Micro Mechanical Valve Series VM1000

Application Weight (g) Model Actuator Polyacetal roller 190 270 280 280 290 380 370 380 360 VFM350-02-00 Basic Mechanical operation Manual operation VM-08D VM-06DS VM-06D VM-05D VM-02CS VM-02C VM-01CS VM-01C Roller lever VFM350-02-01 VFM350-02-01S Hard steel roller One way roller lever VFM350-02-02 VFM350-02-02S Polyacetal roller Hard steel roller Straight plunger VFM350-02-05 Polyacetal

VM

Application Model Actuator Basic VFM350-02-00 VFM350-02-01 VFM350-02-01S VFM350-02-02 VFM350-02-02S Mechanical operation Polyacetal roller Hard steel roller VM-08D VM-06DS VM-06D VM-05D VM-02CS VM-02C VM-01CS VM-01C Roller lever Polyacetal roller Hard steel roller One way roller lever Straight plunger VFM350-02-05 Polyacetal roller Hard steel roller Roller plunger VFM350-02-06 VFM350-02

CATALOG

Capacity H O W T O O R D E R S E R I E S (N)AK T E C H N I C A L SPECIFICATIONS B O D Y S I Z E .P O RT . . .E F F E C T I V E S I Z E NPT . . .O R I F I C E* NAQ1500-M5 .M5 . . .2.8 NAQ1510-N01...1 8 . . . .5.8 NAQ2000-N01...1 8 . . . .25 NAQ2000-N02...1 4 . . . .40 NAQ3000-N02...1 4 . . . .42 NAQ3000-N03...3 8 . . . .70 NAQ5000-N04...1 2 . . . .115 NAQ5000-N06...3 4 . . . .180 Fluid Air

Table of Contents

Min. 1/8" 5/32" 3/16" 1/4" 1/8" 5/32" 3/16" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" AS131FM-U10/32-01 AS131FM-U10/32-03 AS131FM-U10/32-05 AS131FM-U10/32-07 AS231FM-N01-01S AS231FM-N01-03S AS231FM-N01-05S AS231FM-N01-07S AS231FM-N01-09S AS231FM-N02-03S AS231FM-N02-05S AS231FM-N02-07S AS231FM-N02-09S AS231FM-N02-11S 19.8 20.3 21.3 21.6 24.4 24.9 26.8 29.9 30.9 30.6 31.1 34.2 35.2 38.7 8.4 9.3

ARX Series

1 ARX20 mm Nil F ARX21 mm Nil F Thread type G Pressure gauge Rc(PT) NPT G(PF) Nil N F ARX20Nmm ARX21Nmm P Port size Panel nut 1/8 1/4 01 02 Option combination numbers Panel nut is also included with B.

Mechanical Valves Series NVM, NVFM, NVZNI

133-51 0.91 (231 0.47 (121 0.81 i20.5) 0.39 (10) Millimeters in Parentheses Millimeters in Parontheses NVM220-N02-08 230-N02-08 NVM220-N02-07 230-N02-07 Panel Mounling Panel Mounting F O F ' 1 2 3 s l b s ( 5 6 k 9 ) P T 0 138 in (3 5mm) o,T 0 079 in (2mm) T T 0 216 in (5 5mm) F O F ' 2 6 5 l b s , ( 1 2 k g ) T T 60" '75 PSIG (5 Kgf/cm2) '75 PSIG (5 Kgf/cm2) A B c D E F G A B c D E F G

IIIIIII

133-51 0.91 (231 0.47 (121 0.81 i20.5) 0.39 (10) Millimeters in Parentheses Millimeters in Parontheses NVM220-N02-08 230-N02-08 NVM220-N02-07 230-N02-07 Panel Mounling Panel Mounting F O F ' 1 2 3 s l b s ( 5 6 k 9 ) P T 0 138 in (3 5mm) o,T 0 079 in (2mm) T T 0 216 in (5 5mm) F O F ' 2 6 5 l b s , ( 1 2 k g ) T T 60" '75 PSIG (5 Kgf/cm2) '75 PSIG (5 Kgf/cm2) A B c D E F G A B c D E F G

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS131FM-U10/32-01 AS131FM-U10/32-03 AS131FM-U10/32-05 AS131FM-U10/32-07 AS231FM-N01-01S AS231FM-N01-03S AS231FM-N01-05S AS231FM-N01-07S AS231FM-N01-09S AS231FM-N02-03S AS231FM-N02-05S AS231FM-N02-07S AS231FM-N02-09S AS231FM-N02-11S 1/8" 19.8 8.4 28.7 7 17.5 12.7 5/32" 20.3 9.3 10.8 33.8 28.8 10-32 UNF 8 9.6 9.3 30.1 25.1 34.5 3/16" 23.3 16.5 21.3 11.4 8 31.9 1/4" 20.7 13.7 21.6 12 17 1/8"

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Min. 1/8" 5/32" 3/16" 1/4" 1/8" 5/32" 3/16" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" AS131FM-U10/32-01 AS131FM-U10/32-03 AS131FM-U10/32-05 AS131FM-U10/32-07 AS231FM-N01-01S AS231FM-N01-03S AS231FM-N01-05S AS231FM-N01-07S AS231FM-N01-09S AS231FM-N02-03S AS231FM-N02-05S AS231FM-N02-07S AS231FM-N02-09S AS231FM-N02-11S 19.8 20.3 21.3 21.6 24.4 24.9 26.8 29.9 30.9 30.6 31.1 34.2 35.2 38.7 8.4 9.3

Series AS-FM/AS-M/ASD-FM

Min. 1/8" 5/32" 3/16" 1/4" 1/8" 5/32" 3/16" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" 19.8 20.3 21.3 21.6 24.4 24.9 26.8 29.9 30.9 30.6 31.1 34.2 35.2 38.7 AS131FM-U10/32-01 AS131FM-U10/32-03 AS131FM-U10/32-05 AS131FM-U10/32-07 AS231FM-N01-01S AS231FM-N01-03S AS231FM-N01-05S AS231FM-N01-07S AS231FM-N01-09S AS231FM-N02-03S AS231FM-N02-05S AS231FM-N02-07S AS231FM-N02-09S AS231FM-N02-11S 8.4 9.3

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Min. 1/8" 5/32" 3/16" 1/4" 1/8" 5/32" 3/16" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" AS131FM-U10/32-01 AS131FM-U10/32-03 AS131FM-U10/32-05 AS131FM-U10/32-07 AS231FM-N01-01S AS231FM-N01-03S AS231FM-N01-05S AS231FM-N01-07S AS231FM-N01-09S AS231FM-N02-03S AS231FM-N02-05S AS231FM-N02-07S AS231FM-N02-09S AS231FM-N02-11S 19.8 20.3 21.3 21.6 24.4 24.9 26.8 29.9 30.9 30.6 31.1 34.2 35.2 38.7 8.4 9.3

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

2

, 60C (F and FS type only)] IDF IDU IDF FS Refer to SMC website for details.

Secondary Batteries

B L F G D *Mounting brackets are shipped together, (but not assembled).

Ozone Resistant

220-01 220-01-F 220-02 220-02-F 320-03 (02) 320-03-F (02) 420-04 420-04-F 121F-M3 131F-M3 121F-M5 (U10, 32) 131F-M5 (U10, 32) 221F-01 231F-01 2211F-01-06 221F-02 231F-02 321F-03 (02) 331F-03 (02) 421F-04 431F-04 1000F 2000F 2050F 3000F 4000F 1001F 2001F 2051F 3001F 4001F 230F 330F 430F 530F 630F 330F 430F 530F 630F Manifold regulator 4-, 5-port solenoid valve VQ Directional control valves

Pipe Port Type: NPT, Rod Arm Type: -, Mounting Method: Side, Plunger Type: Roller Lever, Body Shape: Block Vertical Type, Number of Ports: 5-Port, Push Button Type: -, Plumbing Type & Direction: Direct Side, Number of Switching Positions: 2-Position Direction Switching, Switching Operation: Plunger, Nominal Designation of Piping Thread: 1/4, Valve Flow Coefficient (Cv)(mm2): 18.45, Body options

Body Option: 0 (Internal Pilot), Port Size: N02 (NPT1/4), Style: 01 (Roller Lever), Suffix: S (Roller Material Hard Steel)

This is a legacy product, and replaced byVFM250-N02-01S, VALVE, MECH L (STEEL), VALVE, VM BODY PT 1/4, .68200 lb

F

F E R E N T D I A.

Table of Contents

(mm) Note) Weight (g) Model D1 P A M D2 L 2-applicable tubing M5 x 0.8 KJU23-M5 KJU23-01S KJU04-M5 KJU04-01S KJU06-M5 KJU06-01S 5.9 8.3 6.4 8.8 7.4 9.9 Reference dimensions after R thread installation.