VDW Series

Stainless steel 15 Compact Direct Operated Series VDW200/300 3 Port Solenoid Valve for Water and Air Dimensions (mm) 1in = 25.4mm VDW250 VDW350 36 (27.6) 22 Lead wire l approx. 300 Lead wire l approx. 300 20 27 SMC SMC 30 40 1 1 20 27 Rectifying device AC type 23.5 M5, 1/8 3 (N.O.) port 1/8, 1/4 3 (N.O.) port Rectifying device AC type 25 34 20.5 45 28 3 3 69 86 (82.5) 1 8 5 15 M5, 1/8 1

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Stainless steel 15 Compact Direct Operated Series VDW200/300 3 Port Solenoid Valve for Water and Air Dimensions (mm) 1in = 25.4mm VDW250 VDW350 36 (27.6) 22 Lead wire l approx. 300 Lead wire l approx. 300 20 27 SMC SMC 30 40 1 1 20 27 Rectifying device AC type 23.5 M5, 1/8 3 (N.O.) port 1/8, 1/4 3 (N.O.) port Rectifying device AC type 25 34 20.5 45 28 3 3 69 86 (82.5) 1 8 5 15 M5, 1/8 1

VDW

L Dimension (mm) n (stations) Dimension 2 3 4 5 6 7 8 9 10 L1 44 66 88 110 132 154 176 198 220 L2 53 75 97 119 141 163 185 207 229 L3 62 84 106 128 150 172 194 216 238 2 stns. x 1 Manifold composition 2 stns. + 3 stns. 2 stns. x 2 + 3 stns. 2 stns. + 3 stns. x 2 2 stns. x 2 + 3 stns. x 2 3 stns. x 1 2 stns. x 2 3 stns. x 2 3 stns. x 3 Note) Manifold base is consisted of the junction of 2

V100

) (A) 2 Base Mounted VQZ200 VP (Standard) 12 VDC 24 VDC 1 (P) 3 (R) S070 N.C. 3 port (Option) 100 VAC 200 VAC 110 VAC 220 VAC L plug connector (L) VQ 2.0 3.0 M plug connector (M) (A) 2 VKF 1 (P) 3 (R) M plug connector (M) VQZ N.O.

ZB-OM00301

() () () () () () () Q1 N.C. () () () () () () 5 DC24V Q2 () () 6 DC12V Assy 1) Ass'y 2 L L AXT661 LO L M L2) (mm) 300 MO L2) 14A ()()() 6 600 (NC) 1) 10 1000 13A () () 20 2000 300mm 30 3000 3 Ass'y ZB1-VQ110U(M1.7X15)2 2)M ZB1-VQ110U-B (M1.7X22)2 3) ZB1-VQ110L(M1.7X22)2 ZB1-VQ120U(M1.7X15)2 B () ZB1-VQ120U-B (M1.7X22)2 3) ZB1-VQ110(M1.7X15)2 4) 3 ZB1-VQ110-B (M1.7X22)2 V Assy

Electro-Pneumatic Proportional Valve

Base mounted Body ported Base mounted Voltage 5 6 24VDC 12VDC Port size Nil M5 01 01F 01N 01T Without sub-plate (PVQ13, 33) With sub-plate (PVQ13 only) Rc 1/8 G 1/8 NPT1/8 NPTF 1/8 Electrical entry Orifice size L type plug connector, with lead wire (PVQ13 only) M type plug connector, with lead wire (PVQ13 only) Grommet (PVQ31, 33) L 03 04 06 08 16 23 40 0.3mm ( for PVQ13) 0.4mm ( for PVQ13

2

Note 3) Includes 1 L/min [ANR] of purge air flow (Inlet air pressure at 0.7 MPa) for the dew point indicator (except IDG1, 3, 5).

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SY3140-5G 3 sets (Single solenoid part no.) SY5140-5G 2 sets (Single solenoid part no.)

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

) 2 x 3.2 (Light/surge voltage suppressor) (36.7) (40.2) 12.7 20.5 40.4 15 0.8 (20) 28.1 [35.1] + 1.6 (For manifold gasket positioning) 2 x 2.2 die-cast hole (P, EA, EB port) 1/8 27.2 L plug connector (L): M plug connector (M): DIN terminal (D, Y): M8 connector (WO): 10-SY5 20-L(-F2) 3 4 5 10-SY5 20-M(-F2) 3 4 5 10-SY5 20(-F2) 3 4 5 10-SY5 20-WO(-F2) 3 4 5 C4, N3 C6, N7 C8, N9 C4, N3 C6,

SY

SS5Y51, #3 L type plug connector . SS5Y51, #3 + #13 M type plug connector .

SX

port) 3 4 5 02 03 3 4 5 L plug connector (L): SX7 40(R)-LM plug connector (M): SX7 40(R)-M02 03 Manual override (Press and turn for the locking type.)

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 3 [350 (3 Port) ø3], Port Size: 01 [1/8 (6A)], Thread: NPT, Material: -, Option: -, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 3 [350 (3 Port) ø3], Port Size: 01 [1/8 (6A)], Thread: N (NPT)

7.4

Electrical entry Type of actuation S07 1 5 5 G Connector kit SS0755-07C4C S0715-5G S0725-5G S07A5-5G 1 setManifold base part no. 3 setsValve part no. (Stations 1 to 3) 2 setsValve part no. (Stations 4 to 5) 2 setsValve part no.

Microspeed Cylinder

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) Operation Warning 1. With the meter-out function, control may not be possible during low speed operation. Caution 1.

VQ

(Value in the initial stage.) 1 (P) 3 (R) Normally closed VQZ VZ (A) 2 VS 1 (P) 3 (R) Normally open Option Specifications Latching AC Large flow capacity Type Item Normally open 1 2 VQ120-l VQ110L-l VQ110l (A) 2 VQ110U-l Model 0.7MPa 0.6MPa 0.5MPa Max. operating pressure 3 2 0.14mm2 (Cv ) 1 2 0.68mm2 (Cv ) 0.20mm 2 (Cv ) 2 1 Effective area 0.008 0.038 0.011 1 (P) 3 (R) 0.20mm2 (Cv ) 2 3 0.68mm2

3 Port Solenoid Valve Series VQ100 1

VVQ100-12A-1 VVQ100-12A-2 VVQ100-12A-3 L dimension 1.5 m 3 m 5 m Mounting direction D side mounting U side mounting D U Note) The number of manifold stations cannot be changed.

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 4 [350 (3 Port) ø4], Port Size: 01 [1/8 (6A)], Thread: NPT, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: -, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: NPT, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: -, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 4 [350 (3 Port) ø4], Port Size: 01 [1/8 (6A)], Thread: N (NPT), Material: L (Stainless Steel Body, FKM Seal, Class B Coil)