Table of Contents

1 i q !4 r e !0 !1 q i !2 o !3 y Component Parts No.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

4 u t t q t u y !3 u e !3 !8 t y e !2 !1 !3 !6 r A A A A !4 i u q i !4 r y t y !2 o !5 r u t q !5 e i o !2 r Component Parts No. Description Material Note No. Description Material Note Body A O-ring PBT NBR q !3 Elbow body O-ring PBT NBR w !4 Body B O-ring Electroless nickel plated Brass NBR e !5 Body B O-ring Electroless nickel plated Brass NBR r !

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !1 Meter-in type Meter-in type M5 type U10/32 type M5 type U10/32 type 15-9-94 Tamper Proof Speed Controller With One-touch Fitting, Elbow Type/Universal Type Construction Elbow type Meter-out type Universal type Meter-out type AS3201F-02 AS3301F-02 i w o !6 !

AS

2 t i q o !0 !1 i q o !0 !1 Component Parts No. Material Note No.

Compact Cylinder

L F K M E J (Port size) L Q Q B + Stroke B + Stroke A + Stroke A + Stroke W End Lock Mechanism Dimensions (mm) HN (Max.)

NCQ2/CQ2

L F K M E J L Q Q A + Stroke B + Stroke A + Stroke B + Stroke W End Lock Mechanism Dimensions (mm) HN (Max.)

V

NUMBER OF STATIONS 02 . . . .2 Stations 20 . . .20 Stations OTHER MANIFOLD OPTIONS FOR SERIES VQZ: DIN RAIL FITTING BLANK PLUG EXH PORT SILENCER LATCHING SOLENOID TYPE LATCHING TYPE VALVE LATCHING TYPE VALVE / MANUAL OVERRIDE H O W T O O R D E R S E R I E S V Q Z V A L V E MANIFOLD OPTION PARTS: PERFECT CHECK BLOCK PERFECT CHECK BLOCK WITH VALVE OR MANIFOLD V Q Z 2 5 C SYMBOL 1 .

Vacuum System Peripherals:

m t r e w q U side D side 13-14-26 26 e Valve Model SX340 is for internal pilot.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !1 Meter-in type Meter-in type M5 type U10/32 type M5 type U10/32 type 15-9-94 4 Tamper Proof Speed Controller With One-touch Fitting, Elbow Type/Universal Type Construction Elbow type Meter-out type Universal type Meter-out type AS3201F-02 AS3301F-02 i w o !6 !

V

P Q R S 4 4 20.6 15.6 10.4 6 6 21.6 16.6 12.8 F L AT T Y P E F L AT W I T H R I B Y Model A B C D E F G H I Flat Flat with Rib ZPR20 20 23 14 29 39.8 57.6 68.6 91.5 102.6 4 1.7 ZPR25 25 28 14 29 39.8 57.6 68.6 91.5 102.6 4 1.8 ZPR32 32 35 14.5 29.5 40.3 58.1 69.1 92 103.1 4.5 23 D E E P T Y P E Model A B C D E F G H I Y ZPR25D 25 28 20 35 45.8 63.6 74.6 97.6 108.6 10 A P P L I C A B L E T

3 Port Solenoid Valve/

M12 connector pin number Wiring specification w r q e w w q e e r q r VG342(R)-X87 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) w r w r w r q e q e q e 3(R) 3(R) 3(R) w r w r w r q e q e q e 3(R) 3(R) 3(R) 1(P) X X Safety limit switch terminal [N.C.]

3 Port Solenoid Valve/

M12 connector pin number Wiring specication w r q e w w q e e r q r VG342(R)-X87 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) w r w r w r q e q e q e 3(R) 3(R) 3(R) w r w r w r q e q e q e 3(R) 3(R) 3(R) 1(P) X X Safety limit switch terminal [N.C.]

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

0, Terminal i, Metal joint q, w, Gasket r, Receptacle assembly Manifold block !0, Metal joint q, w, Gasket r End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, Gasket e, t, O-ring y, u End plate (D) !

Dual Speed Controller with One-touch Fitting Series ASD

4 u t t q t u y !3 u e !3 !8 t y e !2 !1 !3 !6 r A A A A !4 i u q i !4 r y t y !2 o !5 r u t q !5 e i o !2 r Component Parts No. Description Material Note No. Description Material Note Body A O-ring PBT NBR q !3 Elbow body O-ring PBT NBR w !4 Body B O-ring Electroless nickel plated Brass NBR e !5 Body B O-ring Electroless nickel plated Brass NBR r !

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Low Vacuum Compatible / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: [Others] 2 positions universal, Pipe Port Type: NPTF, Port Size: 3/4, Pressure Rating(MPa): -0.1 to 0.9,

Pilot: R (External Pilot), Voltage: 5 (24VDC), Lead Wire: D (DIN Connector), Surge Suppressor: Z (Light & Surge Suppressor), Port Size: 06 (3/4), Thread: T (NPTF)

This is a legacy product, and replaced byVFR5310-5DZ-04F-Q, Type of actuationModelPort sizeFlow characteristics (1)Max. (2)operating cycle(Hz)Response (3) time (ms)(4)(kg) Plug-inNon plug-in1 4/2 (P A/B)4/2 5/3 (A/B EA/EB) C [dm3/(s?bar)]bCvC [dm3/(s?bar)]bCv3 positionClosed centerVFR530VFR5313/8150.384.1160.314.3380 or less1.87(1.82)

This is a legacy product, and replaced byVT317-5DZ-02F-Q

This is a legacy product, and replaced byVFS5110-5DZ-04F-Q

This is a legacy product, and replaced byVFS4210-5DZ-Q