Pilot: External Pilot, Voltage: 24VDC, Lead Wire: DIN Connector, Surge Suppressor: None, Port Size: 1, Thread: NPT, Passage: External Pilot (N.O/N.C), Option: Continuous Duty, CE Compliant: -

Pilot: R (External Pilot), Voltage: 5 (24VDC), Lead Wire: D (DIN Connector), Surge Suppressor: None, Port Size: 10 (1), Thread: N (NPT), Passage: External Pilot (N.O/N.C), Option: Standard, CE Compliant: Q (CE Compliant)

Pilot: R (External Pilot), Voltage: 5 (24VDC), Lead Wire: D (DIN Connector), Surge Suppressor: None, Port Size: 10 (1), Thread: N (NPT), Passage: External Pilot (N.O/N.C), Option: E (Continuous Duty)

Pilot: External Pilot, Voltage: 24VDC, Lead Wire: DIN Connector, Surge Suppressor: None, Port Size: 1, Thread: NPT, Passage: External Pilot (N.O/N.C), Option: Continuous Duty, CE Compliant: CE Compliant

Pilot: R (External Pilot), Voltage: 5 (24VDC), Lead Wire: D (DIN Connector), Surge Suppressor: None, Port Size: 10 (1), Thread: N (NPT), Passage: External Pilot (N.O/N.C), Option: E (Continuous Duty), CE Compliant: Q (CE Compliant)

Series VG342 is a 3 port pilot poppet solenoid valve and can be used as a selector or divider valve (external pilot). Actuation is changeable between N.C., N.O., or external pilot types. VG342 is possible to use in vacuum or under low pressures. No lubrication is required. 3 port pilot operated poppet valve , Material restriction type , Low power consumption: 4.8W DC (standard type); 2W

Series VG342 is a 3 port pilot poppet solenoid valve and can be used as a selector or divider valve (external pilot). Actuation is changeable between N.C., N.O., or external pilot types. VG342 is possible to use in vacuum or under low pressures. No lubrication is required. 3 port pilot operated poppet valve , Material restriction type , Low power consumption: 4.8W DC (standard type); 2W

Series VG342 is a 3 port pilot poppet solenoid valve and can be used as a selector or divider valve (external pilot). Actuation is changeable between N.C., N.O., or external pilot types. VG342 is possible to use in vacuum or under low pressures. No lubrication is required. 3 port pilot operated poppet valve , Material restriction type , Low power consumption: 4.8W DC (standard type); 2W

V100

x 14 7 Manual override VZ 7 14 P E P E 37.4 16 VS 29 32 43.8 VFN 4-PT 1/8 P , E port 2-3.5 Mounting hole 300 300 15.5 P = 10 1 2 3 4 5 n U side D side 40.2 15.5 46.2 19.4 A A 9.5 16.7 P = 10 n-M5 x 0.8 A port Dimensions Formula: L1 = 10n + 21, L2 = 10n + 7, n: Station (Max. 20 stations) n L L1 L2 2 41 27 3 51 37 4 61 47 5 71 57 6 81 67 7 91 77 8 9 10 121 107 11 131 117 12 141 127 13 151

CATALOG

Fluid Pressure 5~60C / 40~140F 5~60C / 40~140F 5~60C / 40~140F 5~60C / 40~140F Operating Pressure Range MPa / PSI 0.2~0.7MPa / 29~102PSI 0.15~0.7MPa / 22~102PSI 0.15~0.7MPa / 22~102PSI 0.15~1.0MPa / 22~145PSI Stable Rotation Time Regulation Range sec/90 0.07~0.3 0.07~0.3 0.07~0.3 0.07~0.3 60N Allowable Radial Load 20N 40N 50N 80N 15N 30N 60N Allowable Thurst Load (note 2) Axial Load 40N 10N

AC Servo Motor Driver (Pulse input type/Positioning type ）

Command notch filter setting frequency Depth Setting Setting Setting Setting Frequency Frequency Frequency [dB] [Hz] [Hz] [Hz] value value value value 0 1 2 3 4 5 6 7 8 9 -40.0 -24.1 -18.1 -14.5 -12.0 -10.1 00 01 02 03 Disabled 20 21 22 23 24 25 26 27 28 29 70 66 62 59 56 53 51 48 46 45 43 41 40 38 37 36 40 41 42 43 44 45 46 47 48 49 4A 4B 4C 4D 4E 4F 50 51 52 53 54 55 56 57 58 59 5A 5B 5C 5D

LEC-OM071xx

Unit Remark Reference unit/s (default) 10n [reference unit/s] can be set. Reference unit/min 10n [reference unit/min] can be set. "%" of rated speed 10n [%] can be set. min1 (rpm) 10n [min1] can be set. Max. motor speed/40 (Hex.) Set "0" for common parameter 42. (2) Position The following units can be selected. Settings are made with common parameters 43 and 44.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Model C Mounting bolt CDQP2B12-5D -10D -15D -20D -25D -30D CDQP2B16-5D -10D -15D -20D -25D -30D CDQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQP2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D Model C Mounting bolt CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-

CQ2

Mounting bolt Mounting bolt CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D Mounting bolt CDQP2B12-5D -10D -15D -20D -25D -30D CDQP2B16-5D -10D -15D -20D -25D -30D CDQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQP2B25-5D -10D -

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Model C Mounting bolt CDQP2B12-5D -10D -15D -20D -25D -30D CDQP2B16-5D -10D -15D -20D -25D -30D CDQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQP2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D Mounting bolt CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-10D -15D

V

(Except DIN Electrical Entry is not possible) 3 5 7 V O LTA G E B AC24v (Not VT325v) 3 AC110v (Not VT325v) 5 DC24v 6 DC12v (Not VT325v) 7 AC230v (Not VT325v) Refer to Series VT307/327 E L E C T R I C A L E N T R Y VZ100 S E R I E S (S E E V A LV E S E C T I O N) H O W T O O R D E R SY/SX B A S E M O U N T E D S E R I E S (T O S U I T T Y P E 42 M A N I F O L D S) External Pilot Types VG342R

Vacuum System Peripherals:

specifications Port size Solenoid valve , VS3115 1 8 1 4 3.8 4.0 9.0 20 , VS3110 1 4 3 8 Body ported , , , 1 2 3 4 VS3135 1 4 1 2 3 8 VS3145 Series VS 3 port solenoid valve Model/Rubber Seal Series VG342 Flow characteristics C (dm3/(sbar)) Effective area (mm2) (Cv) Piping specifications Port size Solenoid valve 210 210 1 2 to 26 to 38 26 to 38 3 4 VG342 1 Body ported 1 2 1 to 3 4 For Vacuum: VG342R

NCQ2/CQ2

CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B12-5D -10D -15D -20D -25D -30D CDQP2B16-5D -10D -15D -20D -25D -30D CDQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQP2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D 40

Compact Cylinder

CQP2B12-5D -10D -15D -20D -25D -30D CQP2B16-5D -10D -15D -20D -25D -30D CQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQP2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQP2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQP2B63-10D

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

VV3Q11 (L5) (L4) (L3) (8.5) 88 L2 48.7 L1 Plug ass'y VVQ100-12A2 3 1 (35) (45) 33 (5.5) 23.5 12.3 E 3 2 R11(Min. bending inner radius) 21.5 Manual override (29.3) 104 D side U side Stations 1 2 3 4 5 n 2-M50.8(E port) 2-M50.8(P port) 42.9 A A (8.5) 20 5 15 (7.5) 5 (A port) n-M50.8 15 P=10 Dimensions n: Stations(Max.18 stations) Equation : L1=10n+32 L2=10n+43 n L 2 52 63 83 112.5 123 3 62