manifold base) SYJ712-5LZ-01.2 sets (Valve) SYJ700-10-1A.1 set (Blanking plate assembly) SS3YJ7-42R-03-01 .1 set (Manifold base) SYJ714R-5G. 2 sets (Valve) SYJ700-10-2A.1 set (Blanking plate assembly) The asterisk denotes the symbol for assembly.

SYJ300/500/700

Example: SS3YJ7-20-03 .1 set (Manifold base) SYJ712-5LZ-01.2 sets (Valve) SYJ700-10-1A.1 set (Blanking plate assembly) SS3YJ7-42R-03-01 .1 set (Manifold base) SYJ714R-5G. 2 sets (Valve) SYJ700-10-2A.1 set (Blanking plate assembly) The asterisk denotes the symbol for assembly.

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

(Example) SS3YJ7-20-03 . 1 set (manifold base) SYJ712-5LZ-01 . 2 sets (valve) SYJ700-10-1A . 1 set (blanking plate assembly) SS3YJ7-42R-03-01 . 1 set (manifold base) SYJ714R-5G . 2 sets (valve) SYJ700-10-2A . 1 set (blanking plate assembly) The asterisk denotes the symbol for assembly.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(Manifold base) SYJ712-5LZ-01 .2 pcs. (Valve) SYJ700-10-2A .1 pc. (Blank plate ass'y) VQZ SS3YJ7-42R-03-01 .1 pc. (Manifold base) SYJ714R-5G .2 pcs. (Valve) SYJ700-10-2A . .1 pc.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Recommended Valve PA3000 PA5000 VQZ140 (exhaust center) VQZ240 (exhaust center) Refer to page 21 for further details. 6 Series PA3000/5000 Process Pump Air Operated Type 1l/min = 0.035SCFM 1m = 3.28ft 1MPa = 145psi Performance Curves/Air Operated Type PA313 Flow rate characteristics PA513 Flow rate characteristics 50 50 Cycle 7Hz Cycle 5Hz Cycle 3Hz (no change when SUP=0.2, 0.3MPa) Cycle

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Recommended Valve PA3000 PA5000 VQZ140 (exhaust center) VQZ240 (exhaust center) Refer to page 21 for further details. 6 Series PA3000/5000 Performance Curves/Air Operated Type PA513 Flow rate characteristics PA313 Flow rate characteristics 50 50 Cycle 7Hz Cycle 5Hz Cycle 3Hz (no change when SUP=0.2, 0.3MPa) Cycle 7Hz Cycle 5Hz Cycle 3Hz (no change when SUP=0.2MPa) SUP=0.5MPa 40 40 SUP=0.5MPa

3 Port Solenoid Valve SYJ300/500/700 Series

Valve model SYJ712 N.C. Body ported type 9.0 (0.5) 72 74 1/8 NPTF SYJ722 N.O. SYJ714 1/8 NPTF N.C. Base mounted type (With sub-plate) 132 (Without sub-plate 72) 134 (Without sub-plate 74) 9.0 (0.5) 1/4 NPTF SYJ724 N.O.

3 Port Air Operated Valve Series SYJA300

Example: SS3YJ7-20-03 .1 set (Manifold base) SYJ712-5LZ-01.2 sets (Valve) SYJ700-10-1A.1 set (Blanking plate assembly) SS3YJ7-42R-03-01 .1 set (Manifold base) SYJ714R-5G. 2 sets (Valve) SYJ700-10-2A.1 set (Blanking plate assembly) The asterisk denotes the symbol for assembly.

PA3000/5000/PAX1000

Recommended Valve PA3000 PA5000 VQZ140 (exhaust center) VQZ240 (exhaust center) Refer to page 21 for further details. 6 Series PA3000/5000 Performance Curves/Air Operated Type PA513 Flow rate characteristics PA313 Flow rate characteristics 50 50 Cycle 7Hz Cycle 5Hz Cycle 3Hz (no change when SUP=0.2, 0.3MPa) Cycle 7Hz Cycle 5Hz Cycle 3Hz (no change when SUP=0.2MPa) SUP=0.5MPa 40 40 SUP=0.5MPa

Vacuum System Peripherals:

Control Valve/Solenoid Valve Model Compact 3 port solenoid valve Series SY100, SYJ Can be used at 100 kPa vacuum Compact size:Width 10 mm (SY100, SYJ300) Width 15 mm (SYJ500) Width 18 mm (SYJ700) Low power consumption 0.5 W Solenoid valve Port size Effective area (mm2) (Cv) Flow characteristics C (dm3/(sbar)) Piping specifications SYJ312/322 M3 x 0.5 0.9 Body ported SYJ512/522 M5 x 6.8 0.53 SYJ712

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Rubber seal Air, lnert gas Fluid Air, lnert gas 0.7MPa (High pressure type: 1.0MPa) Max. operationg pressure 0.15MPa Single Double 2 position Min. operating pressure 0.1MPa only for VQZ3000, 3 position 0.15MPa Valve specifications 0.1MPa 3 position 0.2MPa (1) (1) 10 to 50C Ambient and fluid temperature 10 to 50C SY Single Double Max. operating frequency 20Hz 5Hz 3 position 2 position 10Hz 3Hz

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

lnert gas Fluid 0.7MPa (High pressure type: 1.0MPa) 0.7MPa Max. operating pressure 0.15MPa Single Double 2 position Max. operating pressure 0.1MPa only for VQZ3000, 3 position 0.15MPa Valve specifications Solenoid specifications 0.1MPa 3 position 0.2MPa (1) (1) 10 to 50C Ambient and fluid temperature 10 to 50C SY Single Double 2 position Max. operating frequency 20Hz 5Hz 3 position 10Hz 3Hz

Type of Actuation: 3 Position Exhaust Center, Manifold Type: Body Ported Plug-in Integrated, Pilot: Internal Pilot, Specifications: Standard, Voltage: 110VAC 50/60HZ, Electrical Entry: Grommet Lead Wire 0.6m, Lead Wire Length: None, Surge Suppressor: Light & Surge Suppressor, Manual Override: Non-locking Push Style, A, B Port Size: Body Ported 1/8, Thread: NPTF, Option: -

Function: 1 (2 Position Single), Piping: 4 (Base Mounted), Exhaust: 3 (Common), Specifications: Standard, Voltage: 3 (110VAC 50/60HZ), Lead Wire: H (Grommet Lead Wire 0.6m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: None, Port Size: 01 (Base Mounted w/Sub-plate 1/8), Thread: T (NPTF)

Type of Actuation: 4 (3 Position Exhaust Center), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 3 (110VAC 50/60HZ), Electrical Entry: H (Grommet Lead Wire 0.6m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, A, B Port Size: 01 (Body Ported 1/8), Thread: T (NPTF

Function: 1 (Normally Closed), Piping: 4 (Base Mounted), Body Option: Individual EXH, Specifications: Standard, Voltage: 3 (110VAC 50/60HZ), Lead Wire: H (Grommet Lead Wire 0.6m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: 01 (Base Mounted w/Sub-plate 1/8), Thread: T (NPTF)

Type of Actuation: 2 (2 Position Double), Manifold Type: 40 (Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base), Pilot: Internal Pilot, Specifications: Standard, Voltage: 3 (110VAC 50/60HZ), Electrical Entry: H (Grommet Lead Wire 0.6m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, A, B Port Size: 01 (Base

Function: Normally Closed, Piping: Base Mounted, Body Option: Individual EXH, Specifications: Standard, Voltage: 110VAC 50/60HZ, Lead Wire: Grommet Lead Wire 0.6m, Surge Suppressor: Light & Surge Suppressor, Manual Override: Non-locking Push Style, Port Size: Base Mounted w/Sub-plate 1/8, Thread: NPTF, Bracket: -, CE-Compliant: -, Cable length: -

Function: 2 Position Single, Piping: Body Ported, Exhaust: Individual, Specifications: Standard, Voltage: 110VAC 50/60HZ, Lead Wire: Grommet Lead Wire 0.6m, Surge Suppressor: Light & Surge Suppressor, Manual Override: Non-locking Push Style, Port Size: Base Mounted w/Sub-plate 1/8, Body Ported 1/8, Thread: NPTF, Option: -, CE Compliant: -

Function: 2 Position Single, Piping: Base Mounted, Exhaust: Common, Specifications: Standard, Voltage: 110VAC 50/60HZ, Lead Wire: Grommet Lead Wire 0.6m, Surge Suppressor: Light & Surge Suppressor, Manual Override: None, Port Size: Base Mounted w/Sub-plate 1/8, Thread: NPTF, Option: -, CE Compliant: -