VFS

2-10 stations Base type 01C, 01F: 2-8 stations Option Please indicate manifold base type, corresponding valve, and option parts.

VFR

EVS Applicable terminal: 1.25-3.5M, 1.25Y-3L, 1.25-3M Although A, B+ and B marks are indicated on the terminal block, VFR5000 can be used as either +COM or COM.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

NVVsFR4 _ 01C ---r--Series NVFB40O0 Manilold valve Plug.in type }Wlth mslti connector Symbol Mounting direction of connector Plug-in Type: With D-Sub Connector aWide range ol interchangeability (MlL Spec DIN type connector terminal 25 pin.) aQuick wiring perrnits ease ot installation NVVsFR4 01F 63D l*-n",'.

-fl Seies

NVVsFR4 _ 01C ---r--Series NVFB40O0 Manilold valve Plug.in type }Wlth mslti connector Symbol Mounting direction of connector Plug-in Type: With D-Sub Connector aWide range ol interchangeability (MlL Spec DIN type connector terminal 25 pin.) aQuick wiring perrnits ease ot installation NVVsFR4 01F 63D l*-n",'.

CATALOG

+0.1MPa Note 2) Air is always bleeding to atmosphere Regulating 3000: 0.01~0.2MPa 0.005~0.8MPa 0.01~0.8MPa Pressure 3010: 0.01~0.4MPa Range 3020: 0.01~0.8MPa Sensitivity 0.2% FS Max H O W T O O R D E R P R E C I S I O N R E G U L AT O R S E R I E S IR1/2/3000 Repeatability +0.5% FS Max Air Supply Pressure at 1MPa <9.5l/min (Bleed P) <4l/min <9.5l/min Consumption at 0.7MPa <2l/min (EXH) <3l

SYJ300/500/700

Example: SS3YJ7-20-03 .1 set (Manifold base) SYJ712-5LZ-01.2 sets (Valve) SYJ700-10-1A.1 set (Blanking plate assembly) SS3YJ7-42R-03-01 .1 set (Manifold base) SYJ714R-5G. 2 sets (Valve) SYJ700-10-2A.1 set (Blanking plate assembly) The asterisk denotes the symbol for assembly.

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

(Example) SS3YJ7-20-03 . 1 set (manifold base) SYJ712-5LZ-01 . 2 sets (valve) SYJ700-10-1A . 1 set (blanking plate assembly) SS3YJ7-42R-03-01 . 1 set (manifold base) SYJ714R-5G . 2 sets (valve) SYJ700-10-2A . 1 set (blanking plate assembly) The asterisk denotes the symbol for assembly.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(Manifold base) SYJ712-5LZ-01 .2 pcs. (Valve) SYJ700-10-2A .1 pc. (Blank plate ass'y) VQZ SS3YJ7-42R-03-01 .1 pc. (Manifold base) SYJ714R-5G .2 pcs. (Valve) SYJ700-10-2A . .1 pc.

3 Port Solenoid Valve SYJ300/500/700 Series

Valve model SYJ712 N.C. Body ported type 9.0 (0.5) 72 74 1/8 NPTF SYJ722 N.O. SYJ714 1/8 NPTF N.C. Base mounted type (With sub-plate) 132 (Without sub-plate 72) 134 (Without sub-plate 74) 9.0 (0.5) 1/4 NPTF SYJ724 N.O.

3 Port Air Operated Valve Series SYJA300

Example: SS3YJ7-20-03 .1 set (Manifold base) SYJ712-5LZ-01.2 sets (Valve) SYJ700-10-1A.1 set (Blanking plate assembly) SS3YJ7-42R-03-01 .1 set (Manifold base) SYJ714R-5G. 2 sets (Valve) SYJ700-10-2A.1 set (Blanking plate assembly) The asterisk denotes the symbol for assembly.

KJ

+ KKA3S-01F) Series KKA3 (KKA3P-01F + KKA3S-01F) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.00 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 0 0.04 0.08 0.12 0.16 0.2 0.24 0.28 0.32 0.36 0.4 Pressure MPa Pressure MPa Plug: Without check valve Socket: With check

Table of Contents

+ KKA3S-01F) Series KKA3 (KKA3P-01F + KKA3S-01F) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.00 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 0 0.04 0.08 0.12 0.16 0.2 0.24 0.28 0.32 0.36 0.4 Pressure MPa Pressure MPa Plug: Without check valve Socket: With check

S Couplers

With check valve Without check valve With check valve Without check valve KKA3P-01F -02F -03F KKA4P-02F -03F -04F KKA6P-03F -04F -06F KKA7P-04F -06F -10F KKA8P-06F -10F -12F KKA9P-10F -12F -14F KKA3P-01F-1 -02F-1 -03F-1 KKA4P-02F-1 -03F-1 -04F-1 KKA6P-03F-1 -04F-1 -06F-1 KKA3S-01F -02F -03F KKA4S-02F -03F -04F KKA6S-03F -04F -06F KKA7S-04F -06F -10F KKA8S-06F -10F -12F KKA9S-10F -12F -14F

Vacuum System Peripherals:

Control Valve/Solenoid Valve Model Compact 3 port solenoid valve Series SY100, SYJ Can be used at 100 kPa vacuum Compact size:Width 10 mm (SY100, SYJ300) Width 15 mm (SYJ500) Width 18 mm (SYJ700) Low power consumption 0.5 W Solenoid valve Port size Effective area (mm2) (Cv) Flow characteristics C (dm3/(sbar)) Piping specifications SYJ312/322 M3 x 0.5 0.9 Body ported SYJ512/522 M5 x 6.8 0.53 SYJ712

KK/KK13

Body size Port size Part no. 1/8 1/8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 3/8 Rc 1/2 Rc 1/8 Rc 1/4 Rc 3/8 Rc 3/8 Rc 1/2 KK3P-01F KK4P-02F -03F KK6P-03F -04F KK3S-01F KK4S-02F -03F KK6S-03F -04F 1/4 1/4 1/2 1/2 Nut fitting type (for fiber reinforced urethane hose) Nut fitting type (for fiber reinforced urethane hose) Body size Applicable hose I.D./O.D. mm Part no. Body size Applicable hose I.D.

Proposals for Energy Saving

KK3P-01F KK4P-02F -03F KK6P-03F -04F 1/8 1/8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 3/8 Rc 1/2 Rc 1/8 Rc 1/4 Rc 3/8 Rc 3/8 Rc 1/2 KK3S-01F KK4S-02F -03F KK6S-03F -04F 1/4 1/4 1/2 1/2 Nut fitting type (for fiber reinforced urethane hose) Nut fitting type (for fiber reinforced urethane hose) Body size Applicable hose I.D./O.D. mm Part no. Body size Applicable hose I.D.

S Couplers Series KK/KK13

Body size Port size Part no. 1/8 1/8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 3/8 Rc 1/2 Rc 1/8 Rc 1/4 Rc 3/8 Rc 3/8 Rc 1/2 KK3P-01F KK4P-02F -03F KK6P-03F -04F KK3S-01F KK4S-02F -03F KK6S-03F -04F 1/4 1/4 1/2 1/2 Nut fitting type (for fiber reinforced urethane hose) Nut fitting type (for fiber reinforced urethane hose) Body size Applicable hose I.D./O.D. mm Part no. Body size Applicable hose I.D.

S Couplers Series KKH

Body size Port size Part no. 1/8 1/8 Rc 1/8 Rc 1/4 Rc 3/8 R 1/8 R 1/4 R 3/8 KK3P-01F KK4P-02F -03F KKH3S-01F KKH4S-02F -03F 1/4 1/4 Nut fitting type (for fiber reinforced urethane hose) Nut fitting type (for fiber reinforced urethane hose) Body size Applicable hose I.D./O.D. mm Part no. Body size Applicable hose I.D.

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Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: AC110V, Specification: Standard, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: [Rc (R)] Rc, Port Size: 1/8, Pressure Rating(MPa): 0.15 to 0.7, Driving Type: Pilot Type Spool, Pilot Air