SYJ300/500/700

SYJ724 SYJ714 SYJ724 Body ported 0.76 0.69 0.69 0.63 0.66 0.64 0.51 0.42 0.34 0.45 0.33 0.48 2.5 2.4 2.7 2.3 2.6 2.3 0.77 0.72 0.71 0.70 0.74 0.68 0.43 0.38 0.32 0.21 0.31 0.31 N.C. 2.8 2.7 2.9 2.8 3.0 2.7 1/8 75 97 80 76 N.O.

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

For 115 VAC and 230 VAC, the allowable voltage is 15% to +5% of rated voltage. 33 Series SYJ700 Flow Characteristics/Weight C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 1R2 (PRA) 2R3 (ARR) Valve model Flow characteristics Weight (g) Note) Type of actuation Port size Grommet L/M plug connector DIN terminal M8 connector SYJ712 SYJ722 SYJ714 SYJ724 SYJ714 SYJ724 Body ported 0.76 0.69 0.69 0.63

3 Port Solenoid Valve SYJ300/500/700 Series

SYJ714 1/8 NPTF N.C. Base mounted type (With sub-plate) 132 (Without sub-plate 72) 134 (Without sub-plate 74) 9.0 (0.5) 1/4 NPTF SYJ724 N.O.

Process Pump

We recommend that the inner package should be opened inside a clean room or clean environment. 10 Series PB Related Products 1 3 Port Solenoid Valve SYJ314/514 /714 Specifications SYJ314 SYJ514 SYJ714 Model Piping Valve construction Type of actuation Maximum operating pressure Minimum operating pressure Base mounted Rubber seal N.C. 0.7 MPa 0.15 MPa 1.2 0.41 0.32 1.1 0.46 0.32 C[dm3/(sbar

70pvpump

Specifications 3 port solenoid valve SYJ514/714 SYJ514 SYJ714 Model Piping Valve construction Type of actuation Max.operating pressure Min.operating pressure Effective area (Cv factor) Base mounted Rubber seal Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Vacuum System Peripherals:

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2.9 SYJ714/724 1 8 1 4 , Model/Rubber Seal 3 port solenoid valve Series VZ100/300/500 Compact size: Width 15 mm (VZ100, 300) Width 18 mm (VZ400, 500) Low power consumption 1 W(0.5W) Solenoid valve Port size Effective area (mm2) (Cv) Flow characteristics

SV

FG SDA SDB RDA RDB SG FG SDA SDB RDA RDB SG FG S1 S2 R1 R2 SG FG 24 V 0 V S1 S2 SG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V Ground either the reception side or the transmission side of the shielding wire shield.

Series SV

Slave unit 75 Slave unit 03 Slave unit 01 Master unit ZW-31LM SI unit Master unit SI unit Master unit SI unit SI unit SHIELD SG L2 L1 SHIELD SG L2 L1 SHIELD SG L2 L1 SG L2 L1 + + FG + + FG + + + + + + SHIELD FG FG + Twisted pair wire with shield Class 3 ground Class 3 ground Class 3 ground Class 3 ground FG FG b) 3 wire type Wiring does not include signal ground line (SG).

Series VQ Base Mounted Metal Seal/Rubber Seal

Item Specifications 24V DC, +10%, 5% External power supply Current consumption (Internal unit) SA, SB, SD, SE, SF, SG, SJ, SK, SQ, SR: 0.1A SC: 0.3A How to Order Manifold VV5Q 08 C6 12 D XP A S Dust proof styel (-XP)(VQ1000 only) Suffix -XP for the dust proof SI unit. (Except for SE, SG and SQ.)

Table of Contents

CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD SG 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector. 12 SG Note 1) Do not orient diodes incorrectly

Dedicated Controller

CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD SG 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector. 12 SG Note 1) Do not orient diodes incorrectly

Electric Actuators

CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD SG 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector.

Electric Actuator with Integrated Guide

CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD SG 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector. 12 SG Note 1) Do not orient diodes incorrectly

SX

unit (S1 unit) Slave unit Master station (S1 unit) SG B A SG B A FG SG B A FG SG B A FG FG Power supply 24 V 0 V Twisted pair wire with shielding DG 1-6-115 116 SX3000: Serial Transmission Unit/Plug-in SS5X3-45SStations UC4 C6 (Pitch) P = 10.5 DIN rail release button 2-One-touch fittings (P , R port) Applicable tubing O.D.: 8 2n-One-touch fittings (A, B port) Applicable tubing O.D.: 4, 6

Non-Standard Motor Compatible Drivers Matsushita Electric Industrial Co., Ltd. Drivers for LJ1, LG1, LX

by the customer. 36 SG 0V FG 207

SY

DA FG DG DB DA DG DB DA Terminal resistor Terminal resistor SLD FG b) 3 line wiring Twisted pair line with shielding Power supply 24V 0V 24V 0V D G D G 24V 0V Master unit Type 3 grounding Type 3 grounding Type 3 grounding SI unit SI unit SI unit FG SG B A FG SG B A SG B A SG B A FG FG Power supply 24V 0V Twisted pair line with shielding DG Type 45 SI unit part nos.

HRL

Terminal resistance Terminal resistance Circuit diagram SD+ SD SG 2 SD+ 7 SD 5 SG 2 SD+ 7 SD 5 SG 2 SD+ 7 SD 5 SG Master This product This product This product (1st slave) (2nd slave) (31st slave) Do not connect with other pins.

Compact Electric Actuator Series LG1

CN1 CN2 Shuts off 3 12 13 9 10 7 8 20 17 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG P5 19 OP 4 11 LG V+ 1 P5 LG MR MRR MD MDR SD 20 12 7 6 SG P5 LG MR MRR MD MDR SHD P5 LG MR MRR MD MDR SHD 7 8 1 2 4 5 9 7 8 1 2 4 9 Detector 17 16 Plate 5 (Note 2) 11 15 14 2 12 (Note 6) Connect the shielding wire securely to the ground plate inside the connector.

Thermo-con/Rack Mount Type

Signal contents RS-232C RS-485 1 Unused BUS+ 2 RD Unused 3 SD Unused 4 Unused Unused 5 SG SG 6-8 Unused Unused 9 Unused BUS 8 Contact b for output cutoff alarm (closed when alarm occurs) 3 9 Contact a for upper/lower temp. limit alarm (open when alarm occurs) 10 Common for upper/lower temp. limit alarm 4 11 Contact b for upper/lower temp. limit alarm (closed when alarm occurs) 12-14 Unused

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer