SV

With External Pilot Specifications (Pitch) 24 P = 24 65.8 20 25 11 E 3/5 E 3/5 E 3 A E 3 A 4 A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 13.7 14.5 35.8 35 58.3 74.8 P 1 P 1 B 2 B 2 B 2 B 2 B 2 P 1 P 1 B 2 B 2 B 2 B 2 B 2 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, 5/16" 10, 3/8" 12 X PE X PE Rc 3/8 [1(P), 3(E)

VQ5000

Set pressure with a flat head screw driver. 42 Base Mounted Type Series VQ5000 Plug-in Unit Metal seal type Rubber seal type (A) 4 (B) 2 VQ5101 (A) 4 (B) 2 VQ5100 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5201 (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5301 VQ5300 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5401 VQ5400 (A) 4 (B) 2 (A) 4

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

2 VQ5250 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5351 (A) 4 (B) 2 VQ5350 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 VQ5451 VQ5450 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5551 (A) 4 (B) 2 VQ5550 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Parts list Parts list Description Material Note No. 1 2 3 Description Material Note No. 1 2 3 Body

Table of Contents

Description Material AS800 AS900 y u i JIS B 2401 P-7 JIS B 2401 P-7 AQ NBR O-ring u O-ring O-ring Spring NBR NBR Stainless steel JIS B 2401 P-12 JIS B 2401 G-50 14115 JIS B 2401 P-16 JIS B 2401 G-65 14124 JIS B 2401 P-48 JIS B 2401 P-38 NBR O-ring ASV i AK ASS Dimensions: AS420/500/600 Dimensions: AS800/900 ASR ASF 2-Port size 2-Port size Dimensions Dimensions L1 L2 L4 Min.

Series: 5 (VFA5000), Actuation: 5 (3 Position Pressure Center), Body: 20, A, B Port Size: 03 (3/8), Thread: T (NPTF)

Series: VFA5000, Actuation: 3 Position Pressure Center, Body: 20, A, B Port Size: 3/8, Thread: NPTF, Bracket: -, Pilot Port Direction: -

CATALOG

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

V

(N)VV4Z1 20 S TAT I O N S 1 T H R E A D T Y P E 02 2 Stations to 20 20 Stations PT 00T NPTF D I M E N S I O N S M A N I F O L D T Y P E 20 T O P P O R T E D M P L U G T Y P E F Bracket O P T I O N D I M E N S I O N S M A N I F O L D T Y P E 20 T O P P O R T E D G R O M M E T T Y P E Lead Wire Length ACCESSORIES M A N I F O L D T Y P E 20 T O P P O R T E D DXT170-25-1A Blanking Plate Assembly

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

pe Manifold / Option Parts Plug-in Type,/ Non Plug-in Type,/ Dimensions inch(mm) SUP nebcation glacer NvvFSi|00O.P.03T.i lPlug.in typel 1{WFS3000.P.03T.2 l on plug.in typel htertaca rcgultor/Egulation to p llAHBF305{r.l{GP.i lPlug.in typol NARBF305O.I{0.P.2 ([on ptugFin typel EXll nebcaiion spacer I{WFS3000.R.03T.1 (Plug.in typel I{VVFS30OO.R.{'3T.2 lNon plug.in typel -T IfEl lGl a tr&tqr

-fl Seies

pe Manifold / Option Parts Plug-in Type,/ Non Plug-in Type,/ Dimensions inch(mm) SUP nebcation glacer NvvFSi|00O.P.03T.i lPlug.in typel 1{WFS3000.P.03T.2 l on plug.in typel htertaca rcgultor/Egulation to p llAHBF305{r.l{GP.i lPlug.in typol NARBF305O.I{0.P.2 ([on ptugFin typel EXll nebcaiion spacer I{WFS3000.R.03T.1 (Plug.in typel I{VVFS30OO.R.{'3T.2 lNon plug.in typel -T IfEl lGl a tr&tqr

VS 8-2/VS 8-4

P.3, 12 P.3, 12 D-sub connector D-sub connector 25 pins 26 pins Terminal block is compactly arranged on one side. ( ( ) ) ( ) ( ) ( ) Conforming to MIL D-sub connector P.3, 13 P.3, 13 F kit Flat ribbon cable Flat ribbon cable Conforming to MIL flat ribbon cable connector P.3, 15 P.3, 15 P kit Series VS 8-2/VS 8-4 S R S R Conforms to ISO 15407-2 Standard 5 Port Solenoid Valve/Plug-in Type

Serial Transmission System Series EX250 Series EX500

P EA EB 3 position pressure center A B 5 EB P EA 3 position double check A B 6 EB P EA For the solenoid valve specifications and dimensions, please refer to VQC catalog (ES11-80). Please refer to page 13 for Series EX250 single SI unit dimensions. For details of the Series EX250 SI unit, please refer to the technical instruction manual.

I

In center position the flo/v P-A, B is as sholn. X X { l ) Series NVFSOO How To Order NVFs lPort size (P,A,B) OXT Y.NPIF O3T %NPTF o4T. _ IbNPIF Typ of I *2 positiqr/singlo solanoid 2 -e position/double eolgnoid l-3 posilion, dGd c6oter/doubl6 solonoid 4 -3 gooidofl extEugt centr/double solenoid 5 -A pEsilion, p.6sure crte./double solenoid oyeride 'Subbas type only.

3M/SMseries

In center position the flo/v P-A, B is as sholn. X X { l ) Series NVFSOO How To Order NVFs lPort size (P,A,B) OXT Y.NPIF O3T %NPTF o4T. _ IbNPIF Typ of I *2 positiqr/singlo solanoid 2 -e position/double eolgnoid l-3 posilion, dGd c6oter/doubl6 solonoid 4 -3 gooidofl extEugt centr/double solenoid 5 -A pEsilion, p.6sure crte./double solenoid oyeride 'Subbas type only.

Series: 5 (VFA5000), Actuation: 5 (3 Position Pressure Center), Body: 20, A, B Port Size: 03 (3/8), Thread: N (NPT), Bracket: w/o Bracket, Pilot Port Direction: P (Lateral)

Series: 5 (VFA5000), Actuation: 5 (3 Position Pressure Center), Body: 20, A, B Port Size: 03 (3/8), Thread: F (G), Bracket: w/o Bracket, Pilot Port Direction: P (Lateral)

Series: 5 (VFA5000), Actuation: 5 (3 Position Pressure Center), Body: 20, A, B Port Size: 02 (1/4), Thread: N (NPT), Bracket: w/o Bracket, Pilot Port Direction: P (Lateral)

Series: 5 (VFA5000), Actuation: 5 (3 Position Pressure Center), Body: 20, A, B Port Size: 02 (1/4), Thread: T (NPTF), Bracket: w/o Bracket, Pilot Port Direction: P (Lateral)

Series: 5 (VFA5000), Actuation: 5 (3 Position Pressure Center), Body: 20, A, B Port Size: 02 (1/4), Thread: F (G), Bracket: w/o Bracket, Pilot Port Direction: P (Lateral)

Series: 5 (VFA5000), Actuation: 5 (3 Position Pressure Center), Body: 20, A, B Port Size: 03 (3/8), Thread: Rc, Bracket: w/o Bracket, Pilot Port Direction: P (Lateral)