V

P Q R S 4 4 20.6 15.6 10.4 6 6 21.6 16.6 12.8 F L AT T Y P E F L AT W I T H R I B Y Model A B C D E F G H I Flat Flat with Rib ZPR20 20 23 14 29 39.8 57.6 68.6 91.5 102.6 4 1.7 ZPR25 25 28 14 29 39.8 57.6 68.6 91.5 102.6 4 1.8 ZPR32 32 35 14.5 29.5 40.3 58.1 69.1 92 103.1 4.5 23 D E E P T Y P E Model A B C D E F G H I Y ZPR25D 25 28 20 35 45.8 63.6 74.6 97.6 108.6 10 A P P L I C A B L E T

Vacuum System Peripherals:

m t r e w q U side D side 13-14-26 26 e Valve Model SX340 is for internal pilot.

3 Port Solenoid Valve/

M12 connector pin number X X VP544(R)/744(R)-X538 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) 1(P) 1(P) 1(P) X X VP544(R)/744(R)-X555 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r 3(R) w q e 3(R) w q e w q e

3 Port Solenoid Valve/

M12 connector pin number X X VP544(R)/744(R)-X538 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) 1(P) 1(P) 1(P) X X VP544(R)/744(R)-X555 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r 3(R) w q e 3(R) w q e w q e

Compact Cylinder

Flange bracket material: Carbon steel Surface treatment: Nickel plated 18 Series CQ2 Accessory Brackets Single Knuckle Joint Double Knuckle Joint I-G012, I-Z015A I-G02, I-G03 I-G04, I-G05 I-G08, I-G10 Y-G012, Y-Z015A Y-G02, Y-G03 Y-G04, Y-G05 Y-G08, Y-G10 ND hole H10 Axis d9 ND hole H10 Axis d9 Material: Carbon steel Surface treatment: Nickel plated Material: Cast iron Surface treatment

NCQ2/CQ2

Mounting and Auto Switches Made to Order 177 Compact Cylinder Series (N)CQ2 Mounting Brackets Accessory Brackets Single Knuckle Joint Double Knuckle Joint I-G012, I-Z015A I-G02, I-G03 I-G04, I-G05 I-G08, I-G10 Y-G012, Y-Z015A Y-G02, Y-G03 Y-G04, Y-G05 Y-G08, Y-G10 ND Hole H10 Axis d9 ND Hole H10 Axis d9 NDH10 MM MM NDH10 NX MM MM L RR1 RR1 RR1 RR1 E1 E1 E1 E1 NX A1 U1 A1 U1 A1 U1 A1 U1 NX

2

-A 0.3 Outlet pressure (MPa) 0.25 Set point 0.2 0.15 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure (MPa) 203 Filter Regulator Series AW10-A to AW40-A Construction AW10-A AW20-A AW30-A to AW40-06-A Modular F.R.L. w w AC-A w t y AC-B t q q q IN OUT IN OUT IN OUT r y y e u e r t u r i u Drain Drain Drain Component Parts No.

ZP

Y q Pad dia.

1

Connector for unit (Plug) 6 y t y t EX600-DXB EX600-DYB EX600-DXC q w q w e q w er e y t y t y t EX600-DXD EX600-DXE EX600-DYE EX600-DME EX600-DXF EX600-DYF EX600-DMF Analog Unit q w e q w e No.

Table of Contents

-06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 (Mounting hole) Applicable tubing diameter M I J K L M N O P Model ZH05BS-06-06 ZH05BL-06-06 ZH07BS-06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 60 12.8 3.2 26 5.8 2 32 60 12.8 3.2 26 5.8 2 32 75 15.3 4.2 28 7.5

Table of Contents

q q e IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Component Parts Material No.

ZP

Note 3) ZP3-Y(04/06/08)UM;(J/K)3-@ ZP3-Y(04/06/08)B;(J/K)3-@ ZP3-Y(04/06/08)UM;(J/K)6-@ ZP3-Y(04/06/08)B;(J/K)6-@ ZP3-Y(04/06/08)UM;(J/K)10-@ ZP3-Y(04/06/08)B;(J/K)10-@ ZP3-Y(04/06/08)UM;(JB/K)15-@ ZP3-Y(04/06/08)B;(JB/K)15-@ ZP3-Y(04/06/08)UM;(JB/K)20-@ ZP3-Y(04/06/08)B;(JB/K)20-@ ZP3B-Y2B(J/K)6-B5 ZP3B-Y2B(J/K)10-B5 ZP3B-Y2B(JB/K)15-B5 ZP3B-Y2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08

ZP

Note 3) ZP3-Y(04/06/08)UM;(J/K)3-@ ZP3-Y(04/06/08)B;(J/K)3-@ ZP3-Y(04/06/08)UM;(J/K)6-@ ZP3-Y(04/06/08)B;(J/K)6-@ ZP3-Y(04/06/08)UM;(J/K)10-@ ZP3-Y(04/06/08)B;(J/K)10-@ ZP3-Y(04/06/08)UM;(JB/K)15-@ ZP3-Y(04/06/08)B;(JB/K)15-@ ZP3-Y(04/06/08)UM;(JB/K)20-@ ZP3-Y(04/06/08)B;(JB/K)20-@ ZP3B-Y2B(J/K)6-B5 ZP3B-Y2B(J/K)10-B5 ZP3B-Y2B(JB/K)15-B5 ZP3B-Y2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

Table of Contents

0, Metal joint q, w, Terminal i, O-ring e, r, t, y, u, Receptacle assembly Plug-in type 04 06 VVFS5000-1A-1!0 Manifold block assembly 04 06 Manifold block !0, Metal joint q, w, O-ring e, r, t, y, u Non plug-in type End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u End plate (D) !

Modular F.R.L. Units

When the above factors are present, or there is some doubt, use a metal bowl for safety. 86 AL10-A to AL60-A Series Construction AL10-A AL20-A w q t w q e OUT IN OUT IN y r u y u AL30-A/AL40-A AL50-A/AL60-A w q t w q t e e IN OUT IN OUT r y u r i y u Component Parts No.

Table of Contents

2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

AC

Model Description For AC1020 For AC2020 For AC2520 For AC3020 For AC4020 For AC4020-06 For AC5020 For AC5520 For AC6020 02 03 04 06 01 02 03 02 03 04 02 03 04 E30E20E30E6006 10 E6006 10 E10-M5 E6006 10 E50-06 E40Piping adapter 4 4 4 4 Y Pressure switch with piping adapter 02 03 04 06 2 2 2 Y 01 02 03 3 3 3 Y IS1000E02 03 04 02 03 04 3 3 3 Y IS1000EIS1000EIS1000EAttachment Accessory IS1000M

Best Pneumatics Vol. 14

q q e IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Component Parts Material No.

Table of Contents

w e r t y No. q w e r t y u i o !