Pilot: External Pilot, Voltage: 24VDC, Lead Wire: DIN Connector, Surge Suppressor: None, Port Size: 1, Thread: G, Passage: External Pilot (N.O/N.C), Option: Continuous Duty, CE Compliant: CE Compliant

Pilot: R (External Pilot), Voltage: 5 (24VDC), Lead Wire: D (DIN Connector), Surge Suppressor: None, Port Size: 10 (1), Thread: F (G), Passage: External Pilot (N.O/N.C), Option: E (Continuous Duty), CE Compliant: Q (CE Compliant)

Series VG342 is a 3 port pilot poppet solenoid valve and can be used as a selector or divider valve (external pilot). Actuation is changeable between N.C., N.O., or external pilot types. VG342 is possible to use in vacuum or under low pressures. No lubrication is required. 3 port pilot operated poppet valve , Material restriction type , Low power consumption: 4.8W DC (standard type); 2W

Series VG342 is a 3 port pilot poppet solenoid valve and can be used as a selector or divider valve (external pilot). Actuation is changeable between N.C., N.O., or external pilot types. VG342 is possible to use in vacuum or under low pressures. No lubrication is required. 3 port pilot operated poppet valve , Material restriction type , Low power consumption: 4.8W DC (standard type); 2W

1

Protective class class # (Mark: ) 97 Connector Connecting Base Series SY3000/5000/7000 Plug-in Directional Control Valves Type 10/Side Ported Plug-in Connector Connecting Base D-sub Connector (IP40) Dimensions: Series SY3000 C2 C3, N1 C4, N3 C6, N7 U D B 1 2 SS5Y3-10F (D) Stations SY D side U side Manual override Note 2) ( ) (8) (L5) DIN rail holding screw (For DIN rail mounting) L1 Push-turn

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Model C Mounting bolt CDQP2B12-5D -10D -15D -20D -25D -30D CDQP2B16-5D -10D -15D -20D -25D -30D CDQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQP2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D Model C Mounting bolt CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-

CQ2

Mounting bolt Mounting bolt CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D Mounting bolt CDQP2B12-5D -10D -15D -20D -25D -30D CDQP2B16-5D -10D -15D -20D -25D -30D CDQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQP2B25-5D -10D -

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Model C Mounting bolt CDQP2B12-5D -10D -15D -20D -25D -30D CDQP2B16-5D -10D -15D -20D -25D -30D CDQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQP2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D Mounting bolt CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-10D -15D

CATALOG

(Except DIN Electrical Entry is not possible) 3 5 7 V O LTA G E B AC24v (Not VT325v) 3 AC110v (Not VT325v) 5 DC24v 6 DC12v (Not VT325v) 7 AC230v (Not VT325v) Refer to Series VT307/327 E L E C T R I C A L E N T R Y VZ100 S E R I E S (S E E V A LV E S E C T I O N) H O W T O O R D E R SY/SX B A S E M O U N T E D S E R I E S (T O S U I T T Y P E 42 M A N I F O L D S) External Pilot Types VG342R

V

(Except DIN Electrical Entry is not possible) 3 5 7 V O LTA G E B AC24v (Not VT325v) 3 AC110v (Not VT325v) 5 DC24v 6 DC12v (Not VT325v) 7 AC230v (Not VT325v) Refer to Series VT307/327 E L E C T R I C A L E N T R Y VZ100 S E R I E S (S E E V A LV E S E C T I O N) H O W T O O R D E R SY/SX B A S E M O U N T E D S E R I E S (T O S U I T T Y P E 42 M A N I F O L D S) External Pilot Types VG342R

Vacuum System Peripherals:

specifications Port size Solenoid valve , VS3115 1 8 1 4 3.8 4.0 9.0 20 , VS3110 1 4 3 8 Body ported , , , 1 2 3 4 VS3135 1 4 1 2 3 8 VS3145 Series VS 3 port solenoid valve Model/Rubber Seal Series VG342 Flow characteristics C (dm3/(sbar)) Effective area (mm2) (Cv) Piping specifications Port size Solenoid valve 210 210 1 2 to 26 to 38 26 to 38 3 4 VG342 1 Body ported 1 2 1 to 3 4 For Vacuum: VG342R

NCQ2/CQ2

CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B12-5D -10D -15D -20D -25D -30D CDQP2B16-5D -10D -15D -20D -25D -30D CDQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQP2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D 40

Compact Cylinder

CQP2B12-5D -10D -15D -20D -25D -30D CQP2B16-5D -10D -15D -20D -25D -30D CQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQP2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQP2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQP2B63-10D

Compact Cylinder Series CQS

C D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 C D 55 60 65 70 75 80 35 40 45 50 55 60 65 70 75 80 Cylinder model Mounting bolt size Cylinder model Mounting bolt size CQSWB12-5D -10D -15D -20D -25D -30D CQSWB16-5D -10D -15D -20D -25D -30D CQSWB20-5D -10D -15D -20D CQSWB20-25D -30D -35D -40D -45D -50D CQSWB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D M3 x 30L x 35L x 40L x 45L x

CQS

Mounting bolt Mounting bolt D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 Model C Model C D 55 60 65 70 75 80 35 40 45 50 55 60 65 70 75 80 CQSWB12-5D -10D -15D -20D -25D -30D CQSWB16-5D -10D -15D -20D -25D -30D CQSWB20-5D -10D -15D -20D CQSWB20-25D -30D -35D -40D -45D -50D CQSWB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D M3 x 30l x 35l x 40l x 45l x 50l x 55l M3 x 30l x 35l x

Table of Contents

VFR2110-5D 5 sets (2 position single part no.) VFR2410-5D 1 set (3 position exhaust part no.) VVFS2000-R-01-2 1 set (Individual EXH spacer part no.) VV5FR2-01T1-061-02 1 set (Manifold base part no.) VFR2100-5FZ 3 sets (2 position single part no.) VFR2200-5FZ 2 sets (2 position double part no.) VVFS2000-10A 1 set (Blanking plate assembly part no.)

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Rod side mounting/Without auto switch Head side mounting/Without auto switch C D Mounting bolt Model C D Mounting bolt Model CQSB12-5D -10D -15D -20D -25D -30D CQSB16-5D -10D -15D -20D -25D -30D CQSB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSB12-5D -10D -15D -20D -25D -30D CQSB16-5D -10D -15D -20D -25D -30D CQSB20-5D -10D -

VFS

Non plug-in type VV5FS3-10 VFS310-D VFS310-E Plug-in type with terminal block: 6 stations (Manifold base) VV5FS3-01T-061-02 1 (2 position single) VFS3100-5FZ 3 (2 position double) VFS3200-5FZ 2 (Blanking plate) VVFS3000-10A 1 Non plug-in type: 6 stations (Manifold base) VV5FS3-10-061-03 1 (2 position single) VFS3110-5D 5 (3 position exhaust center) VFS3410-5D

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

VFR2110-5D 5 sets (2 position single part no.) VFR2410-5D 1 set (3 position exhaust part no.) VVFS2000-R-01-2 1 set (Individual EXH spacer part no.) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc. The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

F 3 8 Option VV5FS4-10-061-03-A VFS4110-5D 1 4 The asterisk denotes the symbol for assembly.