Table of Contents

Body type Plug-in type ARBF2000-00-P-1 Non plug-in type ARBF2000-00-P-2 P port regulation Body type Plug-in type VVFS2000-10A Non plug-in type Part no. Rc 1 4 VVFS2000-P-02-1 VVFS2000-P-02-2 Accessory One pair of gasket and mounting thread is attached to every option parts assembly.

VFS

Body type Plug-in type ARBF2000-00-P-1 Non plug-in type ARBF2000-00-P-2 P port regulation Body type Plug-in type VVFS2000-10A Non plug-in type Part no. Rc 1 4 VVFS2000-P-02-1 VVFS2000-P-02-2 Accessory One pair of gasket and mounting thread is attached to every option parts assembly.

VFR

0 e (B) (A) 4 2 (EA)(P)(EB) 5 1 3 Exhaust center: VFR640 (B) (A) 4 2 (EA)(P) (EB) 5 1 3 o r Pressure center: VFR650 (B) (A) 4 2 PE 5(EA) 4(A) 1(P) 2(B) 3(EB) PE This figure shows a closed center type. (EA)(P)(EB) 5 1 3 Component Parts Material Aluminum die-casted Note No. No.

Table of Contents

P. 34 P. 34 KQ2L T KQ2T P. 34 KQ2H Use to branch line from female thread in both 90 directions. VMG Branch Y Male run tee Gasket Use to branch line in the same direction from female thread and in 90 direction. KQ2U KQG P. 35 P. 35 KQ2Y P. 36 Use to branch line in the same direction from female thread.

KJ

P. 34 P. 34 KQ2L T KQ2T P. 34 KQ2H Use to branch line from female thread in both 90 directions. VMG Branch Y Male run tee Gasket Use to branch line in the same direction from female thread and in 90 direction. KQ2U KQG P. 35 P. 35 KQ2Y P. 36 Use to branch line in the same direction from female thread.

S Couplers

With check valve Without check valve With check valve Without check valve KKA3P-01F -02F -03F KKA4P-02F -03F -04F KKA6P-03F -04F -06F KKA7P-04F -06F -10F KKA8P-06F -10F -12F KKA9P-10F -12F -14F KKA3P-01F-1 -02F-1 -03F-1 KKA4P-02F-1 -03F-1 -04F-1 KKA6P-03F-1 -04F-1 -06F-1 KKA3S-01F -02F -03F KKA4S-02F -03F -04F KKA6S-03F -04F -06F KKA7S-04F -06F -10F KKA8S-06F -10F -12F KKA9S-10F -12F -14F

VFA3000

Exhaust center: A, B R1, R2, Pressure center P A, B 3 position closed center 3 position exhaust center Specifications 2 position double 2 position single Fluid Air 0.15 to 0.9 0.1 to 0.9 Operating pressure range (MPa) 3 position pressure center 3 position 0.15 to 0.9 Pilot pressure range (MPa) 2 position double 2 position single (0.4 X P+0.1) to 0.9 P: Operating pressure 0.1 to 0.9 3 position

Proposals for Energy Saving

(P .E.)

KK/KK13

P-80 (D)

S Couplers Series KK/KK13

Lock 1 S Couplers Series KK Variations Plug (P) Socket (S) Male thread type Male thread type Body size Part no. Body size Port size Part no.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Series NVFR40O0:Base Mounted Tlpe Constructio n/ P ar ts L i.st NVFR4 I OO 2 posi$on sirle 2 Doition double A P B E B P E 3 poBition Closed center/Erhsust center/Pressure center Closed center/NVFR43O0 I & C t 0 $ r P E E A A P B E B P E Main Parts No.

-fl Seies

Series NVFR40O0:Base Mounted Tlpe Constructio n/ P ar ts L i.st NVFR4 I OO 2 posi$on sirle 2 Doition double A P B E B P E 3 poBition Closed center/Erhsust center/Pressure center Closed center/NVFR43O0 I & C t 0 $ r P E E A A P B E B P E Main Parts No.

S Couplers Series KKH

Body size Port size Part no. 1/8 1/8 Rc 1/8 Rc 1/4 Rc 3/8 R 1/8 R 1/4 R 3/8 KK3P-01F KK4P-02F -03F KKH3S-01F KKH4S-02F -03F 1/4 1/4 Nut fitting type (for fiber reinforced urethane hose) Nut fitting type (for fiber reinforced urethane hose) Body size Applicable hose I.D./O.D. mm Part no. Body size Applicable hose I.D.

1

P.43 P.43 P.71 SY70 SY30 Manifold Top ported Bottom ported Top ported Type 51 SY50 From page 43 P.43 P.43 P.71 P.43 SY70 SY33 Type 52 SY53 From page 63 P.63 P.63 P.81 P.63 SY73 SY30 Type 10 SY50 From page 95 P.95 P.95 P.113 P.143 P.163 P.171 P.179 P.187 P.95 P.123 P.133 P.151 SY70 Type 11 SY50 From page 95 P.95 P.95 P.143 P.163 P.171 P.179 P.187 P.95 P.113 P.123 P.133 P.151 SY70 SY33 Type

CATALOG

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

V100

48 R P R P R P VS Refer to page 4-4-61 for dimensions with connector cable.

V

(N)VV4Z1 20 S TAT I O N S 1 T H R E A D T Y P E 02 2 Stations to 20 20 Stations PT 00T NPTF D I M E N S I O N S M A N I F O L D T Y P E 20 T O P P O R T E D M P L U G T Y P E F Bracket O P T I O N D I M E N S I O N S M A N I F O L D T Y P E 20 T O P P O R T E D G R O M M E T T Y P E Lead Wire Length ACCESSORIES M A N I F O L D T Y P E 20 T O P P O R T E D DXT170-25-1A Blanking Plate Assembly

Micro Mechanical Valve Series VM1000

(Total Travel) 3 P .T.

VM

. 5-6-8 Series VM100 P . 5-6-12 Series VM200 P . 5-6-20 Series VM400 P . 5-6-26 Series VZM500 P . 5-6-41 Series VZM400 P . 5-6-35 Series VFM300 P . 5-6-48 Series VFM200 P . 5-6-54 Series VFM800 P . 5-6-32 Transmitters Page Relay Valve P . 5-7-1 Shuttle Valve P . 5-7-3 Shuttle Valve with One-touch Fitting P . 5-7-5 AND Valve with One-touch Fitting P . 5-7-7 Time Delay Valve P . 5-7

VS 8-2/VS 8-4

P.3, 12 P.3, 12 D-sub connector D-sub connector 25 pins 26 pins Terminal block is compactly arranged on one side. ( ( ) ) ( ) ( ) ( ) Conforming to MIL D-sub connector P.3, 13 P.3, 13 F kit Flat ribbon cable Flat ribbon cable Conforming to MIL flat ribbon cable connector P.3, 15 P.3, 15 P kit Series VS 8-2/VS 8-4 S R S R Conforms to ISO 15407-2 Standard 5 Port Solenoid Valve/Plug-in Type